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1. 发明专利

DE69228014T2 未知
公开(公告)号：DE69228014T2
公开(公告)日：1999-05-27
申请号：DE69228014
申请日：1992-01-28
申请人： SHINKO ELECTRIC CO LTD
发明人： YAMASHITA TEPPEI , MURATA MASANAO , TANAKA TSUYOSHI , MORITA TERUYA , KAWANO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MITSUHIRO , MORITA HIROMI
IPC分类号： H01L21/677 , H01L21/00 , B65G1/06
摘要： A first aspect of the invention is to provide a wafer keeping facility comprising a wafer keeping box (10) composed of wafer keeping shelves (15, 16) having filters (20) at the rear portions thereof, a loading apparatus (70) having a vertically movable loading mechanism which is mounted thereon and travels along a rail disposed on a front passage before the wafer keeping shelves (15, 16), a fluid circulating device (23) for supplying inert gas to the rear portion of the wafer keeping shelves (15, 16) and generating flowing passage, which directs to the front passage through the filters (20), and exhaust outlets (30B, 31B), first and second path boxes (30, 31) provided at taking-in-and-out outlet of the wafer keeping box (10), a gas reservoir (40) for storing inert gas therein, a first gas supply pipe (41) having a first valve (51), the first gas supply pipe (41) extending from the gas reservoir (40) toward the first pass box (31), a second gas supply pipe (42) having a second valve (52), the second gas supply pipe (42) extending from the gas reservoir (40) toward the second pass box (31), and a fluid control device (50). A second aspect of the present invention is to provide a wafer airtight keeping unit (100) having a plurality of partitioned shelves (111) to which semiconductor wafers are taken in and out characterized in that each of the partitioned shelves (111) is a box having an opening at the front thereof and comprises a wafer accommodating room (114) partitioned by filters (111A, 11B), a fluid supply passage (113A) and a fluid discharge passage (113B) respectively communicate with the wafer accommodating room (114), and a door (12) which can airtightly shut the opening of the partitioned shelf (111) and is closable by a closable mechanism, wherein the fluid supply passage (113A) is connected to an end of a gas supply pipe (131A) to which inert gas is supplied from an exterior fluid reservoir, and the fluid discharge passage (113B) communicate with a gas discharge pipe (131B). A third aspect of the invention is to provide a wafer airtight keeping unit comprising a cylindrical stocker casing (200) having openings at the upper and lower portions thereof and a N2 gas purge space (A) at the inner space thereof, rotary stocker bodies (230) which are partitioned and housed in the stocker casing (200) and having gas passages defined between an inner wall of the stocker casing (200) and the N2 gas purge space (A), rotary mechanisms (245, 246) for rotatively driving the stocker bodies (230), a position sensor (250) for detecting the rotary position of the stocker bodies (230), an air supply chamber (260) for introducing N2 gas into the stocker casing (200) through a filter (261) covering the upper opening of the stocker casing (200) and a air discharge unit (270) communicating with a discharge port (214) defined at the lower opening of the stocker casing (200), characterized in that the stocker bodies (200) are arranged circularly around a hollow supporting shaft (241), which has a closed upper end and a lower end open toward the air discharge port (214), each stocker body (230) is open toward the gas passage and has a plurality of cassette accommodating rooms (R), which are arranged in plural vertical stages and communicate with the hollow supporting shaft (241) through the discharge port (214), each of the stocker casing (200) has a cassette taking-in-and-out port (217) defined at each stage of the stocker body (230) and a door unit (200) for airtightly shutting the cassette taking-in-and-out port (217), the position sensor (25) issues a door opening permission signal when the cassette accommodating room R turns to a predetermined position where the cassette accommodating room (R) confront the cassette taking-in-and-out port (217), and the door unit (222) seals airtightly the cassette accommodating room (R) from other portion of the stocker casing (200) when it is open.

2. 发明专利

FR2398354A1 Boarding passes in form of luggage labels - are fabricated in-situ under operator control by cutting roll of blank strip and printing 未知
公开(公告)号：FR2398354A1
公开(公告)日：1979-02-16
申请号：FR7821431
申请日：1978-07-19
申请人： SHINKO ELECTRIC CO LTD
发明人： ISHIYAMA KYOSHIGE , MORITA HIROMI , NAKANISHI SATOHIKO , ITO CHIKAYUKI , ISHIAI YOSHINORI , KUNIEDA TADASHI
IPC分类号： G07B1/00 , B41J3/20
摘要： A machine produces coded strips of adhesive paper which may be attached to aircraft passenger's luggage and constitute boarding passes. A control unit receives instructions from an operator via keystroke input on a board (E). Printing, feeding, guiding and cutting of a bulk roll of blank strip is performed by relevant sections of mechanism housed in a mobile box (H). All the required data may be printed on the label. The label may also bear the distinctive insignia of the airline, adjacent to the date and flight data.

