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    • 3. 发明申请
    • FIELD EFFECT TRANSISTOR AND CIRCUIT DEVICE
    • 场效应晶体管和电路器件
    • US20110114914A1
    • 2011-05-19
    • US13055807
    • 2009-06-19
    • Hideaki NumataSatoru ToguchiHiroyuki Endoh
    • Hideaki NumataSatoru ToguchiHiroyuki Endoh
    • H01L29/12B82Y99/00
    • H01L27/12H01L27/0203H01L27/1225H01L27/1285H01L27/1292H01L29/0673H01L29/41733H01L29/66765
    • An end portion (104a) of a first source electrode (104) and an end portion (105a) of a first drain electrode (105) face each other on a gate insulating film (103) via a channel formation region. The first source electrode (104) and first drain electrode (105) extend over steps, and the end portion (104a) and end portion (105a) face each other on the gate insulating film (103). The highest portions of the end portion (104a) and end portion (105a) are formed higher than the upper surface of the gate insulating film (103) serving as the channel formation region. A field-effect transistor of this invention also includes a second source electrode (107) which is formed in contact with the channel layer (106) and connects the first source electrode (104) and channel layer (106), and a second drain electrode (108) which is formed in contact with the channel layer (106) and connects, the first drain electrode (105) and channel layer (106).
    • 第一源电极(104)的端部(104a)和第一漏极(105)的端部(105a)经由沟道形成区域彼此面对栅极绝缘膜(103)。 第一源电极(104)和第一漏电极(105)在台阶上延伸,并且端部(104a)和端部(105a)在栅极绝缘膜(103)上彼此面对。 端部(104a)和端部(105a)的最高部分形成为高于用作沟道形成区域的栅极绝缘膜(103)的上表面。 本发明的场效应晶体管还包括形成为与沟道层(106)接触并连接第一源电极(104)和沟道层(106)的第二源电极(107)和第二漏电极 (108),其与所述沟道层(106)接触形成并连接所述第一漏电极(105)和沟道层(106)。
    • 7. 发明授权
    • Switching element
    • 开关元件
    • US08101948B2
    • 2012-01-24
    • US12665252
    • 2008-02-19
    • Satoru ToguchiHiroyuki Endoh
    • Satoru ToguchiHiroyuki Endoh
    • H01L29/10
    • H01L51/052B82Y10/00H01L51/0048H01L51/0541H01L51/0545Y10S977/708Y10S977/742
    • In a switching element using, for the active layer, a carbon nanotube (CNT) dispersed film which can be manufactured at low temperatures, the interaction between the CNT and the surface of the gate insulating film is insufficient. For this reason, a problem of such a switching element is that the amount of CNT fixed in the channel region is insufficient, resulting in insufficient uniformity. In the switching element of the exemplary embodiment, a gate insulating film is formed of a nonconjugated polymer material containing, in the main chain, an aromatic group and a substituted or unsubstituted alkylene or alkyleneoxy group having 2 or more carbon atoms as repeating units. As a result, the interaction between the CNT and the surface of the gate insulating film is enhanced while maintaining the flexibility of the gate insulating film, and the amount of CNT fixed in the channel region can be increased. Thereby, a switching element having good and stable transistor characteristics can be obtained by a low-temperature, simple, and inexpensive process.
    • 在对活性层使用能够在低温下制造的碳纳米管(CNT)分散膜的开关元件中,CNT与栅极绝缘膜的表面之间的相互作用不充分。 因此,这种开关元件的问题在于固定在沟道区域中的CNT的量不足,导致均匀性不足。 在示例性实施例的开关元件中,栅绝缘膜由非共轭聚合物材料形成,所述非共轭聚合物材料在主链中含有芳族基团和具有2个或更多个碳原子的取代或未取代的亚烷基或亚烷基氧基作为重复单元。 结果,在保持栅极绝缘膜的柔性的同时,增强了CNT与栅极绝缘膜的表面之间的相互作用,并且可以增加固定在沟道区中的CNT的量。 因此,通过低温,简单且廉价的工艺可以获得具有良好且稳定的晶体管特性的开关元件。
    • 9. 发明申请
    • SWITCHING ELEMENT
    • 开关元件
    • US20100200838A1
    • 2010-08-12
    • US12665252
    • 2008-02-19
    • Satoru ToguchiHiroyuki Endoh
    • Satoru ToguchiHiroyuki Endoh
    • H01L29/78
    • H01L51/052B82Y10/00H01L51/0048H01L51/0541H01L51/0545Y10S977/708Y10S977/742
    • In a switching element using, for the active layer, a carbon nanotube (CNT) dispersed film which can be manufactured at low temperatures, the interaction between the CNT and the surface of the gate insulating film is insufficient. For this reason, a problem of such a switching element is that the amount of CNT fixed in the channel region is insufficient, resulting in insufficient uniformity. In the switching element of the exemplary embodiment, a gate insulating film is formed of a nonconjugated polymer material containing, in the main chain, an aromatic group and a substituted or unsubstituted alkylene or alkyleneoxy group having 2 or more carbon atoms as repeating units. As a result, the interaction between the CNT and the surface of the gate insulating film is enhanced while maintaining the flexibility of the gate insulating film, and the amount of CNT fixed in the channel region can be increased. Thereby, a switching element having good and stable transistor characteristics can be obtained by a low-temperature, simple, and inexpensive process.
    • 在对活性层使用能够在低温下制造的碳纳米管(CNT)分散膜的开关元件中,CNT与栅极绝缘膜的表面之间的相互作用不充分。 因此,这种开关元件的问题在于固定在沟道区域中的CNT的量不足,导致均匀性不足。 在示例性实施例的开关元件中,栅绝缘膜由非共轭聚合物材料形成,所述非共轭聚合物材料在主链中含有芳族基团和具有2个或更多个碳原子的取代或未取代的亚烷基或亚烷基氧基作为重复单元。 结果,在保持栅极绝缘膜的柔性的同时,增强了CNT与栅极绝缘膜的表面之间的相互作用,并且可以增加固定在沟道区中的CNT的量。 因此,通过低温,简单且廉价的工艺可以获得具有良好且稳定的晶体管特性的开关元件。