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1. 发明专利

JP2006315402A Manufacturing method of inkjet print head, inkjet print head, and intermediate of inkjet print head 审中-公开
标题翻译：喷墨打印头的制造方法，喷墨打印头和喷墨打印头的中间件
公开(公告)号：JP2006315402A
公开(公告)日：2006-11-24
申请号：JP2006134496
申请日：2006-05-12
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , HA YOUNG-UNG , BOKU SEISHUN , MIN JAE-SIK , KIM KYOUNG-IL
IPC分类号： B41J2/16 , B41J2/05
CPC分类号： B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an inkjet print head, an inkjet print head, and an intermediate of the inkjet print head. SOLUTION: According to this invention, the manufacturing method of the inkjet print head, the inkjet print head, and the intermediate of the inkjet print head are provided. The manufacturing method includes a step of forming heaters which heats ink and electrodes on a substrate, a step of forming a channel forming layer surrounding an ink channel on the substrate on which the heaters and the electrodes are formed, a step of forming a sacrifice layer having a flat upper surface on the substrate on which the channel forming layer is formed, a step of patterning the channel forming layer and the sacrifice layer after applying a cross-linked polymer photoresist composition thereto so as to form a nozzle layer having nozzles, a step of forming an ink supply opening by etching so that it penetrates through the substrate from the rear surface of the substrate, and a step of removing the sacrifice layer. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供喷墨打印头，喷墨打印头和喷墨打印头的中间体的制造方法。解决方案：根据本发明，提供了喷墨打印头，喷墨打印头和喷墨打印头的中间体的制造方法。该制造方法包括形成加热基板上的墨水和电极的加热器的步骤，在其上形成有加热器和电极的基板上形成围绕墨水通道的通道形成层的步骤，形成牺牲层在其上形成有沟道形成层的基板上具有平坦的上表面，在其上施加交联的聚合物光致抗蚀剂组合物之后，对沟道形成层和牺牲层进行图案化以形成具有喷嘴的喷嘴层，通过蚀刻形成供墨口的步骤，使得其从基板的后表面穿过基板，以及去除牺牲层的步骤。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2005254815A Ink-jet head substrate, method of manufacturing ink-jet head substrate, and ink-jet head 审中-公开
标题翻译：喷墨头基板，制造喷墨头基板的方法和喷墨头
公开(公告)号：JP2005254815A
公开(公告)日：2005-09-22
申请号：JP2005069925
申请日：2005-03-11
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： MIN JAE-SIK , BOKU SEISHUN , HA YOUNG-UNG
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16
CPC分类号： B41J2/14129 , B41J2/1412
摘要： PROBLEM TO BE SOLVED: To provide an ink-jet head substrate which is equipped with an exothermic resistor having a high specific resistance value, improved reliability, and extended life, and to provide an ink-jet head equipped with the ink-jet head substrate and a method of manufacturing the ink-jet head substrate.
SOLUTION: The ink-jet head substrate comprises a bearing structure 100, and at least one exothermic resistor 104a which is arranged on the bearing substrate 100 and formed of a metallic carbonitride for generating thermal energy for ejecting ink. The metallic carbonitride has a structure represented by the following chemical formula: MxCyNz.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种喷墨头基板，该喷墨头基板配备有具有高比电阻值，提高的可靠性和延长的使用寿命的放热电阻器，并且提供一种喷墨头，喷墨头基板和制造喷墨头基板的方法。喷墨头基板包括轴承结构100和至少一个放热电阻器104a，其布置在轴承基板100上并由用于产生用于喷射油墨的热能的金属碳氮化物形成。金属碳氮化物具有由以下化学式表示的结构：MxCyNz。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2005205916A Method of manufacturing monolithic inkjet printhead 审中-公开
标题翻译：制造单相喷墨打印机的方法
公开(公告)号：JP2005205916A
公开(公告)日：2005-08-04
申请号：JP2005013350
申请日：2005-01-20
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , KWON MYONG-JONG , HA YOUNG-UNG , BOKU SEISHUN
IPC分类号： B41J2/05 , B41J2/16 , G01D15/00 , G11B5/127
CPC分类号： B41J2/1629 , B41J2/1603 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a monolithic inkjet printhead capable of obtaining a uniform ink flow path having an easily controlled shape and size of the ink flow path by flattening upper surfaces of a sacrificial layer.
