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    • 5. 发明专利
    • Split gate nonvolatile memory device and method of forming the same
    • 分离栅非易失性存储器件及其形成方法
    • JP2006253685A
    • 2006-09-21
    • JP2006061485
    • 2006-03-07
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • JEON HEE-SEOGKANG SUNG-TAEGYOON SEUNG-BEOMHAN JEONG-UKCHOI YONG-SUKSEO BO-YOUNGKWON HYOK-KI
    • H01L21/8247H01L27/115H01L29/788H01L29/792
    • H01L29/7887H01L29/66825
    • PROBLEM TO BE SOLVED: To provide a nonvolatile memory device having a structure that improves efficiency of programming and erasing and improves performance, and provides an increased floating gate coupling ratio.
      SOLUTION: A split gate memory cell structure is provided for a nonvolatile memory. The split gate memory cell includes first and second diffusion regions formed in a semiconductor substrate. A floating gate electrode is formed on a semiconductor substrate between the first and second diffusion regions, and the first side of the floating gate electrode is overlapped with a part of the first diffusion region. A control gate electrode is formed on the semiconductor substrate between the second side of the floating gate electrode and the second diffusion region. A tunnel insulating film is provided between the control gate electrode and the second side of the floating gate electrode. A coupling gate electrode is formed adjacently to the first side of the floating gate electrode on the first diffusion region in the semiconductor substrate. A coupling insulating film is provided between the coupling gate electrode and the first side of the floating gate electrode. Thickness of the coupling insulating film is small compared with the tunnel insulating film.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种具有提高编程和擦除效率并提高性能的结构的非易失性存储器件,并提供增加的浮栅耦合比。 解决方案:为非易失性存储器提供分离栅极存储单元结构。 分离栅极存储单元包括形成在半导体衬底中的第一和第二扩散区。 在第一和第二扩散区之间的半导体衬底上形成浮栅电极,并且浮置栅电极的第一侧与第一扩散区的一部分重叠。 控制栅电极形成在半导体衬底上,在浮置栅电极的第二侧和第二扩散区之间。 隧道绝缘膜设置在控制栅电极和浮栅电极的第二侧之间。 耦合栅电极形成在半导体衬底中的第一扩散区上的浮置栅电极的第一侧。 耦合绝缘膜设置在耦合栅电极和浮栅电极的第一侧之间。 耦合绝缘膜的厚度与隧道绝缘膜相比较小。 版权所有(C)2006,JPO&NCIPI