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1. 发明专利

JP2006035859A Inkjet head and its manufacturing method 有权
标题翻译： INKJET HEAD及其制造方法
公开(公告)号：JP2006035859A
公开(公告)日：2006-02-09
申请号：JP2005213507
申请日：2005-07-22
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK YONG-SHIK , KIM KORETSU , KIM KYOUNG-IL
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/14145 , B41J2/1404 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , B41J2002/14387 , B41J2002/14403
摘要： PROBLEM TO BE SOLVED: To provide an inkjet head having filtering pillars capable of preventing foreign substances from entering a flow path and keeping increasing fluid resistance to a minimum.
SOLUTION: The inkjet head comprises a plurality of pressure-generating elements disposed on a substrate to generate pressure to provide ink ejection, an ink-feed passage 26 extending through the substrate, a manifold 14', a plurality of filtering pillars 16 integrally formed with the substrate and a flow passing structure defining a flow path which includes ink chambers 28 disposed on the substrate containing the pressure-generating elements therein, ink channels 30 for opening the ink chambers toward a direction of the manifold and nozzles that are in fluid communication with the ink chambers. The manifold 14' is disposed between the pressure-generating elements and the ink-feed passage and recessed from a surface of the substrate provided with the pressure-generating elements on both sides of the ink-feed passage, by a predetermined depth. The filtering pillars 16 are disposed on a bottom surface of the manifold serving as filters to provide a plurality of filter openings therebetween. The method of manufacturing the inkjet head is also disclosed.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有能够防止异物进入流路并使流体阻力增加最小的过滤柱的喷墨头。解决方案：喷墨头包括设置在基板上以产生压力以提供墨水喷射的多个压力产生元件，延伸穿过基底的墨水供给通道26，歧管14'，多个过滤柱16 与衬底一体地形成并且流动通道结构限定流路，该流路包括布置在其上包含压力产生元件的基板上的墨室28，用于朝向歧管方向打开墨室的墨通道30和处于与墨水室的流体连通。歧管14'设置在压力产生元件和供墨通道之间，并且从设置有供墨通道两侧的压力产生元件的基板的表面凹陷预定深度。过滤柱16设置在歧管的底表面上，用作过滤器，以在其间提供多个过滤器开口。还公开了制造喷墨头的方法。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2006027273A Method of manufacturing inkjet head 审中-公开
标题翻译：制造喷头的方法
公开(公告)号：JP2006027273A
公开(公告)日：2006-02-02
申请号：JP2005209196
申请日：2005-07-19
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： BOKU SEISHUN , PARK BYUNG-HA , KIM KYOUNG-IL
IPC分类号： B41J2/16
CPC分类号： B41J2/1631 , B41J2/1603 , B41J2/1625 , B41J2/1628 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet head capable of improving yield and reliability of the inkjet head by uniformly and reproducibly adjusting the shape and dimension of an ink-feed hole.
SOLUTION: The method of manufacturing the inkjet head comprises a step of forming a substrate 100 having a first surface 100a and a second surface 100b provided with a plurality of pressure-generating sources 102 disposed on the first surface 100a, a step of forming a mask pattern 104 on the first surface 100a with the pressure-generating sources 102 disposed thereon and a step of forming the ink-feed hole 106 that extends through the substrate 100 by dry etching the substrate 100 from the first surface 100a using the mask pattern 104 as an etching mark.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决问题：提供一种能够通过均匀且可重复地调节供墨孔的形状和尺寸来提高喷墨头的产量和可靠性的喷墨头的制造方法。解决方案：制造喷墨头的方法包括形成具有第一表面100a的基板100和设置有设置在第一表面100a上的多个压力产生源102的第二表面100b的步骤，步骤在其上设置有压力产生源102的第一表面100a上形成掩模图案104，并且通过使用掩模从第一表面100a干燥蚀刻基板100来形成延伸穿过基板100的供墨孔106的步骤图案104作为蚀刻标记。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2008162267A Manufacturing method for inkjet printing head 有权
标题翻译：喷墨打印头的制造方法
公开(公告)号：JP2008162267A
公开(公告)日：2008-07-17
申请号：JP2007300914
申请日：2007-11-20
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , BOKU SEISHUN , HA YOUNG-UNG , KIM KYOUNG-IL
IPC分类号： B41J2/16 , B41J2/05