SOLUTION: The method of manufacturing the monolithic inkjet printhead includes a step of forming a heater 141 and an electrode 142 on a substrate 110, a step of forming a flow path forming layer 120 which defines the ink flow path on the substrate with the heater and an electrode formed thereon, a step of forming a sacrificial layer 160 to cover the flow path forming layer on the substrate, a step of flattening the flow path forming layer and the upper surfaces of the sacrificial layer through a CMP process, a step of forming a nozzle layer over the flow path forming layer and the sacrificial layer, a step of forming an ink feed hole on the substrate and a step of removing the sacrificial layer.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决的问题：提供一种制造单片喷墨打印头的方法，其能够通过使牺牲层的上表面平坦化来获得油墨流路的容易控制的形状和尺寸的均匀油墨流路。解决方案：制造单片喷墨打印头的方法包括在基板110上形成加热器141和电极142的步骤，形成流路形成层120的步骤，该流路形成层120在基板上限定油墨流动路径，加热器和形成在其上的电极，形成牺牲层160以覆盖基底上的流路形成层的步骤，通过CMP工艺使流路形成层和牺牲层的上表面平坦化的步骤，在流路形成层和牺牲层上形成喷嘴层的步骤，在基板上形成供墨孔的步骤和去除牺牲层的步骤。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2008162267A Manufacturing method for inkjet printing head 有权
标题翻译：喷墨打印头的制造方法
公开(公告)号：JP2008162267A
公开(公告)日：2008-07-17
申请号：JP2007300914
申请日：2007-11-20
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , BOKU SEISHUN , HA YOUNG-UNG , KIM KYOUNG-IL
IPC分类号： B41J2/16 , B41J2/05
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , Y10T29/49124 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49146 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet printing head, in which supply of ink from an ink supply port is smoothed and the productivity of products is enhanced by the improvement of a process for forming the ink supply port. SOLUTION: The manufacturing method for the inkjet printing head comrpises: a step for preparing a substrate in which a heater for heating the ink is formed on the front face; a step for forming a flow channel forming layer to define the ink channel on the front face of the substrate; a step for forming a nozzle layer having nozzles on the flow channel forming layer; a step for forming a first protective layer covering the flow channel forming layer and the nozzle layer; a step for coating a masking material to apply etching to the substrate on the back surface of the substrate; a step for coating a second protective layer to protect the side surfaces of the substrate; and a step for forming the ink supply port in the substrate by wet type etching. In this case, the masking material may be tantalum and the second protective layer may be parylene. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供一种喷墨打印头的制造方法，其中通过改进形成供墨口的工艺来改善从供墨口供给墨水并使产品的生产率提高的喷墨打印头的制造方法。解决方案：喷墨打印头的制造方法包括：准备在前表面上形成用于加热油墨的加热器的基板的步骤; 用于形成流路形成层以在所述基板的前表面上限定墨通道的步骤; 在流路形成层上形成有喷嘴的喷嘴层的工序; 形成覆盖流路形成层和喷嘴层的第一保护层的工序; 用于涂覆掩模材料以对衬底的背面上的衬底施加蚀刻的步骤; 涂覆第二保护层以保护衬底的侧表面的步骤; 以及通过湿式蚀刻在基板中形成供墨口的步骤。在这种情况下，掩模材料可以是钽，第二保护层可以是聚对二甲苯。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2006056251A Inkjet printing head, and manufacturing method for inkjet printing head 有权
标题翻译：喷墨打印头和喷墨打印头的制造方法
公开(公告)号：JP2006056251A
公开(公告)日：2006-03-02
申请号：JP2005231990
申请日：2005-08-10
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： KIM KYOUNG-IL , HA YOUNG-UNG , HAN EUN-BONG , BOKU SEISHUN , KIM KORETSU , MIN JAE-SIK , KIM NAM-KYUN , PARK YONG-SHIK , PARK BYUNG-HA , KWON MYONG-JONG
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/1404 , B41J2/1412