3. 发明专利

DE69228014D1 未知
公开(公告)号：DE69228014D1
公开(公告)日：1999-02-11
申请号：DE69228014
申请日：1992-01-28
申请人： SHINKO ELECTRIC CO LTD
发明人： YAMASHITA TEPPEI , MURATA MASANAO , TANAKA TSUYOSHI , MORITA TERUYA , KAWANO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MITSUHIRO , MORITA HIROMI
IPC分类号： H01L21/677 , H01L21/00 , B65G1/06
摘要： A first aspect of the invention is to provide a wafer keeping facility comprising a wafer keeping box (10) composed of wafer keeping shelves (15, 16) having filters (20) at the rear portions thereof, a loading apparatus (70) having a vertically movable loading mechanism which is mounted thereon and travels along a rail disposed on a front passage before the wafer keeping shelves (15, 16), a fluid circulating device (23) for supplying inert gas to the rear portion of the wafer keeping shelves (15, 16) and generating flowing passage, which directs to the front passage through the filters (20), and exhaust outlets (30B, 31B), first and second path boxes (30, 31) provided at taking-in-and-out outlet of the wafer keeping box (10), a gas reservoir (40) for storing inert gas therein, a first gas supply pipe (41) having a first valve (51), the first gas supply pipe (41) extending from the gas reservoir (40) toward the first pass box (31), a second gas supply pipe (42) having a second valve (52), the second gas supply pipe (42) extending from the gas reservoir (40) toward the second pass box (31), and a fluid control device (50). A second aspect of the present invention is to provide a wafer airtight keeping unit (100) having a plurality of partitioned shelves (111) to which semiconductor wafers are taken in and out characterized in that each of the partitioned shelves (111) is a box having an opening at the front thereof and comprises a wafer accommodating room (114) partitioned by filters (111A, 11B), a fluid supply passage (113A) and a fluid discharge passage (113B) respectively communicate with the wafer accommodating room (114), and a door (12) which can airtightly shut the opening of the partitioned shelf (111) and is closable by a closable mechanism, wherein the fluid supply passage (113A) is connected to an end of a gas supply pipe (131A) to which inert gas is supplied from an exterior fluid reservoir, and the fluid discharge passage (113B) communicate with a gas discharge pipe (131B). A third aspect of the invention is to provide a wafer airtight keeping unit comprising a cylindrical stocker casing (200) having openings at the upper and lower portions thereof and a N2 gas purge space (A) at the inner space thereof, rotary stocker bodies (230) which are partitioned and housed in the stocker casing (200) and having gas passages defined between an inner wall of the stocker casing (200) and the N2 gas purge space (A), rotary mechanisms (245, 246) for rotatively driving the stocker bodies (230), a position sensor (250) for detecting the rotary position of the stocker bodies (230), an air supply chamber (260) for introducing N2 gas into the stocker casing (200) through a filter (261) covering the upper opening of the stocker casing (200) and a air discharge unit (270) communicating with a discharge port (214) defined at the lower opening of the stocker casing (200), characterized in that the stocker bodies (200) are arranged circularly around a hollow supporting shaft (241), which has a closed upper end and a lower end open toward the air discharge port (214), each stocker body (230) is open toward the gas passage and has a plurality of cassette accommodating rooms (R), which are arranged in plural vertical stages and communicate with the hollow supporting shaft (241) through the discharge port (214), each of the stocker casing (200) has a cassette taking-in-and-out port (217) defined at each stage of the stocker body (230) and a door unit (200) for airtightly shutting the cassette taking-in-and-out port (217), the position sensor (25) issues a door opening permission signal when the cassette accommodating room R turns to a predetermined position where the cassette accommodating room (R) confront the cassette taking-in-and-out port (217), and the door unit (222) seals airtightly the cassette accommodating room (R) from other portion of the stocker casing (200) when it is open.

