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    • 1. 发明授权
    • Physical quantity measuring method and device therefor
    • 物理量测量方法及其装置
    • US07280220B2
    • 2007-10-09
    • US10489782
    • 2002-09-18
    • Seiichiro KinugasaKeiji MiyazawaTakaaki Kuroiwa
    • Seiichiro KinugasaKeiji MiyazawaTakaaki Kuroiwa
    • G01B9/02
    • G01D5/35303G01L9/0077G01L13/025
    • Light emitted by a light source is inputted to a sensor to generate an optical path difference on input light according to a physical parameter to be measured, light outputted with an optical path difference generated in response to the input is inputted to another sensor to generate an optical path difference on input light according to a physical parameter to be measured, and light outputted with an optical path difference generated in response to the input is split into two to generate an interference fringe. Due to the presence of light which is changed in optical path length in the first sensor, is inputted to the sensor of the subsequent stage, and is transmitted without being changed in optical path length, and light which is not changed in optical path length in the first sensor, is inputted to the sensor of the subsequent stage, and is transmitted after being changed in optical path length, an interference fringe is generated with an fringe located on a position corresponding to a difference value between physical parameters to be measured. Thus, a difference value between physical parameters is measured by detecting the position.
    • 由光源发出的光被输入到传感器,根据待测物理参数产生输入光的光路差,将输入的光路差产生的光输入到另一传感器,生成 根据要测量的物理参数的输入光的光程差,以及响应于输入而产生的光路差输出的光被分成两个,以产生干涉条纹。 由于在第一传感器中光路长度改变的光的存在被输入到后级的传感器,并且在不改变光路长度的情况下被传输,并且在光路长度上没有改变的光 第一传感器被输入到后级的传感器,并且在光路长度改变之后被传输,产生干涉条纹,其边缘位于与待测物理参数之间的差值相对应的位置上。 因此,通过检测位置来测量物理参数之间的差值。
    • 6. 发明授权
    • Capacitive pressure sensor
    • 电容式压力传感器
    • US5349492A
    • 1994-09-20
    • US994713
    • 1992-12-22
    • Shigeo KimuraYoshiyuki IshikuraTakashi MasudaTakaaki KuroiwaTakashi Kihara
    • Shigeo KimuraYoshiyuki IshikuraTakashi MasudaTakaaki KuroiwaTakashi Kihara
    • G01L9/12G01L9/00H01G7/00
    • G01L9/0075
    • A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire. The first and second substrates are bonded to each other at a temperature lower than the melting point of the substrate material without forming any bonding layer.
    • 电容式压力传感器包括第一和第二基板,凹槽以及第一和第二电极。 第一衬底由电绝缘材料组成。 第二基板由与第一基板相同的材料组成,并且具有直接接合到第一基板的周边部分。 凹槽形成在第一和第二基板之一的表面的中心部分中。 第一和第二基板通过凹槽彼此相对。 第一电极耦合到第一衬底的与第二衬底相对的表面,以便与第一衬底一起移动。 第二电极布置在第二基板的与第一基板相对的表面上,以平行于第一电极。 第一和第二衬底可以由石英玻璃或蓝宝石组成。 第一基板和第二基板在低于基板材料的熔点的温度下彼此结合,而不形成任何结合层。