摘要： PROBLEM TO BE SOLVED: To provide an inkjet printing head which maintains a high efficiency characteristic by being prevented from directly receiving ink feeding pressure although being heated by both side faces of a heater, and which can elongate the life of the heater. SOLUTION: The inkjet printing head is equipped with a substrate 110 which has ink feeding holes for feeding ink stored in a cartridge 10, a passage layer which forms an ink chamber 124 to communicate with the feeding holes, a nozzle plate 126 with at least one nozzle 128 for discharging the ink in the ink chamber to the outside, at least one heater 118 which is located adjacent to an inner wall of the ink chamber 124 and has front and rear faces disposed in contact with the ink in the ink chamber 124, and at least one lead electrically coupled to the heater 118. Both faces of the heater 118 are heated through contact with the ink, so that the thermal efficiency can be enhanced. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种喷墨打印头，其通过被加热器的两个侧面加热而被防止直接接收墨水供给压力而保持高效率特性，并且可以延长加热器的寿命。解决方案：喷墨打印头配备有基板110，基板110具有用于供给存储在墨盒10中的墨的供墨孔，形成墨室124以与进给孔连通的通道层，具有至少一个用于将油墨室中的油墨排放到外部的喷嘴128，至少一个位于油墨室124的内壁附近的加热器118，并且具有与油墨在墨水中接触的前后表面室124，以及电耦合到加热器118的至少一个引线。加热器118的两个面通过与墨接触而加热，从而可以提高热效率。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2008290457A Negative photoresist composition, method for manufacturing inkjet printer head, and inkjet printer head 审中-公开
标题翻译：负离子光刻胶组合物，制造喷墨打印头的方法和喷墨打印头
公开(公告)号：JP2008290457A
公开(公告)日：2008-12-04
申请号：JP2008134748
申请日：2008-05-22
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , HA YOUNG-UNG
IPC分类号： B41J2/16 , B41J2/05
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , G03F7/038
摘要： PROBLEM TO BE SOLVED: To provide a negative photoresist composition by which an inkjet printer head with an improved durability can be manufactured, a method for manufacturing the inkjet printer head using the negative photoresist composition, and the inkjet printer head.
SOLUTION: The negative photoresist composition includes a prepolymer including oxetane acting groups in repeated units and having bisphenol-A based skeletons, a cationic photoinitiator, and the solvent, the method for manufacturing the inkjet printer head with few thickness variation and improved durability is constituted by using the photoresist composition, and the inkjet printer head is constituted by manufacture on the method.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种负性光致抗蚀剂组合物，通过该组合物可以制造具有改善的耐久性的喷墨打印机头，使用负性光致抗蚀剂组合物制造喷墨打印头的方法和喷墨打印机头。解决方案：负型光致抗蚀剂组合物包括预聚物，其包括重复单元中的氧杂环丁烷作用基团并具有双酚A基骨架，阳离子光引发剂和溶剂，制造具有很小厚度变化和改善耐久性的喷墨打印机头的方法通过使用光致抗蚀剂组合物构成，喷墨打印头由该方法制造而成。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2007076368A Method for manufacturing ink-jet print head, ink-jet print head manufactured by the method, crosslinkable polymer negative resist composition and intermediate compound 审中-公开
标题翻译：用于制造喷墨打印头的方法，通过该方法制造的喷墨打印头，可交联聚合物负极组合物和中间体化合物
公开(公告)号：JP2007076368A
公开(公告)日：2007-03-29
申请号：JP2006248328
申请日：2006-09-13
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： PARK BYUNG-HA , HA YOUNG-UNG , BOKU SEISHUN , MIN JAE-SIK
IPC分类号： B41J2/135 , B41J2/05 , B41J2/16
CPC分类号： C08G59/3218 , Y10T428/31511
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink-jet print head in which a cone angle can be controlled precisely, and to provide an ink-jet print head manufactured by the method.
