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1. 发明申请

US20080138517A1 ORGANIC/INORGANIC THIN FILM DEPOSITION DEVICE AND DEPOSITION METHOD 有权
公开(公告)号：US20080138517A1
公开(公告)日：2008-06-12
申请号：US11950606
申请日：2007-12-05
申请人： Seong Deok AHN , Seung Youl KANG , Chul Am KIM , Ji Young OH , In Kyu YOU , Gi Heon KIM , Kyu Ha BAEK , Kyung Soo SUH
发明人： Seong Deok AHN , Seung Youl KANG , Chul Am KIM , Ji Young OH , In Kyu YOU , Gi Heon KIM , Kyu Ha BAEK , Kyung Soo SUH
IPC分类号： C23C16/455
CPC分类号： C23C16/45523 , B05D1/60 , C23C16/4408
摘要： Provided are a device for depositing an organic/inorganic thin film and a deposition method thereof. The method includes: i) heating a source vessel containing an organic material and an inorganic material to generate at least one deposition gas phase of the organic and inorganic materials; ii) transferring one of the deposition gas phases of the organic and inorganic materials to a process chamber through a transfer path maintaining a constant temperature so as to prevent the generated deposition gas phases of the organic/inorganic materials from being condensed; iii) distributing one of the deposition gas phases of the organic and inorganic materials transferred to the process chamber onto a substrate disposed in the process chamber to adsorb one of the organic and inorganic materials on the substrate; iv) purging the process chamber using a diluted gas and a transfer gas after one of the organic and inorganic materials is adsorbed on the substrate; v) heating an activating agent source vessel containing an activation heat initiator capable of activating a monomer of one of the deposition gas phases of the organic and inorganic materials to generate a heat initiator gas phase; vi) transferring the heat initiator gas phase to the process chamber through a transfer path maintaining a constant temperature so as to prevent the heat initiator gas phase from being condensed; vii) distributing the heat initiator gas phase transferred to the process chamber onto the organic or inorganic material monomer deposited on the substrate through the process chamber maintaining a constant temperature so as to prevent the heat initiator gas phase from being condensed in a shower head, and forming an organic/inorganic thin film; and viii) exhausting the heat initiator gas phase remaining after the organic/inorganic thin film is deposited on the substrate from the process chamber, and purging the process chamber using the diluted gas and the transfer gas. Therefore, according to the method of depositing the organic/inorganic thin film in a time-division manner, the thickness of the thin film can be accurately adjusted and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate.

2. 发明申请

US20100300360A1 ORGANIC/INORGANIC THIN FILM DEPOSITION DEVICE AND DEPOSITION METHOD 审中-公开
标题翻译：有机/无机薄膜沉积装置和沉积方法
公开(公告)号：US20100300360A1
公开(公告)日：2010-12-02
申请号：US12856004
申请日：2010-08-13
申请人： Seong Deok AHN , Seung Youl KANG , Chul Am KIM , Ji Young OH , In Kyu YOU , Gi Heon KIM , Kyu Ha BAEK , Kyung Soo SUH
发明人： Seong Deok AHN , Seung Youl KANG , Chul Am KIM , Ji Young OH , In Kyu YOU , Gi Heon KIM , Kyu Ha BAEK , Kyung Soo SUH
IPC分类号： C23C16/46
CPC分类号： C23C16/45523 , B05D1/60 , C23C16/4408
摘要： Provided is a method for depositing an organic/inorganic thin film. The method includes: i) heating a source vessel containing an organic material and an inorganic material; ii) transferring a deposition gas to a process chamber; iii) distributing the deposition gas onto a substrate disposed in the process chamber; iv) purging the process chamber; v) heating an activating agent source vessel; vi) transferring a heat initiator gas phase to the process chamber; vii) distributing the heat initiator gas phase onto the organic or inorganic material monomer deposited on the substrate through the process chamber, and forming an organic/inorganic thin film; and viii) exhausting the heat initiator gas phase and purging the process chamber. Depositing the organic/inorganic thin film in a time-division manner, the thickness of the thin film can be accurately adjusted and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate.
摘要翻译：提供一种沉积有机/无机薄膜的方法。该方法包括：i）加热含有机材料和无机材料的源容器; ii）将沉积气体转移到处理室; iii）将沉积气体分配到设置在处理室中的基板上; iv）清洗处理室; v）加热活化剂源容器; vi）将热引发剂气相转移到所述处理室; vii）通过处理室将热引发剂气相分配到沉积在基材上的有机或无机材料单体上，形成有机/无机薄膜; 和viii）排出热引发剂气相并清洗处理室。以时分方式沉积有机/无机薄膜，可以精确地调节薄膜的厚度，并且当薄膜沉积在大型基底上时能够均匀地进行沉积。

