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    • 4. 发明授权
    • Capacitive pressure sensor with multiple capacitive portions
    • 具有多个电容部分的电容式压力传感器
    • US06640643B2
    • 2003-11-04
    • US10196210
    • 2002-07-17
    • Seiichiro IshioYasutoshi SuzukiKeiichi ShimaokaHirofumi Funabashi
    • Seiichiro IshioYasutoshi SuzukiKeiichi ShimaokaHirofumi Funabashi
    • G01L912
    • G01L9/0042G01L9/0073
    • On a substrate, first and second capacitive portions are formed to have movable diaphragms having different areas for pressure measurement and diagnostic, wherein a communication structure is provided between the cavity spaces of the first and second capacitive portions to equalize the pressure in the first capacitive space to that of the second capacitive space. The different sizes provide different sensitivity for efficient diagnostic. The first and second capacitive portions can be made in one diaphragm, wherein the second capacitive portion is formed around the first capacitive portion. The cavity spaces of the first and second capacitive portions are connected. Moreover, between the first and second capacitive spaces, an insulation portion may be formed in a ring shape to support the diaphragm portion of the first capacitive portion and the diaphragm portion the second capacitive portion with communication portions.
    • 在基板上,第一和第二电容部分形成为具有用于压力测量和诊断的不同区域的可移动隔膜,其中在第一和第二电容部分的空腔之间设置有连通结构,以使第一电容空间 到第二电容空间。 不同的尺寸为有效的诊断提供不同的灵敏度。 第一和第二电容部分可以制成在一个隔膜中,其中第二电容部分围绕第一电容部分形成。 连接第一和第二电容部分的空腔。 此外,在第一和第二电容空间之间,绝缘部分可以形成为环形,以将第一电容部分的隔膜部分和隔膜部分支撑为具有连通部分的第二电容部分。
    • 7. 发明申请
    • Microphone and a method of manufacturing a microphone
    • 麦克风和制造麦克风的方法
    • US20060284516A1
    • 2006-12-21
    • US11448799
    • 2006-06-08
    • Keiichi ShimaokaHirofumi FunabashiYasuichi MitsushimaToshiaki NakagawaToshihiro WakitaShigeru AndoNobutaka Ono
    • Keiichi ShimaokaHirofumi FunabashiYasuichi MitsushimaToshiaki NakagawaToshihiro WakitaShigeru AndoNobutaka Ono
    • H01L41/00
    • H04R19/04H04R3/005
    • A microphone that may identify the direction along which acoustic waves propagate with one diaphragm, and which has superior durability is provided. The microphone comprises a circular diaphragm. The diaphragm is supported at the center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one of the surfaces of the diaphragm. Second electrodes are arranged so that each second electrode faces corresponding first electrode with gap. Each first electrode and corresponding second electrode facing thereto form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm. Fourth electrodes are arranged so that each fourth electrode faces corresponding third electrode with gap. Each third electrode and corresponding fourth electrode facing thereto form a second capacitor. The controller applies a voltage to each of the second capacitors so that the capacitance of each of the first capacitors will be a constant value. The controller identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors. Vibration of the diaphragm will be inhibited by the voltages applied to the second capacitors while the direction is identified based on the voltages. The durability of the diaphragm can be improved.
    • 提供可以识别声波以一个隔膜传播的方向并且具有优异的耐久性的麦克风。 麦克风包括圆形隔膜。 隔膜在其中心部分被支撑。 当隔膜接收到声波时,围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上。 第二电极布置成使得每个第二电极面对具有间隙的相应的第一电极。 每个第一电极和与其对应的相应的第二电极形成第一电容器。 第三电极布置在隔膜的另一个表面上。 第四电极布置成使得每个第四电极具有间隙的相应的第三电极。 每个第三电极和与其对应的相应的第四电极形成第二电容器。 控制器向每个第二电容器施加电压,使得每个第一电容器的电容将为恒定值。 控制器基于施加到每个第二电容器的电压的差异来识别声波传播的方向。 通过施加到第二电容器的电压来抑制振膜的振动,同时基于电压来识别方向。 可以提高隔膜的耐久性。
    • 8. 发明授权
    • Microphone and a method of manufacturing a microphone
    • 麦克风和制造麦克风的方法
    • US07888840B2
    • 2011-02-15
    • US11448799
    • 2006-06-08
    • Keiichi ShimaokaHirofumi FunabashiYasuichi MitsushimaToshiaki NakagawaToshihiro WakitaShigeru AndoNobutaka Ono
    • Keiichi ShimaokaHirofumi FunabashiYasuichi MitsushimaToshiaki NakagawaToshihiro WakitaShigeru AndoNobutaka Ono
    • H02N2/00H04R25/00
    • H04R19/04H04R3/005
    • A microphone that identifies the direction along which acoustic waves propagate with one diaphragm, and has superior durability is provided. The microphone includes a circular diaphragm supported at a center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one surface of the diaphragm and second electrodes are arranged facing corresponding first electrodes to form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm and fourth electrodes are arranged facing corresponding third electrodes to form a second capacitor. A controller applies a voltage to the second capacitors so that the capacitance of the first capacitors will be constant and identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors.
    • 一种麦克风,用于识别声波以一个隔膜传播的方向,并具有优异的耐久性。 麦克风包括在其中心部分处支撑的圆形隔膜。 当隔膜接收到声波时,围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上,并且第二电极被布置成面对相应的第一电极以形成第一电容器。 第三电极布置在隔膜的另一个表面上,第四电极被布置成面对相应的第三电极以形成第二电容器。 控制器向第二电容器施加电压,使得第一电容器的电容将是恒定的,并且基于施加到每个第二电容器的电压的差异来识别声波传播的方向。