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1. 发明专利

JP2004165594A Method and device for gas plasma production, gas composition for plasma production, and semiconductor device manufacturing method utilizing it 有权
公开(公告)号：JP2004165594A
公开(公告)日：2004-06-10
申请号：JP2003032812
申请日：2003-02-10
申请人： New Power Plasma Co Ltd , Samsung Electronics Co Ltd , ニューパワープラズマ株式会社 , 三星電子株式会社
发明人： MIN YOUNG-MIN , CHOI DAE-KYU , BAE DO-IN , YO JUNSHOKU , HWANG WAN-GOO , KIM JIN-MAN
IPC分类号： H01L21/3065 , H01J37/32 , H01L21/311 , H05H1/30
CPC分类号： H01L21/31116 , H01J37/321 , H01J37/32357 , Y02C20/30 , Y02P70/605
摘要： PROBLEM TO BE SOLVED: To provide a method and a device of remote type for producing a plasma, and a semiconductor device using the plasma and an implementation method for processes for manufacturing it. SOLUTION: A high frequency current is supplied from a power source part 45 to a plasma producing and gas flowing member 43 enclosing a main magnet field forming part in coil like manner. A main magnetic field having an axis direction and an auxiliary magnetic field having a direction parallel to the axis direction are formed. A gas is made to flow through a channel having the same displacement as a line of magnetic force of the main magnetic field, and a high frequency a.c. current is applied, to produce the gas plasma. The gas plasma is supplied to a process chamber to carry out the semiconductor device manufacturing process using the gas plasma. The plasma gas is produced with high efficiency, and low-priced plasma producing gas can be used. COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2005045208A Electrostatic chuck 审中-公开
标题翻译：静电卡
公开(公告)号：JP2005045208A
公开(公告)日：2005-02-17
申请号：JP2004096934
申请日：2004-03-29
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： CHO JAE-YONG , AHN BYUNG-SUN , KIM JIN-MAN , KIM KYUNG-SUN
IPC分类号： H01L21/68 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , Y10S156/915
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of reducing a manufacture cost by enhancing a yield with uniform treatment to reduce defectives by the increase of the yield. SOLUTION: The electrostatic chuck includes a chuck body for supporting an object 1 to be treated, a guide ring 10 surrounding the circumference of the object 1 by the support of the chuck body, the layers 20a, 20b of a dielectric material intervened between the guide ring 10 and the chuck body, a mediation gas supply system 50 for supplying a mediation gas to the guide ring 10, and a power supply 75 for supplying a power source to chuck body. Consequently, the temperature difference between the object 1 and the guide ring 10 is reduced, and the uniform treatment can be done up to the edge of the object 1 in a semiconductor treatment process. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过均匀处理提高产量而降低制造成本的静电卡盘，通过提高产量来减少缺陷。解决方案：静电卡盘包括用于支撑待处理物体1的卡盘体，通过卡盘主体的支撑件围绕物体1的周围的引导环10，介电材料的层20a，20b介入在导向环10和卡盘体之间，用于向引导环10供给中介气体的中介气体供给系统50以及用于向卡盘体供给动力源的电源75。因此，物体1和引导环10之间的温度差减小，并且在半导体处理工艺中可以对象物1的边缘进行均匀处理。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2005094778A Data push service system and method through heterogeneous network 有权
标题翻译：数据推送服务系统和通过异构网络的方法
公开(公告)号：JP2005094778A