4. 发明专利

JPS6450104A CONTROL METHOD FOR NUMBER OF SETS OF COMPRESSOR 失效
公开(公告)号：JPS6450104A
公开(公告)日：1989-02-27
申请号：JP20526287
申请日：1987-08-20
申请人： SHINKO ELECTRIC CO LTD
发明人： MORITA HIROMI , KAMIYA HIROYUKI , FUJIWARA YOSHIAKI , SHIMOYU YOSHIO , OTANI MIKIO
IPC分类号： G05B11/18 , F04B49/06
摘要： PURPOSE:To execute an economical operation by checking whether the suppliable air quantity corresponds to the maximum consumption air quantity or not, in case an operation of the present tank is continued for a prescribed time, and executing the rank-down, when said air quantity is excessive. CONSTITUTION:A consumption air quantity arithmetic part 50 brings discharge pressure from a pressure detector and suction pressure PS1-PSn from a suction pressure detector, to sampling, respectively and inputs them, and operates the consumption air quantity Qoi. When a rank is selected, a rank monitoring timer part 60 of a set number control part 40 stores its rank, and it is set after a start of a compressor of this rank has been completed, and starts a time counting operation, and becomes time-up when the time counting time becomes a set value, and outputted. A rank evaluating part 61 extracts a rank for supplying the maximum consumption air quantity QTMAX in a timer operation period in conformity with a program, compares this rank and the present rank and in case the extracted rank has higher profitability than the present rank, a rank-down to the extracted rank is requested. The control part 40 switches to the compressor belonging to the request rank at the time when switching can be executed, and starts it.

5. 发明专利

JPS6453082A DETECTION OF TROUBLE IN COMPRESSOR 失效
公开(公告)号：JPS6453082A
公开(公告)日：1989-03-01
申请号：JP20526387
申请日：1987-08-20
申请人： SHINKO ELECTRIC CO LTD , KOBE STEEL LTD
发明人： HASHIMOTO HIROYOSHI , NAGANO KATSUHIKO , MORITA HIROMI , KAMIYA HIROYUKI , FUJIWARA YOSHIAKI , SHIMOYU YOSHIO , OTANI MIKIO
IPC分类号： F04B49/10 , F04B49/06
摘要： PURPOSE:To speedily detect a machine in trouble by judging trouble even if the variation rate of the discharge pressure after the switching of the damper of a compressor does not largely deflect from the pressure variation rate before said switching. CONSTITUTION:A trouble monitoring program is stored into a program memory 42 in an operating machine number controller 4. The total supplied air quantity of the compressor at present is calculated in a central calculation processing part 41 and memorized in a data memory 43 up to the next sampling. The case of trouble is judged even if the variation rate of the discharge pressure after the switching of the damper of the compressor does not deflect largely from the pressure variation rate before the switching. Therefore, a machine in trouble can be detected speedily.

6. 发明专利

JPS6450102A CONTROL METHOD FOR NUMBER OF SETS OF COMPRESSOR 失效
公开(公告)号：JPS6450102A
公开(公告)日：1989-02-27
申请号：JP20526087
申请日：1987-08-20
申请人： SHINKO ELECTRIC CO LTD
发明人： MORITA HIROMI , KAMIYA HIROYUKI , FUJIWARA YOSHIAKI , SHIMOYU YOSHIO , OTANI MIKIO
IPC分类号： G05B11/18 , F04B49/06
摘要： PURPOSE:To always secure the safe operation of a compressor and to raise the reliability by selecting a substitute machine, as for the compressor whose elapsed time after the operation has been stopped in within a prescribed time, among the compressors belonging to the designated rank to limit a start frequency. CONSTITUTION:A set number controller 40 has a start frequency monitoring timer part 41, the timer part 41 has timers TM11-T1N for inputting stop commands S1off-SNoff given to each compressor given to each compressor 11-1N and starting the time counting, and when a prescribed time T0 elapses after the time counting has been started, each timer becomes time-up and sends out a start permitting signal. In case for instance, the load use quantity increases and the discharge pressure has dropped to the lower limit set pressure PL, the device 40 selects a rank of a higher level being higher than the present in the total discharge air quantity, from the generated rank pattern table, generates a rank-up command and executes a prescribed set number control, but in this case, when the time T0 does not elapse after the compressor 1N to be moved newly has topped, the compressor having an equal function is selected as a substitute machine from an operable machine list and started in conformity with a program.

7. 发明专利

JPS6450101A CONTROLLER FOR NUMBER OF SETS OF COMPRESSOR 失效
公开(公告)号：JPS6450101A
公开(公告)日：1989-02-27
申请号：JP20525987
申请日：1987-08-20
申请人： SHINKO ELECTRIC CO LTD
发明人： MORITA HIROMI , KAMIYA HIROYUKI , FUJIWARA YOSHIAKI , SHIMOYU YOSHIO , OTANI MIKIO
IPC分类号： G05B11/18 , F04B49/06
摘要： PURPOSE:To reduce the labor and the time for generating a rank pattern, by generating automatically a rank pattern table which has prescribed a combination of compressors, in conformity with a program. CONSTITUTION:When a rank pattern generating command is received, a CPU 5 generates a rank pattern by a combination of compressors, in conformity with a rank table generating program stored in a program memory part 6, and rearranges it in order of a total rated capacity. Subsequently, in case a base loading machine is designated, a rank pattern which does not contain this loading machine is deleted and a rank table is reorganized, and thereafter, registered to a rank table memory part 8 of a data base part 7. A set number control part 4 selects a rank of a lower level/a higher level being lower or higher than the present rank, respectively, from the generated rank pattern table, at the time point when discharge pressure P0 has reached the upper limit/ lower limit setting pressure due to a sudden decrease/increase of the load use quantity, generates rank-down/rank-up commands, and executes a set number control of compressors to be started.