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , Y10T29/49124 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49146 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet printing head, in which supply of ink from an ink supply port is smoothed and the productivity of products is enhanced by the improvement of a process for forming the ink supply port. SOLUTION: The manufacturing method for the inkjet printing head comrpises: a step for preparing a substrate in which a heater for heating the ink is formed on the front face; a step for forming a flow channel forming layer to define the ink channel on the front face of the substrate; a step for forming a nozzle layer having nozzles on the flow channel forming layer; a step for forming a first protective layer covering the flow channel forming layer and the nozzle layer; a step for coating a masking material to apply etching to the substrate on the back surface of the substrate; a step for coating a second protective layer to protect the side surfaces of the substrate; and a step for forming the ink supply port in the substrate by wet type etching. In this case, the masking material may be tantalum and the second protective layer may be parylene. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供一种喷墨打印头的制造方法，其中通过改进形成供墨口的工艺来改善从供墨口供给墨水并使产品的生产率提高的喷墨打印头的制造方法。解决方案：喷墨打印头的制造方法包括：准备在前表面上形成用于加热油墨的加热器的基板的步骤; 用于形成流路形成层以在所述基板的前表面上限定墨通道的步骤; 在流路形成层上形成有喷嘴的喷嘴层的工序; 形成覆盖流路形成层和喷嘴层的第一保护层的工序; 用于涂覆掩模材料以对衬底的背面上的衬底施加蚀刻的步骤; 涂覆第二保护层以保护衬底的侧表面的步骤; 以及通过湿式蚀刻在基板中形成供墨口的步骤。在这种情况下，掩模材料可以是钽，第二保护层可以是聚对二甲苯。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2006056251A Inkjet printing head, and manufacturing method for inkjet printing head 有权
标题翻译：喷墨打印头和喷墨打印头的制造方法
公开(公告)号：JP2006056251A
公开(公告)日：2006-03-02
申请号：JP2005231990
申请日：2005-08-10
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： KIM KYOUNG-IL , HA YOUNG-UNG , HAN EUN-BONG , BOKU SEISHUN , KIM KORETSU , MIN JAE-SIK , KIM NAM-KYUN , PARK YONG-SHIK , PARK BYUNG-HA , KWON MYONG-JONG
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/1404 , B41J2/1412
摘要： PROBLEM TO BE SOLVED: To provide an inkjet printing head which maintains a high efficiency characteristic by being prevented from directly receiving ink feeding pressure although being heated by both side faces of a heater, and which can elongate the life of the heater. SOLUTION: The inkjet printing head is equipped with a substrate 110 which has ink feeding holes for feeding ink stored in a cartridge 10, a passage layer which forms an ink chamber 124 to communicate with the feeding holes, a nozzle plate 126 with at least one nozzle 128 for discharging the ink in the ink chamber to the outside, at least one heater 118 which is located adjacent to an inner wall of the ink chamber 124 and has front and rear faces disposed in contact with the ink in the ink chamber 124, and at least one lead electrically coupled to the heater 118. Both faces of the heater 118 are heated through contact with the ink, so that the thermal efficiency can be enhanced. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种喷墨打印头，其通过被加热器的两个侧面加热而被防止直接接收墨水供给压力而保持高效率特性，并且可以延长加热器的寿命。解决方案：喷墨打印头配备有基板110，基板110具有用于供给存储在墨盒10中的墨的供墨孔，形成墨室124以与进给孔连通的通道层，具有至少一个用于将油墨室中的油墨排放到外部的喷嘴128，至少一个位于油墨室124的内壁附近的加热器118，并且具有与油墨在墨水中接触的前后表面室124，以及电耦合到加热器118的至少一个引线。加热器118的两个面通过与墨接触而加热，从而可以提高热效率。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2008302690A Inkjet printhead and method of manufacturing the same 审中-公开
标题翻译：喷墨打印机及其制造方法
公开(公告)号：JP2008302690A
公开(公告)日：2008-12-18
申请号：JP2008115166
申请日：2008-04-25
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： BOKU SEISHUN , PARK BYUNG-HA , SHIM DONG SIK , KIM KYOUNG-IL
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1639 , B41J2/1645
摘要： PROBLEM TO BE SOLVED: To provide a inkjet printhead capable of simplifying an adhesive layer forming process and to provide a method of manufacturing the inkjet printhead.
