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1. 发明授权

US5180476A Method for producing transparent conductive films 失效
标题翻译：生产透明导电膜的方法
公开(公告)号：US5180476A
公开(公告)日：1993-01-19
申请号：US660840
申请日：1991-02-26
申请人： Satoru Ishibashi , Kyuzo Nakamura , Yasushi Higuchi , Takashi Komatsu , Yuzo Murata , Yoshifumi Ota
发明人： Satoru Ishibashi , Kyuzo Nakamura , Yasushi Higuchi , Takashi Komatsu , Yuzo Murata , Yoshifumi Ota
IPC分类号： C23C14/08 , C23C14/34 , C23C14/35 , H01L21/203 , H01L21/285
CPC分类号： C23C14/086 , C23C14/35 , H01L31/1884 , Y02E10/50
摘要： A method of producing by sputtering an In-O, Sn-O, Zn-O, Cd-Sn-O or Cd-In-O based transparent conductive film according to the present invention uses the addition of a donor element, if needed. The sputtering is carried out by maintaining an intensity of a magnetic field on a surface of a target at 600 Oe or greater as well as by charging the target with a DC electric field superimposed by an RF electric field. An apparatus for producing an In-O, Sn-O, Zn-O, Cd-Sn-O or Cd-In-O base transparent conductive film uses the addition of a donor element, if needed. The apparatus has a vacuum chamber adapted to support therein a substrate and a target in an opposed relationship for forming by sputtering the transparent conductive film on the substrate by plasma discharge generated therebetween. The apparatus has a device for forming a magnetic field having a predetermined intensity of 600 Oe or greater on a surface of the target, a DC power supply for charging the target with a DC electric field, and an RF power supply for charging the target with an RF electric field superimposed on the DC electric field.

2. 发明授权

US5116479A Process for producing transparent conductive film comprising indium oxide 失效
标题翻译：用于制造包含氧化铟的透明导电膜的方法
公开(公告)号：US5116479A
公开(公告)日：1992-05-26
申请号：US524768
申请日：1990-05-17
申请人： Kyuzo Nakamura , Satoru Ishibashi , Yoshifumi Ota , Yasushi Higuchi
发明人： Kyuzo Nakamura , Satoru Ishibashi , Yoshifumi Ota , Yasushi Higuchi
IPC分类号： C08J7/06 , C23C14/08 , C23C14/34 , C23C14/35 , H01B5/14 , H01J37/34
CPC分类号： H01J37/3458 , C23C14/086 , C23C14/35 , H01J37/3405
摘要： A process and apparatus for producing an In-O or In-Sn-O based transparent conductive film by a sputtering process is provided. The sputtering voltage is kept constant at 350V or less by maintaining the intensity of the magnetic field on the surface of the target at 400 Oe or greater. The apparatus contains a vacuum chamber wherein the substrate and target are mounted in opposite to each other. An electromagnet, used for adjusting the intensity of the magnetic field is located on the rear surface of the target. Additionally provided is a controller for the electric current supplied to the electromagnet. The controller is also connected to a DC power supply for the electromagnet.
摘要翻译：提供了一种通过溅射工艺制造In-O或In-Sn-O系透明导电膜的方法和装置。通过将目标表面上的磁场强度保持在400Oe以上，将溅射电压保持在350V以下。该装置包含真空室，其中基板和靶相互相对地安装。用于调整磁场强度的电磁铁位于目标的后表面。另外提供了用于供应到电磁体的电流的控制器。控制器也连接到电磁铁的直流电源。