SOLUTION: The method for manufacturing an ink-jet print head includes a step of irradiating a crosslinkable polymer resist composition containing a precursor polymer, a cationic photoinitiator, and a solvent with chemical rays to form a nozzle layer 30, wherein the concentration of the cationic photoinitiator is changed to control the cone angle of a nozzle 54 present in the nozzle layer. Thus, the method for manufacturing an ink-jet print head can freely control the nozzle cone angle without special additional steps and allows observation of the optimal meniscus behavior. As a result, the ink-jet print head manufactured by the method can improve ink ejection performance such as ink ejection speed, frequency and ejection aspect.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以精确控制锥角的喷墨打印头的制造方法，并提供通过该方法制造的喷墨打印头。解决方案：喷墨打印头的制造方法包括用化学射线照射含有前体聚合物，阳离子光引发剂和溶剂的可交联聚合物抗蚀剂组合物以形成喷嘴层30的步骤，其中浓度改变阳离子光引发剂以控制存在于喷嘴层中的喷嘴54的锥角。因此，用于制造喷墨打印头的方法可以自由地控制喷嘴锥角而没有特别的附加步骤，并且允许观察最佳的弯液面行为。结果，通过该方法制造的喷墨打印头可以改善喷墨速度，频率和喷射方面的喷墨性能。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2005104156A Manufacturing method of ink-jet printhead 审中-公开
标题翻译：喷墨打印机的制造方法
公开(公告)号：JP2005104156A
公开(公告)日：2005-04-21
申请号：JP2004280231
申请日：2004-09-27
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： PARK BYUNG-HA , KWON MYUNG-JONG , HA YOUNG-UNG , BOKU SEISHUN
IPC分类号： B41J2/34 , B41J2/135 , B41J2/16 , G03F7/20 , G11B5/127
CPC分类号： B41J2/1626 , B41J2/1603 , B41J2/1631
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an ink-jet printhead which is capable of enhancing the ink discharging performance of the ink-jet printhead and its durability by making the control of the shape and dimension of an ink flow-path easier while making the uniformity of the flow-path well.
SOLUTION: The manufacturing method is provided with a step of forming an ink-heating element for heating the ink on a substrate 110, a step of forming a flow-path forming layer 120 with a negative photoresist on the substrate 110, a step of forming a sacrificial layer S with its top-face being flat in the space surrounded by the flow-path forming layer 120 using a positive photoresist two or more times, a step of forming a nozzle layer 130 with the negative photoresist on the flow-path forming layer 120 and sacrificial layer S , a step of forming an ink feeding port 151 in passing through the substrate 110 and a step of removing the sacrificial layer S.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种喷墨打印头的制造方法，其能够通过控制油墨流动的形状和尺寸来提高喷墨打印头的喷墨性能及其耐久性同时使流路的均匀性更好。解决方案：制造方法具有形成用于加热基板110上的墨的加墨元件的步骤，在基板110上形成具有负光致抗蚀剂的流路形成层120的步骤，在使用正性光致抗蚀剂两次或更多次的情况下，在由流路形成层120包围的空间中使其顶面平坦的牺牲层S的形成步骤，在流体上形成具有负性光致抗蚀剂的喷嘴层130的工序路线形成层120和牺牲层S，形成通过基板110的供墨口151的步骤和去除牺牲层S的步骤。（C）2005，JPO＆NCIPI

9. 发明专利

JP2005067203A Protective layer of ink-jet printhead, ink-jet printhead and manufacturing method of ink-jet printhead 审中-公开
标题翻译：喷墨打印机的保护层，喷墨打印头和喷墨打印机的制造方法
公开(公告)号：JP2005067203A
公开(公告)日：2005-03-17
申请号：JP2004244075
申请日：2004-08-24
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： BOKU SEISHUN , BAEK OH HYUN , HA YOUNG-UNG , MIN JAE-SIK
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16 , B41J2/335
CPC分类号： B41J2/14129 , B41J2202/03
摘要： PROBLEM TO BE SOLVED: To provide an ink-jet printhead capable of improving its durability and reliability by preventing a heat layer from damaging by improving the hardness, elasticity and oxidation resistance of a cavitation layer, and a manufacturing method of the same.
