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    • 8. 发明申请
    • DISPLAY DEVICE
    • 显示设备
    • US20080179597A1
    • 2008-07-31
    • US12013796
    • 2008-01-14
    • Shunpei YAMAZAKIIkuko KAWAMATAYasuyuki ARAI
    • Shunpei YAMAZAKIIkuko KAWAMATAYasuyuki ARAI
    • H01L33/00
    • H01L27/12G02F1/1345G02F1/13454H01L27/1233H01L29/78621
    • It is an object to provide a display device including a thin film transistor which can operate at high speed and is driven at a low voltage in a drive circuit region, and a thin film transistor having high voltage-resistance and high reliability in a pixel region. Accordingly, it is an object to provide a high reliable display device which consumes less power. A display device including a pixel region and a drive circuit region over a substrate having an insulating surface is provided. A thin film transistor is provided in each of the pixel region and the drive circuit region. A channel formation region in a semiconductor layer of the thin film transistor provided in the drive circuit region is formed to be locally thin, and the thickness of the channel formation region is smaller than that in the pixel region.
    • 本发明的目的是提供一种显示装置,其包括可以在驱动电路区域中以高速操作并以低电压驱动的薄膜晶体管,以及在像素区域中具有高电压和高可靠性的薄膜晶体管 。 因此,本发明的目的是提供一种消耗较少功率的高可靠性显示装置。 提供一种显示装置,其包括具有绝缘表面的基板上的像素区域和驱动电路区域。 在像素区域和驱动电路区域的每一个中设置薄膜晶体管。 设置在驱动电路区域中的薄膜晶体管的半导体层中的沟道形成区域局部变薄,并且沟道形成区域的厚度小于像素区域中的沟道形成区域。
    • 9. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20110017995A1
    • 2011-01-27
    • US12839519
    • 2010-07-20
    • Shunpei YAMAZAKIJunichiro SAKATAHiroyuki MIYAKEHideaki KUWABARAIkuko KAWAMATA
    • Shunpei YAMAZAKIJunichiro SAKATAHiroyuki MIYAKEHideaki KUWABARAIkuko KAWAMATA
    • H01L27/12H01L21/84H01L29/786
    • H01L27/1225H01L27/124
    • An object is to increase the aperture ratio of a semiconductor device. The semiconductor device includes a driver circuit portion and a display portion (also referred to as a pixel portion) over the same substrate. The driver circuit portion includes a channel-etched thin film transistor for a driver circuit, in which a source electrode and a drain electrode are formed using a metal and a channel layer is formed using an oxide semiconductor, and a driver circuit wiring formed using a metal. The display portion includes a channel protection thin film transistor for a pixel, in which a source electrode and a drain electrode are formed using an oxide conductor and a semiconductor layer is formed using an oxide semiconductor, and a display portion wiring formed using an oxide conductor. The thin film transistors provided in the semiconductor device are formed with a resist mask formed using a multi-tone mask.
    • 目的是提高半导体器件的开口率。 半导体器件包括驱动器电路部分和在同一衬底上的显示部分(也称为像素部分)。 驱动器电路部分包括用于驱动电路的沟道蚀刻薄膜晶体管,其中使用金属形成源电极和漏电极,并且使用氧化物半导体形成沟道层,以及使用 金属。 显示部分包括用于像素的沟道保护薄膜晶体管,其中使用氧化物导体形成源电极和漏电极,并且使用氧化物半导体形成半导体层,以及使用氧化物导体形成的显示部分布线 。 设置在半导体器件中的薄膜晶体管形成有使用多色调掩模形成的抗蚀剂掩模。