3. 发明申请

US20090188530A1 METHOD OF CLEANING FLEXIBLE SUBSTRATE 审中-公开
标题翻译：清洁柔性基板的方法
公开(公告)号：US20090188530A1
公开(公告)日：2009-07-30
申请号：US12418692
申请日：2009-04-06
申请人： Gi Heon KIM , Kyung Soo SUH , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Chul Am KIM
发明人： Gi Heon KIM , Kyung Soo SUH , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Chul Am KIM
IPC分类号： B08B3/02
CPC分类号： B08B7/0028 , B08B11/00 , C03B35/168 , Y02P40/57
摘要： Provided is a method of cleaning a flexible substrate. The method includes the steps of: preparing a flexible substrate and detaching an impurity adhered to both surfaces of the flexible substrate using rotating first rollers disposed on the both surfaces of the flexible substrate; and removing the impurity by transferring the impurity from the first roller to a second roller using the rotating second roller having a relatively higher adhesion than the first roller.
摘要翻译：提供了一种清洁柔性基板的方法。该方法包括以下步骤：使用设置在柔性基板的两个表面上的旋转第一辊来制备柔性基板并分离附着在柔性基板的两个表面上的杂质; 并且通过使用具有比第一辊更高粘合力的旋转第二辊将杂质从第一辊转移到第二辊来除去杂质。

4. 发明申请

US20080135063A1 METHOD OF CLEANING FLEXIBLE SUBSTRATE 有权
标题翻译：清洁柔性基板的方法
公开(公告)号：US20080135063A1
公开(公告)日：2008-06-12
申请号：US11944673
申请日：2007-11-26
申请人： Gi Heon KIM , Kyung Soo SUH , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Chul Am KIM
发明人： Gi Heon KIM , Kyung Soo SUH , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Chul Am KIM
IPC分类号： B08B7/00
CPC分类号： B08B7/0028 , B08B11/00 , C03B35/168 , Y02P40/57
摘要： Provided is a method of cleaning a flexible substrate. The method includes the steps of: preparing a flexible substrate and detaching an impurity adhered to both surfaces of the flexible substrate using rotating first rollers disposed on the both surfaces of the flexible substrate; and removing the impurity by transferring the impurity from the first roller to a second roller using the rotating second roller having a relatively higher adhesion than the first roller.
摘要翻译：提供了一种清洁柔性基板的方法。该方法包括以下步骤：使用设置在柔性基板的两个表面上的旋转第一辊来制备柔性基板并分离附着在柔性基板的两个表面上的杂质; 并且通过使用具有比第一辊更高粘合力的旋转第二辊将杂质从第一辊转移到第二辊来除去杂质。

