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    • 9. 发明授权
    • Semiconductor device having a recess channel transistor
    • 具有凹槽通道晶体管的半导体器件
    • US07615449B2
    • 2009-11-10
    • US11529420
    • 2006-09-29
    • Sung Woong ChungSang Don Lee
    • Sung Woong ChungSang Don Lee
    • H01L29/94H01L29/78
    • H01L29/66621H01L27/10876
    • The semiconductor device having a recess channel transistor includes a device isolation structure formed in a semiconductor substrate to define an active region having a recess region at a lower part of sidewalls thereof and a recess channel region formed in the semiconductor substrate under the active region. A method for fabricating the semiconductor device includes forming a device isolation structure in a semiconductor substrate to form an active region having a recess region at a lower part of sidewalls thereof, a gate insulating film formed over the semiconductor substrate including the recess channel region, and a gate electrode formed over the gate insulating film to fill up the recess channel region.
    • 具有凹陷沟道晶体管的半导体器件包括形成在半导体衬底中的器件隔离结构,以限定其侧壁下部具有凹陷区域的有源区域和在有源区域下形成在半导体衬底中的凹槽沟道区域。 一种制造半导体器件的方法包括:在半导体衬底中形成器件隔离结构,以形成在其侧壁的下部具有凹陷区域的有源区,形成在包括凹槽沟道区域的半导体衬底上的栅极绝缘膜,以及 形成在所述栅极绝缘膜上方以填充所述凹陷沟道区域的栅电极。