SOLUTION: The inkjet printhead comprises a substrate, a channel forming layer prepared on the substrate, and an adhesive layer interposed between the substrate and the channel forming layer, and the adhesive layer comprises a silicone-modified resin having photosensitivity. The method of manufacturing the inkjet printhead includes preparing a substrate on which a ink delivering pressure-generating element for delivering ink is arranged, forming an adhesive layer comprising a silicone modified polyimide resin on the substrate, and forming a channel forming layer on the adhesive layer to limit a ink channel.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够简化粘合剂层形成工艺的喷墨打印头，并提供一种制造喷墨打印头的方法。解决方案：喷墨打印头包括基板，在基板上制备的通道形成层和插入在基板和通道形成层之间的粘合剂层，并且粘合剂层包含具有光敏性的硅氧烷改性树脂。制造喷墨打印头的方法包括制备其上布置有用于输送墨水的输墨压力产生元件的基底，在基底上形成包含硅氧烷改性聚酰亚胺树脂的粘合剂层，并在粘合剂层上形成通道形成层限制墨水通道。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2006056249A Manufacturing method for inkjet head, and inkjet head manufactured by the method 有权
标题翻译：喷头制造方法及其制造方法
公开(公告)号：JP2006056249A
公开(公告)日：2006-03-02
申请号：JP2005229967
申请日：2005-08-08
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： KIM KYOUNG-IL , PARK YONG-SHIK , KWON MYONG-JONG
IPC分类号： B41J2/16
CPC分类号： B41J2/1404 , B41J2/1603 , B41J2/1625 , B41J2/1643 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide an inkjet head which has an ink passage of a uniform size by forming a chamber layer whose thickness is controlled highly precisely with good reproducibility, and to provide a manufacturing method for an inkjet head. SOLUTION: The manufacturing method for the inkjet head includes a step of forming a substrate 300 with pressure generating sources 302 for generating pressure for ink ejection, a step of forming metal chamber layers 312 which constitute side walls of the ink passage on the substrate 300, a step of forming a sacrifice layer 310b in which a region where the ink passage is formed is buried between the side walls constructed by the metal chamber layers 312, and a step of forming a nozzle layer 316 with nozzles 316a set to correspond to the pressure generating sources 302 on the metal chamber layers 312 and on the sacrifice layer 310b. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供具有均匀尺寸的油墨通道的喷墨头，通过形成具有高度精确控制的厚度的室层，并且具有良好的再现性，并且提供了一种用于喷墨头的制造方法。解决方案：喷墨头的制造方法包括用压力发生源302形成基板300的步骤，用于产生用于喷墨的压力;将形成在墨水通道的侧壁的金属室层312形成在步骤衬底300，形成牺牲层310b的步骤，其中形成有油墨通道的区域被掩埋在由金属室层312构成的侧壁之间，以及形成喷嘴层316的步骤，喷嘴层316被设置为对应于到金属室层312上和牺牲层310b上的压力产生源302。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2008284879A Manufacturing method of heat drive type inkjet printhead 审中-公开
标题翻译：加热型喷油嘴的制造方法
公开(公告)号：JP2008284879A
公开(公告)日：2008-11-27
申请号：JP2008130066
申请日：2008-05-16
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： KIM IL-WOO , LEE JIN WOOK , PARK BYUNG-HA , KWON MYONG-JONG , KIM KYOUNG-IL , MIN HYE-YOUNG
IPC分类号： B41J2/16
CPC分类号： B41J2/1632 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1639 , B41J2/1645 , B41J2202/11
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a heat drive type inkjet printhead.