5. 发明申请

US20080063795A1 INSULATING LAYER, ORGANIC THIN FILM TRANSISTOR USING THE INSULATING LAYER, AND METHOD OF FABRICATING THE ORGANIC THIN FILM TRANSISTOR 有权
标题翻译：绝缘层，使用绝缘层的有机薄膜晶体管，以及制造有机薄膜晶体管的方法
公开(公告)号：US20080063795A1
公开(公告)日：2008-03-13
申请号：US11782889
申请日：2007-07-25
申请人： Gi Heon KIM , Sung Min YOON , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Kyung Soo SUH
发明人： Gi Heon KIM , Sung Min YOON , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Kyung Soo SUH
IPC分类号： C08F120/06 , B05D5/12 , C08F120/44 , C08K3/22 , C08K3/36
CPC分类号： H01L21/02118 , C08F120/00 , C08F120/10 , C08F120/44 , H01L21/02164 , H01L21/02186 , H01L21/02194 , H01L21/02197 , H01L21/02282 , H01L21/312 , H01L21/31691 , H01L51/0537
摘要： Provided is an insulating layer in which an inorganic material is added to an organic polymer to thereby improve the insulating properties, an organic thin film transistor using the insulating layer, and a method of fabricating the organic thin film transistor. An insulating layer for an organic thin film transistor including a vinyl polymer and an inorganic material is provided. Here, a weight ratio of the vinyl polymer to the inorganic material may be in the range of 1:0.0001 to 1:0.5. Accordingly, it is possible to fabricate a thin film at low temperature and, further, to fabricate an insulating layer having a high-dielectric constant, not affecting other layers formed in the previous processes during the formation of the insulating layer.
摘要翻译：提供一种绝缘层，其中无机材料被添加到有机聚合物中以提高绝缘性能，使用该绝缘层的有机薄膜晶体管以及制造该有机薄膜晶体管的方法。提供了包含乙烯基聚合物和无机材料的有机薄膜晶体管的绝缘层。这里，乙烯基聚合物与无机材料的重量比可以在1：0.0001〜1:0.5的范围内。因此，可以在低温下制造薄膜，并且还可以制造绝缘层，该绝缘层具有高介电常数，不影响在形成绝缘层期间的以前工艺中形成的其它层。

6. 发明申请

US20080223509A1 ADHESIVE FILM AND METHOD OF FABRICATING FLEXIBLE DISPLAY USING THE SAME 审中-公开
标题翻译：粘合膜和使用其制造柔性显示器的方法
公开(公告)号：US20080223509A1
公开(公告)日：2008-09-18
申请号：US12129848
申请日：2008-05-30
申请人： Gi Heon KIM , Yong Hae KIM , In Kyu YOU , Kyu Ha BAEK , Seung Youl KANG , Seong Deok AHN , Kyung Soo SUH
发明人： Gi Heon KIM , Yong Hae KIM , In Kyu YOU , Kyu Ha BAEK , Seung Youl KANG , Seong Deok AHN , Kyung Soo SUH
IPC分类号： B32B38/10
CPC分类号： B32B7/12 , B32B3/085 , B32B7/06 , B32B15/08 , B32B17/00 , B32B17/064 , B32B27/08 , B32B27/281 , B32B27/283 , B32B27/32 , B32B27/36 , B32B27/365 , B32B2307/202 , B32B2307/54 , B32B2405/00 , B32B2457/20 , Y10T428/28 , Y10T428/2848
摘要： An adhesive film and a method of fabricating a flexible display using the same are provided. The adhesive film includes: a support including a first surface disposed opposite to a flexible substrate for forming an image display element and a second surface disposed opposite to a support substrate for supporting the flexible substrate; a first adhesive material applied on the first surface of the support; and a second adhesive material applied on the second surface of the support and having a greater adhesive strength than the first adhesive material. The flexible substrate can be easily detached from the support substrate, so that the flexible display can be realized in various sizes and thicknesses using existing equipment without modification of mass-production equipment for realizing the flexible display.
摘要翻译：提供了一种粘合膜和使用其制造柔性显示器的方法。粘合膜包括：支撑体，其包括与用于形成图像显示元件的柔性基板相对设置的第一表面和与用于支撑柔性基板的支撑基板相对设置的第二表面; 施加在所述支撑体的第一表面上的第一粘合剂材料; 以及施加在所述支撑件的第二表面上并且具有比所述第一粘合材料更大的粘合强度的第二粘合剂材料。柔性基板可以容易地从支撑基板分离，使得可以使用现有设备实现各种尺寸和厚度的柔性显示器，而无需修改用于实现柔性显示的大规模生产设备。