3. 发明申请

US20110068402A1 THIN FILM TRANSISTOR AND METHOD FOR PRODUCING THIN FILM TRANSISTOR 审中-公开
标题翻译：薄膜晶体管及其生产薄膜晶体管的方法
公开(公告)号：US20110068402A1
公开(公告)日：2011-03-24
申请号：US12881641
申请日：2010-09-14
申请人： Satoru Takasawa , Satoru Ishibashi , Kyuzo Nakamura , Tadashi Masuda
发明人： Satoru Takasawa , Satoru Ishibashi , Kyuzo Nakamura , Tadashi Masuda
IPC分类号： H01L29/786 , H01L21/336
CPC分类号： H01L23/53238 , C23C14/0057 , C23C14/185 , H01L21/2855 , H01L21/76841 , H01L23/53233 , H01L27/124 , H01L29/458 , H01L2924/0002 , H01L2924/00
摘要： A metallic wiring film, which is not exfoliated even when exposed to a plasma of hydrogen, is provided. A metallic wiring film 20a is constituted by an adhesion layer 51 in which an additive metal is added to copper and a low-resistance metallic layer 52, which is made of pure copper, is disposed on the adhesion layer 51. When the additive metal made of at least one of Ti, Zr and Cr, and oxygen are included in a copper alloy which is in the adhesion layer 51 and a source electrode and a drain electrode are formed from it, copper does not precipitate at an interface between the adhesion layer 51 and the silicon layer even when being exposed to the hydrogen plasma, which prevents exfoliation from occurring between the adhesion layer 51 and the silicon layer. If the amount of additive metal increases, the adhesion layer 51 cannot be etched with an etching liquid for etching the low-resistance metallic layer 52, so that the maximum additional amount to permit the etching to be performed is the upper limit.
摘要翻译：提供即使暴露于氢等离子体时也不会剥离的金属布线膜。金属布线膜20a由在铜中添加添加金属的粘合层51和由纯铜制成的低电阻金属层52设置在粘合层51上。当添加金属制成的Ti，Zr和Cr中的至少一种，并且氧被包括在粘合层51中的铜合金中，并且源电极和漏电极由它形成，铜不会在粘合层 51和硅层，即使当暴露于氢等离子体时，其防止粘附层51和硅层之间发生剥离。如果添加金属的量增加，则不能用用于蚀刻低电阻金属层52的蚀刻液来蚀刻粘合层51，使得允许进行蚀刻的最大附加量为上限。

4. 发明申请

US20110189817A1 MANUFACTURING METHOD FOR SOLAR CELL 有权
标题翻译：太阳能电池的制造方法
公开(公告)号：US20110189817A1
公开(公告)日：2011-08-04
申请号：US13124529
申请日：2009-10-15
申请人： Hirohisa Takahashi , Satoru Ishibashi , Kyuzo Nakamura
发明人： Hirohisa Takahashi , Satoru Ishibashi , Kyuzo Nakamura
IPC分类号： H01L31/18
CPC分类号： H01L31/02366 , H01L31/022466 , H01L31/1884 , Y02E10/50
摘要： A manufacturing method for a solar cell including an upper electrode extracting an electrode at an incident light side, the upper electrode including a transparent conductive film, a basic structural element of the transparent conductive film being any one of an indium (In), a zinc (Zn), and tin (Sn), the manufacturing method including: a step A forming a texture on a front surface of a transparent substrate using a wet etching method, the transparent conductive film being formed on the transparent substrate, wherein in the step A, when the texture is formed, a metal thin film is formed on the transparent substrate, and an anisotropic etching is performed with the metal thin film being a mask.
摘要翻译：一种太阳能电池的制造方法，其特征在于，包括在入射光侧提取电极的上部电极，所述上部电极包括透明导电膜，所述透明导电膜的基本结构元素为铟（In），锌（Zn）和锡（Sn），所述制造方法包括：步骤A，其使用湿式蚀刻方法在透明基板的正面上形成纹理，所述透明导电膜形成在所述透明基板上，其中，在所述工序如图A所示，当形成纹理时，在透明基板上形成金属薄膜，以金属薄膜为掩模进行各向异性蚀刻。