SOLUTION: The ink-jet printhead manufacturing method includes a step of laminating the heat layer and a conductive layer onto a substrate in order; a step of exposing a fixed domain of the top surface of the heat layer by patterning the conductive layer; a step of laminating the protective layer onto the surfaces of the conductive layer and the heat layer; and a step of forming an ink chamber by laminating an ink chamber barrier and a nozzle plate onto the top surface of the protective layer. The step of forming the protective layer includes the step of forming the cavitation layer by repeatedly interlaminating at least two kinds of thin-film layers consisting of different materials onto the upper part of the conductive layer and the heat layer.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种喷墨打印头，其能够通过提高空化层的硬度，弹性和抗氧化性来防止热层受到破坏而提高其耐久性和可靠性，及其制造方法。解决方案：喷墨打印头的制造方法包括依次层叠热层和导电层到基板上的步骤; 通过图案化导电层来暴露加热层的顶表面的固定区域的步骤; 将保护层层压到导电层和加热层的表面上的步骤; 以及通过将墨室阻挡层和喷嘴板层压到保护层的顶表面上而形成墨室的步骤。形成保护层的步骤包括通过将由不同材料组成的至少两种薄膜层反复层叠到导电层和加热层的上部上而形成空化层的步骤。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005193667A Inkjet printhead and manufacturing method therefor 审中-公开
标题翻译： INKJET PRINTHEAD及其制造方法
公开(公告)号：JP2005193667A
公开(公告)日：2005-07-21
申请号：JP2004376466
申请日：2004-12-27
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： MIN JAE-SIK , HA YOUNG-UNG
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/1603 , B41J2/1646
摘要： PROBLEM TO BE SOLVED: To provide an inkjet printhead capable of enhancing the durability by suppressing defects formed in a heat generation layer and also a manufacturing method for the head.
SOLUTION: In this manufacturing method for the heat transfer type inkjet printhead 200, the heat generation layer 230 and an electrode layer 240 overlie a substrate 210, and a protective layer 250 is formed by making a first protective layer 260 and a second protective layer 270 overlie on the top surface of the electrode layer 240 in an exposed part inside an ink chamber 215 which is formed by making an ink chamber barrier 280 and a nozzle plate 290 overlie on the top surface of the protective layer 250. The second protective layer overlie on the first protective layer after any defect generated during the formation of the first protective layer is removed by applying plasma to the first protective layer. Thereby, it is possible to prevent a defect formed in the first protective layer and a failure in the heat generation layer caused by pin holes when the inkjet head is driven.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过抑制发热层中形成的缺陷而提高耐久性的喷墨打印头以及头部的制造方法。解决方案：在这种用于传热型喷墨打印头200的制造方法中，发热层230和电极层240覆盖在基板210上，并且通过制造第一保护层260和第二保护层260形成保护层250 保护层270覆盖在通过使墨水室隔壁280和喷嘴板290覆盖在保护层250的顶表面上而形成的墨水室215内的暴露部分中的电极层240的顶表面上。第二在通过将等离子体施加到第一保护层来除去在形成第一保护层期间产生的任何缺陷之后，保护层覆盖在第一保护层上。由此，可以防止当喷墨头被驱动时在第一保护层中形成的缺陷和由销孔引起的发热层的故障。版权所有（C）2005，JPO＆NCIPI

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