7. 发明申请

US20120001159A1 INSULATING LAYER, ORGANIC THIN FILM TRANSISTOR USING THE INSULATING LAYER, AND METHOD OF FABRICATING THE ORGANIC THIN FILM TRANSISTOR 审中-公开
标题翻译：绝缘层，使用绝缘层的有机薄膜晶体管，以及制造有机薄膜晶体管的方法
公开(公告)号：US20120001159A1
公开(公告)日：2012-01-05
申请号：US13233377
申请日：2011-09-15
申请人： Gi Heon KIM , Sung Min YOON , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Kyung Soo SUH
发明人： Gi Heon KIM , Sung Min YOON , Kyu Ha BAEK , In Kyu YOU , Seung Youl KANG , Seong Deok AHN , Kyung Soo SUH
IPC分类号： H01L51/10 , H01L29/51
CPC分类号： H01L21/02118 , C08F120/00 , C08F120/10 , C08F120/44 , H01L21/02164 , H01L21/02186 , H01L21/02194 , H01L21/02197 , H01L21/02282 , H01L21/312 , H01L21/31691 , H01L51/0537
摘要： Provided is an insulating layer in which an inorganic material is added to an organic polymer to thereby improve the insulating properties, an organic thin film transistor using the insulating layer, and a method of fabricating the organic thin film transistor. An insulating layer for an organic thin film transistor including a vinyl polymer and an inorganic material is provided. Here, a weight ratio of the vinyl polymer to the inorganic material may be in the range of 1:0.0001 to 1:0.5. Accordingly, it is possible to fabricate a thin film at low temperature and, further, to fabricate an insulating layer having a high-dielectric constant, not affecting other layers formed in the previous processes during the formation of the insulating layer.
摘要翻译：提供一种绝缘层，其中无机材料被添加到有机聚合物中以提高绝缘性能，使用该绝缘层的有机薄膜晶体管以及制造该有机薄膜晶体管的方法。提供了包含乙烯基聚合物和无机材料的有机薄膜晶体管的绝缘层。这里，乙烯基聚合物与无机材料的重量比可以在1：0.0001〜1:0.5的范围内。因此，可以在低温下制造薄膜，并且还可以制造绝缘层，该绝缘层具有高介电常数，不影响在形成绝缘层期间的以前工艺中形成的其它层。

8. 发明申请

US20120000602A1 METHOD OF STACKING FLEXIBLE SUBSTRATE 失效
标题翻译：堆叠柔性基板的方法
公开(公告)号：US20120000602A1
公开(公告)日：2012-01-05
申请号：US13231266
申请日：2011-09-13
申请人： Gi Heon KIM , Yong Hae KIM , Dong Jin PARK , Chul Am KIM , Kyung Soo SUH
发明人： Gi Heon KIM , Yong Hae KIM , Dong Jin PARK , Chul Am KIM , Kyung Soo SUH
IPC分类号： B32B37/00 , B32B37/12 , B32B37/10
CPC分类号： H01L27/1266 , C09J5/00 , C09J2400/143 , C09J2400/226 , C09J2423/006 , C09J2467/006 , C09J2479/086 , G02F1/133305 , H01L27/1214 , H01L27/1218 , H01L29/78603 , Y10T156/10
摘要： A method of stacking a flexible substrate is provided. The method includes the steps of: preparing a carrier substrate; stacking an adhesive layer on the carrier substrate; and stacking a flexible substrate having at least one image display device on the adhesive layer using a laminating or pressing method. Thus, the flexible substrate is easily fabricated without modification of conventional mass-production equipment for fabricating a display, and thereby a lightweight, thin, and compact flexible display can be realized.
摘要翻译：提供了一种堆叠柔性基板的方法。该方法包括以下步骤：制备载体衬底; 在载体基板上堆叠粘合剂层; 并且使用层压或压制方法将具有至少一个图像显示装置的柔性基板堆叠在粘合剂层上。因此，可以容易地制造柔性基板，而无需修改用于制造显示器的常规大规模生产设备，从而可以实现轻量级，薄型和紧凑的柔性显示器。

