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    • 5. 发明授权
    • Linear motor, stage device, and exposing device
    • 直线电机,平台装置和曝光装置
    • US6043572A
    • 2000-03-28
    • US172163
    • 1998-10-14
    • Shingo NagaiToyoshige SasakiShigeto Kamata
    • Shingo NagaiToyoshige SasakiShigeto Kamata
    • H01L21/027G03F7/20H02K41/03H02K41/00
    • G03F7/70691H02K41/03
    • A linear motor includes a coil for receiving an electrical current and a first plurality of permanent magnets. The coil and the first plurality of permanent magnets move relative to each other in a direction of relative movement when an electrical current flows through the coil. The permanent magnets are arrayed in the direction of relative movement to form a first array. The direction of polarity of each permanent magnet in the first plurality of permanent magnets is oriented 90.degree. relative to the direction of polarity of an adjacent permanent magnet in the first plurality of permanent magnets. The first plurality of permanent magnets has a main portion and an end portion comprising plural corrective permanent magnets. Each of the plural corrective permanent magnets is smaller than the permanent magnets in the main portion having the same or opposite direction of polarity.
    • 线性电动机包括用于接收电流的线圈和第一多个永磁体。 当电流流过线圈时,线圈和第一多个永磁体在相对移动的方向上相对于彼此移动。 永磁体在相对移动的方向上排列以形成第一阵列。 第一多个永磁体中的每个永磁体的极性方向相对于第一多个永磁体中的相邻永磁体的极性方向取向为90度。 第一多个永磁体具有主要部分和包括多个校正永磁体的端部。 多个校正永磁体中的每一个小于具有相同或相反极性方向的主要部分中的永磁体。
    • 6. 发明申请
    • CONTROLLING SIMULATION SYSTEMS
    • 控制仿真系统
    • US20120101791A1
    • 2012-04-26
    • US13246052
    • 2011-09-27
    • Hideaki KomatsuShingo NagaiFumitomo Ohsawa
    • Hideaki KomatsuShingo NagaiFumitomo Ohsawa
    • G06G7/48
    • G06F17/5009G05B17/02G06F17/5095
    • A method for controlling a simulation system includes storing first-stage and second stage tables in which a value of a predicted time until arrival of an I/O instruction and a type of the instruction are included as entries for each program counter of an instruction set simulator, and in which a value of an earliest time until an output event from a peripheral simulator is included as an entry for each type of instruction; looking up the first-stage table to obtain the type of the instruction and the value of the predicted time until arrival of the instruction, looking up the second-stage table with reference to the obtained type of the instruction to obtain the value of the earliest time until the output event from the peripheral simulator, and returning the predicted time until arrival of the instruction and the earliest time until the output event from the peripheral simulator.
    • 一种用于控制模拟系统的方法,包括存储第一级和第二级表,其中包括I / O指令的到达之前的预测时间的值和指令的类型作为指令集的每个程序计数器的条目 模拟器,并且其中包括来自外围模拟器的输出事件之前的最早时间的值作为每种类型的指令的条目; 查找第一级表以获得指令的类型和直到指令到达的预测时间的值,参考获得的指令类型来查找第二级表以获得最早的值 直到来自外围模拟器的输出事件为止,并返回直到指令到达为止的预测时间和最早的时间,直到来自外围模拟器的输出事件。