公开(公告)日：2005-04-07
申请号：JP2004274052
申请日：2004-09-21
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： LEE SANG-DO , KIM JIN-MAN , KIM TAE-WON , JEON YOUNG-KI , LEE JIN-SOO , KIM SOO-HOI , KO JIN-SEOK , CHANG HONG-SUNG , MOON SANG-JUN , JUNG JE-HYUN
IPC分类号： H04L29/08 , H04W4/12 , H04W88/06 , H04Q7/38
CPC分类号： H04L67/26 , H04L69/329 , H04W4/12 , H04W88/06
摘要： PROBLEM TO BE SOLVED: To provide a heterogeneous mobile communication system. SOLUTION: The heterogeneous mobile communication system, overlapped with at least one packet network to at least one network, capable of connecting to the network or the packet network, and for transmitting push data to a hybrid access terminal (HAT) to be registered to a newly connected network in response to conversion in connecting the network, comprises a packet service & mobility gateway (PSMG) for acquiring a connection state and connection information from the network and the packet network and for requesting the conversion in the connection network of the mobile terminal, and a push proxy gateway (PPG) for transmitting a message which requests the mobile terminal to connect to the network selected in response to the push data after acquiring the connection information of the mobile terminal for transmitting the push data from the packet service & mobility gateway. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供异构移动通信系统。解决方案：异构移动通信系统与至少一个分组网络重叠至少一个网络，能够连接到网络或分组网络，并将推送数据传输到混合接入终端（HAT），以使其成为响应于连接网络的转换而登记到新连接的网络，包括用于从网络和分组网络获取连接状态和连接信息的分组服务和移动性网关（PSMG），并且用于请求在连接网络中的转换移动终端和推送代理网关（PPG），用于在获取用于从分组发送推送数据的移动终端的连接信息之后，发送请求移动终端连接到响应于推送数据而选择的网络的消息服务和移动网关。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2005110262A Access network selection device and method for heterogeneous system 审中-公开
标题翻译：用于异构系统的访问网络选择装置和方法
公开(公告)号：JP2005110262A
公开(公告)日：2005-04-21
申请号：JP2004280365
申请日：2004-09-27
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： JUNG JE-HYUN , LEE SANG-DO , PARK JOON-HO , KIM JIN-MAN , KIM TAE-WON , JEON YOUNG-KI
IPC分类号： H04L12/28 , H04L12/66 , H04W48/18 , H04W88/06
CPC分类号： H04W48/18 , H04W88/06
摘要： PROBLEM TO BE SOLVED: To provide a device and a method for effectively providing a service to a subscriber after searching a most suitable network for a mobile terminal to communicate through varieties of access networks. SOLUTION: The method for connecting the mobile terminal to one of the access networks in a heterogeneous system combined with mutually different access networks comprises a first step of providing a communication service through the access networks if connection to an access network is successful when the connection to any one of access networks from among more than one access networks in accordance with predetermined precedence, and a second step of trying to connect to the access network in next order in accordance with the precedence if the connection to the access network is failed. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于在搜索用于移动终端的最适合的网络以便通过各种接入网络进行通信之后向用户有效提供服务的设备和方法。解决方案：用于将移动终端连接到与相互不同的接入网络组合的异构系统中的接入网络之一的方法包括：如果连接到接入网络是成功的，则通过接入网络提供通信服务的第一步骤根据预定优先级从多于一个接入网络中的任何一个接入网络的连接，以及如果与接入网络的连接失败，则根据优先级尝试以下一次顺序连接到接入网络的第二步骤。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