8. 发明专利

JPS61156023A AUTOMATIC SPECTACLE LENS GRINDER 失效
公开(公告)号：JPS61156023A
公开(公告)日：1986-07-15
申请号：JP28137484
申请日：1984-12-27
申请人： SHINKO ELECTRIC CO LTD
发明人： MORITA HIROMI
IPC分类号： G02C9/00 , B24B9/14 , B24C3/20 , G02C11/00 , G02C13/00
摘要： PURPOSE:To set up a lens easily and precisely by setting up the optical centering point of the lens as its working center at the setting of the lens of a lens grinder. CONSTITUTION:An arithmetic unit 30 determines a point O2 apart from the center line Lc of a frame by a distance PD/2 and arranged upward from a horizontal line Lx passing a geometric center point M by a distance PA as the optical centering point O2. The lens 5 can be held easily and precisely by making the optical centering point O2, i.e. the center point of the lens 5, coincide with the axis of a chuck shaft 6. Then, a pulse motor 23 which is a moving function 24 is controlled so that the vortex of the lens 5 is set up on a prescribed initial position. Thus, the lens 5 is positioned on a place immediately above a rough grinding stone 8.

9. 发明专利

JPS61156022A AUTOMATIC SPECTACLE LENS GRINDER 失效
公开(公告)号：JPS61156022A
公开(公告)日：1986-07-15
申请号：JP28137384
申请日：1984-12-27
申请人： SHINKO ELECTRIC CO LTD
发明人： MORITA HIROMI
IPC分类号： G02C9/00 , B24B9/14 , B24C3/20 , G02C11/00 , G02C13/00
摘要： PURPOSE:To attain extremely fine ridgeline forming work by calculating a ridgeline deflection value every rotational angle of a lens and moving the lens on the basis of the ridgeline deflection value. CONSTITUTION:A frame inner diameter measuring instrument 2b has a probe 28 to be turned while abutting upon a circular inside groove 27 of a frame fixed on the instrument 26 and a rotary encoder 29 for detecting the rotational angle theta of the prove 28 and a distance (inner diameter) R between the rotational center O1 of the prove 28 and the groove 27 is supplied to an arithmetic unit 30 as an electric signal together with the rotational angle theta. The arithmetic unit 30 stores the inner diameters R corresponding to respective rotational angles theta (theta=1-360 deg.) in a measuring table T1 of a memory and calculates the value epsilon. The value epsilon corresponds to the moving distance of the lens in the axial direction at the time of ridgeline forming work and a pulse motor 23 is controlled by the value epsilon.

10. 发明专利

JPH01100392A NUMBER OF COMPRESSORS CONTROL METHOD 失效
公开(公告)号：JPH01100392A
公开(公告)日：1989-04-18
申请号：JP10460587
申请日：1987-04-30
申请人： SHINKO ELECTRIC CO LTD , KOBE STEEL LTD
发明人： HASHIMOTO HIROYOSHI , NAGANO KATSUHIKO , MORITA HIROMI , KAMIYA HIROYUKI , FUJIWARA YOSHIAKI , SHIMOYU YOSHIO , OTANI MIKIO
IPC分类号： F04B49/06
摘要： PURPOSE:To enhance the operating efficiency by monitoring the consumed wind quantity in case the number of compressors is controlled according to change in the load, comparing the quantity with the suppliable wind quantity, and commanding rank down or rank up according its magnitude. CONSTITUTION:An arrangement in which a plurality of compressors 1 (11, 12,..., 1N) are driven by drive motors 21, 22,..., 2N, and discharged air from the compressors 1 is stored once in a receiver tans 7 to then be supplied to the loads 9a, 9b,..., is equipped with a pressure sensor 10 to sense the discharge pressure and ones 101, 102,..., 10N to sense the suction pressure of the compressors 1. On the basis of signals therefrom, the consumed wind quantity and suppliable wind quantity are calculated by a number-of-compressors control device 40, and the two wind quantities are compared. When the consumed wind quantity changes up or down from the suppliable wind quantity specified at the current rank, a rank below or above the current rank is selected to perform control of the number-of-compressors.

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