5. 发明授权

US08221594B2 Magnetron sputtering apparatus and magnetron sputtering method 有权
标题翻译：磁控溅射装置和磁控溅射法
公开(公告)号：US08221594B2
公开(公告)日：2012-07-17
申请号：US12883490
申请日：2010-09-16
申请人： Yasuhiko Akamatsu , Kyuzo Nakamura , Motoshi Kobayashi , Junya Kiyota , Tomiyuki Yukawa , Masaki Takei , Yuuichi Oishi , Makoto Arai , Satoru Ishibashi
发明人： Yasuhiko Akamatsu , Kyuzo Nakamura , Motoshi Kobayashi , Junya Kiyota , Tomiyuki Yukawa , Masaki Takei , Yuuichi Oishi , Makoto Arai , Satoru Ishibashi
IPC分类号： C23C14/35
CPC分类号： C23C14/35 , H01J37/3408 , H01J37/3444
摘要： The present invention is to provide a magnetron sputtering technique for forming a film having an even film thickness distribution for a long period of time. A magnetron sputtering apparatus of the present invention includes a vacuum chamber, a cathode part provided in the vacuum chamber, the cathode part holding a target on the front side thereof and having a backing plate to hold a plurality of magnets on the backside thereof, and a direct-current power source that supplies direct-current power to the cathode part. A plurality of control electrodes, which independently controls potentials, is provided in a discharge space on the side of the target with respect to the backing plate.
摘要翻译：本发明提供一种用于长时间形成具有均匀膜厚分布的膜的磁控溅射技术。本发明的磁控管溅射装置包括真空室，真空室中设置的阴极部分，阴极部分在其前侧保持靶材，并具有背板，用于将多个磁体保持在其背面;以及向阴极部供给直流电力的直流电源。独立地控制电位的多个控制电极相对于背板设置在靶的侧面的放电空间中。

6. 发明申请

US20110298738A1 Touch panel 有权
标题翻译：触控面板
公开(公告)号：US20110298738A1
公开(公告)日：2011-12-08
申请号：US13137212
申请日：2011-07-28
申请人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
发明人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/045
摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
摘要翻译：提供了具有高耐久性的触摸面板。显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性使透明导电膜不破裂。

7. 发明申请

US20100295811A1 TOUCH PANEL AND METHOD FOR MANUFACTURING TOUCH PANEL 有权
标题翻译：触控面板和制造触控面板的方法
公开(公告)号：US20100295811A1
公开(公告)日：2010-11-25
申请号：US12814039
申请日：2010-06-11
申请人： Hirohisa TAKAHASHI , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
发明人： Hirohisa TAKAHASHI , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/045
摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
摘要翻译：提供了具有高耐久性的触摸面板。显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性使透明导电膜不破裂。

8. 发明授权

US08154531B2 Touch panel 有权
标题翻译：触控面板
公开(公告)号：US08154531B2
公开(公告)日：2012-04-10
申请号：US13137212
申请日：2011-07-28
申请人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
发明人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/045
摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
摘要翻译：提供了具有高耐久性的触摸面板。显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性使透明导电膜不破裂。

9. 发明授权

US08031183B2 Touch panel and method for manufacturing touch panel 有权
标题翻译：触摸屏和触摸屏制造方法
公开(公告)号：US08031183B2
公开(公告)日：2011-10-04
申请号：US12814039
申请日：2010-06-11
申请人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
发明人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/045
摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
摘要翻译：提供了具有高耐久性的触摸面板。显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性使透明导电膜不破裂。

10. 发明授权

US08460965B2 Manufacturing method for solar cell 有权
标题翻译：太阳能电池制造方法
公开(公告)号：US08460965B2
公开(公告)日：2013-06-11
申请号：US13124529
申请日：2009-10-15
申请人： Hirohisa Takahashi , Satoru Ishibashi , Kyuzo Nakamura
发明人： Hirohisa Takahashi , Satoru Ishibashi , Kyuzo Nakamura
IPC分类号： H01L21/00
CPC分类号： H01L31/02366 , H01L31/022466 , H01L31/1884 , Y02E10/50
摘要： A manufacturing method for a solar cell including an upper electrode extracting an electrode at an incident light side, the upper electrode including a transparent conductive film, a basic structural element of the transparent conductive film being any one of an indium (In), a zinc (Zn), and tin (Sn), the manufacturing method including: a step A forming a texture on a front surface of a transparent substrate using a wet etching method, the transparent conductive film being formed on the transparent substrate, wherein in the step A, when the texture is formed, a metal thin film is formed on the transparent substrate, and an anisotropic etching is performed with the metal thin film being a mask.
摘要翻译：一种太阳能电池的制造方法，其特征在于，包括在入射光侧提取电极的上部电极，所述上部电极包括透明导电膜，所述透明导电膜的基本结构元素为铟（In），锌（Zn）和锡（Sn），所述制造方法包括：步骤A，其使用湿式蚀刻方法在透明基板的正面上形成纹理，所述透明导电膜形成在所述透明基板上，其中，在所述工序如图A所示，当形成纹理时，在透明基板上形成金属薄膜，以金属薄膜为掩模进行各向异性蚀刻。

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