DE10141844B8 Hochfrequenz-Anpassungseinheit 未知
公开(公告)号：DE10141844B8
公开(公告)日：2010-12-09
申请号：DE10141844
申请日：2001-08-27
申请人： CHOI DAE-KYU , SAMSUNG ELECTRONICS CO LTD
发明人： MIN YOUNG-MIN , CHON SANG-MUN , YANG YUN-SIK , KIM JIN-MAN , CHOI DAE-KYU
IPC分类号： H03H7/38 , H05H1/46 , H01J37/32 , H01L21/302 , H01L21/3065 , H03J1/06

6. 发明专利

DE10141844B4 Hochfrequenz-Anpassungseinheit 未知
公开(公告)号：DE10141844B4
公开(公告)日：2010-07-29
申请号：DE10141844
申请日：2001-08-27
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： MIN YOUNG-MIN , CHON SANG-MUN , YANG YUN-SIK , KIM JIN-MAN , CHOI DAE-KYU
IPC分类号： H03H7/38 , H05H1/46 , H01J37/32 , H01L21/302 , H01L21/3065 , H03J1/06

7. 发明专利

DE10141844A1 未知
公开(公告)号：DE10141844A1
公开(公告)日：2002-04-25
申请号：DE10141844
申请日：2001-08-27
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： MIN YOUNG-MIN , CHON SANG-MUN , YANG YUN-SIK , KIM JIN-MAN , CHOI DAE-KYU
IPC分类号： H05H1/46 , H01J37/32 , H01L21/302 , H01L21/3065 , H03J1/06 , H03H7/38
摘要： An apparatus for matching the impedance of an RF generator to the impedance of an RF load, for use in manufacturing semiconductor devices by using a plasma. The apparatus includes a variable inductor coupled to a variable capacitor and an invariable capacitor, the variable inductor having two inductors coupled electrically with each other in series and disposed adjacent to each other. At least one of the two inductors is disposed movably to make the magnetic flux of the one inductor interfere with the magnetic flux of the other inductor, thereby to control the inductance of the variable inductor. In the case of a plasma enhanced semiconductor wafer processing system, the apparatus can reduce the time necessary to achieve an RF match between the RF generator and the RF load, thereby increasing the life of the apparatus.

8. 发明专利

JP2002176035A RF MATCHING DEVICE 审中-公开
公开(公告)号：JP2002176035A
公开(公告)日：2002-06-21
申请号：JP2001253221
申请日：2001-08-23
申请人： SAMSUNG ELECTRONICS CO LTD , CHOI DAE KYU
发明人： CHOI DAE-KYU , YO JUNSHOKU , KIM JIN-MAN , MIN YOUNG-MIN , CHON SANG-MOON
IPC分类号： H05H1/46 , H01J37/32 , H01L21/302 , H01L21/3065 , H03J1/06 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide an RF matching device which is used for the impedance matching between an RF generator and a chamber in a process of manufacturing a semiconductor element by using a plasma. SOLUTION: A rotary inductor 4 and a fixed inductor 5 are electrically connected in series and respectively have variable inductors 45 which are positioned to adjacent positions. The variable inductor 4 can move in such a way that the inductor 4 is magnetically shielded by the magnetic flux of the fixed inductor 5 by receiving interference from the magnetic flux and the inductance of the inductor 4 is adjusted by the movement. When this RF matching device is applied to the semiconductor element manufacturing process using the plasma, the matching time of the device can be shortened and, accordingly, the service life of the device can be prevented from being shortened by excessive heat radiation.

9. 发明专利

JP2011010350A Method and apparatus for providing voice and data services in mobile communication system with various overlapped access networks 有权
标题翻译：用于在具有各种重载访问网络的移动通信系统中提供语音和数据服务的方法和装置
公开(公告)号：JP2011010350A
公开(公告)日：2011-01-13
申请号：JP2010181399
申请日：2010-08-13
申请人： Samsung Electronics Co Ltd , サムスンエレクトロニクスカンパニーリミテッド
发明人： LEE SANG DO , KIM JIN-MAN , KIM TAE-WON , CHANG HONG-SUNG , SHIM JAE-JEONG , LIM GEUNHWI , JUNG JE-HYUN
IPC分类号： H04W48/18 , H04L12/28 , H04L12/64 , H04L12/66 , H04L29/06 , H04M3/00 , H04W88/06 , H04W88/16 , H04W92/02
CPC分类号： H04L12/6418 , H04L65/80 , H04L2012/6443 , H04W48/18 , H04W88/16 , H04W92/02
摘要： PROBLEM TO BE SOLVED: To provide a method and apparatus for providing either a voice or data to a mobile terminal simultaneously supporting a circuit network and a packet network in a mobile communication system supporting an interworking service between the circuit network and the packet network.SOLUTION: The method includes the steps of: receiving a paging message for either a voice call or a packet data call while monitoring a specified network using a mobile terminal; selecting an optimal access network based on an access state of the mobile terminal and a service request item for either a voice or data in a heterogeneous service & mobility gateway (HSMG); notifying the mobile terminal of the optimal access network selected by the HSMG for an interworking service between a circuit network and a packet network; and transitioning to the access network selected by the mobile terminal.
摘要翻译：要解决的问题：提供一种用于在支持电路网络和分组网络之间的互通服务的移动通信系统中同时支持电路网络和分组网络的移动终端提供语音或数据的方法和装置。该方法包括以下步骤：在使用移动终端监视指定的网络的同时，接收用于语音呼叫或分组数据呼叫的寻呼消息; 基于移动终端的访问状态和用于异构服务和移动网关（HSMG）中的语音或数据的服务请求项来选择最佳接入网络; 向移动终端通知由HSMG选择的用于电路网络和分组网络之间的互通业务的最佳接入网络; 并转移到由移动终端选择的接入网络。

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