SOLUTION: The method includes the process of forming a chamber layer where an ink chamber is formed on a substrate, forming a sacrifice layer on the chamber layer so as to fill the ink chamber, smoothing the upper surfaces of the sacrifice and chamber layers through a primary chemical mechanical polishing process, and forming the sacrifice and chamber layers with a desired height. The slurry used in the primary chemical mechanical polishing process contains polishing particles having a 500 nm to 2 μm average particle diameter.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种热驱型喷墨打印头的制造方法。解决方案：该方法包括形成腔室层的过程，其中在基底上形成墨水室，在腔室层上形成牺牲层以填充墨水室，使牺牲物和腔室的上表面平滑化层，通过主要的化学机械抛光工艺，并且以期望的高度形成牺牲层和室层。在一次化学机械抛光工艺中使用的浆料含有平均粒径为500nm至2μm的抛光颗粒。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2006315402A Manufacturing method of inkjet print head, inkjet print head, and intermediate of inkjet print head 审中-公开
标题翻译：喷墨打印头的制造方法，喷墨打印头和喷墨打印头的中间件
公开(公告)号：JP2006315402A
公开(公告)日：2006-11-24
申请号：JP2006134496
申请日：2006-05-12
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , HA YOUNG-UNG , BOKU SEISHUN , MIN JAE-SIK , KIM KYOUNG-IL
IPC分类号： B41J2/16 , B41J2/05
CPC分类号： B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an inkjet print head, an inkjet print head, and an intermediate of the inkjet print head. SOLUTION: According to this invention, the manufacturing method of the inkjet print head, the inkjet print head, and the intermediate of the inkjet print head are provided. The manufacturing method includes a step of forming heaters which heats ink and electrodes on a substrate, a step of forming a channel forming layer surrounding an ink channel on the substrate on which the heaters and the electrodes are formed, a step of forming a sacrifice layer having a flat upper surface on the substrate on which the channel forming layer is formed, a step of patterning the channel forming layer and the sacrifice layer after applying a cross-linked polymer photoresist composition thereto so as to form a nozzle layer having nozzles, a step of forming an ink supply opening by etching so that it penetrates through the substrate from the rear surface of the substrate, and a step of removing the sacrifice layer. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供喷墨打印头，喷墨打印头和喷墨打印头的中间体的制造方法。解决方案：根据本发明，提供了喷墨打印头，喷墨打印头和喷墨打印头的中间体的制造方法。该制造方法包括形成加热基板上的墨水和电极的加热器的步骤，在其上形成有加热器和电极的基板上形成围绕墨水通道的通道形成层的步骤，形成牺牲层在其上形成有沟道形成层的基板上具有平坦的上表面，在其上施加交联的聚合物光致抗蚀剂组合物之后，对沟道形成层和牺牲层进行图案化以形成具有喷嘴的喷嘴层，通过蚀刻形成供墨口的步骤，使得其从基板的后表面穿过基板，以及去除牺牲层的步骤。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2004001447A Ink jet printer head and manufacturing method therefor 审中-公开
公开(公告)号：JP2004001447A
公开(公告)日：2004-01-08
申请号：JP2003085235
申请日：2003-03-26
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： MIN JAE-SIK , CHO SEO-HYUN , PARK BYUNG-HA , KWON MYUNG-JONG , KIM KYOUNG-IL , PARK YONG-SHIK
IPC分类号： B41J2/05 , B41J2/135 , B41J2/14 , B41J2/16 , B41J2/315
CPC分类号： B41J2/1645 , B41J2/14137 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2002/1437
摘要： PROBLEM TO BE SOLVED: To provide an ink jet printer head having nozzles capable of stably discharging liquid drops, and to provide its manufacturing method.
SOLUTION: The ink jet printer head includes a substrate 110 with an ink chamber 140 formed at one face; a nozzle plate 120 which covers the ink chamber 140, has nozzles 121 for discharging ink liquid drops from the chamber, and has a plurality of layered insulating layers; a heater buried in the layers of the nozzle plate 120 to surround the nozzles 121, a wiring layer buried in the layers of the nozzle plate 120 to be electrically connected to the heater, and a hydrophobic coating layer 190 formed on the nozzle plate and formed of a photoresist where liquid drop guides like through holes are formed continuously with the nozzles of the nozzle plate. The hydrophobic coating layer 190 having a full thickness guides the liquid drops, so that a meniscus can quickly recover and stabilize, and high-speed and high-frequency discharge is enabled, with abrasion resistance and chemical resistance being improved.
COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2003182085A INK JET PRINT HEAD 审中-公开
公开(公告)号：JP2003182085A
公开(公告)日：2003-07-03
申请号：JP2002299310
申请日：2002-10-11
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： BOKU SEISHUN , CHO SEO-HYUN , KOH SANG-CHUL , MIN JAE-SIK , KIM KYOUNG-IL , PARK BYUNG-HA , KIM TAE-KYUN , TEI MEISHO
IPC分类号： B41J2/05 , B41J2/045 , B41J2/14 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To provide a bubble jet system ink jet print head in which exfoliation of layer can be prevented. SOLUTION: The ink jet print head comprises a base plate (110) including a substrate (111) having a recess (119) of a specified depth formed in the surface, a heat insulation layer (112) formed on the substrate, a heating layer (113) formed on the heat insulation layer in order to generate thermal energy, and a protective layer (115) of the heating layer formed thereon, a barrier wall layer (120) formed on the base plate in order to form an ink chamber (112) located above the recess and having the bottom face formed on the basis of the recess, and an ink channel for introducing ink to an ink chamber, and a nozzle plate (130) placed on the barrier wall layer and provided with a nozzle for ejecting ink formed oppositely to the ink chamber. COPYRIGHT: (C)2003,JPO

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