9. 发明申请

US20080053604A1 METHOD OF STACKING FLEXIBLE SUBSTRATE 有权
标题翻译：堆叠柔性基板的方法
公开(公告)号：US20080053604A1
公开(公告)日：2008-03-06
申请号：US11774855
申请日：2007-07-09
申请人： Gi Heon KIM , Yong Hae KIM , Dong Jin PARK , Chul Am KIM , Kyung Soo SUH
发明人： Gi Heon KIM , Yong Hae KIM , Dong Jin PARK , Chul Am KIM , Kyung Soo SUH
IPC分类号： C09J5/00 , B29C70/44
CPC分类号： H01L27/1266 , C09J5/00 , C09J2400/143 , C09J2400/226 , C09J2423/006 , C09J2467/006 , C09J2479/086 , G02F1/133305 , H01L27/1214 , H01L27/1218 , H01L29/78603 , Y10T156/10
摘要： A method of stacking a flexible substrate is provided. The method includes the steps of: preparing a carrier substrate; stacking an adhesive layer on the carrier substrate; and stacking a flexible substrate having at least one image display device on the adhesive layer using a laminating or pressing method. Thus, the flexible substrate is easily fabricated without modification of conventional mass-production equipment for fabricating a display, and thereby a lightweight, thin, and compact flexible display can be realized.
摘要翻译：提供了一种堆叠柔性基板的方法。该方法包括以下步骤：制备载体衬底; 在载体基板上堆叠粘合剂层; 并且使用层压或压制方法将具有至少一个图像显示装置的柔性基板堆叠在粘合剂层上。因此，可以容易地制造柔性基板，而无需修改用于制造显示器的常规大规模生产设备，从而可以实现轻量级，薄型和紧凑的柔性显示器。

10. 发明申请

US20080135947A1 ORGANIC INVERTER INCLUDING SURFACE-TREATED LAYER AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：包括表面处理层的有机逆变器及其制造方法
公开(公告)号：US20080135947A1
公开(公告)日：2008-06-12
申请号：US11931461
申请日：2007-10-31
申请人： Jae Bon KOO , Kyung Soo SUH , Seong Hyun KIM
发明人： Jae Bon KOO , Kyung Soo SUH , Seong Hyun KIM
IPC分类号： H01L51/10 , H01L51/40
CPC分类号： H01L27/283 , H01L51/0545
摘要： An organic inverter and a method of manufacturing the same are provided, which regulates threshold voltages depending on positions when an inverter circuit is manufactured on a substrate using an organic semiconductor. To form a depletion load transistor and an enhancement driver transistor at adjacent positions of the same substrate, the surface of the substrate is selectively treated by positions or selectively applied by self-assembly monolayer treatment. Thus, a D-inverter having a combination of a depletion mode and an enhancement mode is more easily realized than a conventional method using a transistor size effect. Also, the D-inverter can be realized even with the same W/L ratio, thereby increasing integration density. That is, the W/L ratio does not need to be increased to manufacture a depletion load transistor, thereby improving integration density.
摘要翻译：提供一种有机逆变器及其制造方法，其根据使用有机半导体在基板上制造逆变器电路时的位置来调节阈值电压。为了在同一衬底的相邻位置处形成耗尽负载晶体管和增强驱动晶体管，衬底的表面被选择性地处理，或通过自组装单层处理选择性地施加。因此，与使用晶体管尺寸效应的传统方法相比，更容易实现具有耗尽模式和增强模式的组合的D逆变器。此外，即使以相同的W / L比率也能够实现D逆变器，从而提高集成密度。也就是说，不需要增加W / L比来制造耗尽负载晶体管，从而提高集成密度。

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