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1. 发明专利

DE69829085T2 未知
公开(公告)号：DE69829085T2
公开(公告)日：2005-12-29
申请号：DE69829085
申请日：1998-04-22
申请人： SHINKO ELECTRIC CO LTD
发明人： TSUDA MASANORI , OKUNO ATSUSHI , NAKAI YASUHIRO
IPC分类号： C21C5/52 , F27B14/04 , F27B14/06 , F27B14/10 , F27B14/18 , F27B14/20 , F27D3/15 , F27D99/00
摘要： An induction heating furnace includes a furnace body (1) having a side wall extending so obliquely as to increase in radius from the bottom to the top edge portion and formed by a plurality of longitudinally split, conductive segments (4) being arrayed circumferentially with their being insulated from each other; a first induction heating coil (5), arranged at an outer periphery side of the side wall, for subjecting a to-be-heated material accommodated in the furnace body (1) to induction heating; and a melt-use power source (7) for supplying AC power to the first induction heating coil (5).

2. 发明专利

DE69720084T2 未知
公开(公告)号：DE69720084T2
公开(公告)日：2003-09-04
申请号：DE69720084
申请日：1997-10-02
申请人： SHINKO ELECTRIC CO LTD , ABIKO KENJI
发明人： ABIKO KENJI , HARADE MASANOBU , KAWANO HITOSHI , TSUDA MASANORI , NAKAI YASUHIRO , NAKAJIMA TADAHITO
IPC分类号： C21C5/52 , C21C7/10 , C22B9/00 , C22B9/04 , F27B14/04 , F27B14/06 , F27B17/00 , F27D7/06 , F27D9/00 , F27D19/00
摘要： A vacuum induction melting apparatus comprises a vacuum vessel and a melting furnace in the form of a high-frequency induction heating type crucible, wherein the vacuum vessel has a double-jacket structure that can be heated by circulating hot water supplied from a heat exchanger. The melting furnace includes a metal crucible that can be water-cooled and a high-frequency induction coil that is wound around the crucible and can be water cooled as well.

3. 发明专利

DE69720083D1 未知
公开(公告)号：DE69720083D1
公开(公告)日：2003-04-24
申请号：DE69720083
申请日：1997-10-02
申请人： SHINKO ELECTRIC CO LTD , ABIKO KENJI
发明人： ABIKO KENJI , HARADA MASANOBU , KAWANO HITOSHI , TSUDA MASANORI , NAKAI YASUHIRO , NAKAJIMA TADAHITO
IPC分类号： C21C5/52 , C21C7/10 , C22B9/00 , C22B9/04 , F27B14/04 , F27B14/06 , F27B17/00 , F27D7/06 , F27D9/00 , F27D19/00
摘要： A vacuum induction melting apparatus comprises a vacuum vessel and a melting furnace in the form of a high-frequency induction heating type crucible, wherein the vacuum vessel has a double-jacket structure that can be heated by circulating hot water supplied from a heat exchanger. The melting furnace includes a metal crucible that can be water-cooled and a high-frequency induction coil that is wound around the crucible and can be water cooled as well.

4. 发明专利

DE69807774T2 未知
公开(公告)号：DE69807774T2
公开(公告)日：2003-05-28
申请号：DE69807774
申请日：1998-04-22
申请人： SHINKO ELECTRIC CO LTD
发明人： TSUDA MASANORI , OKUNO ATSUSHI , NAKAI YASUHIRO
IPC分类号： C21C5/52 , F27B14/04 , F27B14/06 , F27B14/10 , F27B14/18 , F27B14/20 , F27D3/15 , F27D99/00
摘要： An induction heating furnace includes a furnace body (1) having a side wall extending so obliquely as to increase in radius from the bottom to the top edge portion and formed by a plurality of longitudinally split, conductive segments (4) being arrayed circumferentially with their being insulated from each other; a first induction heating coil (5), arranged at an outer periphery side of the side wall, for subjecting a to-be-heated material accommodated in the furnace body (1) to induction heating; and a melt-use power source (7) for supplying AC power to the first induction heating coil (5).

5. 发明专利

DE69325840T2 未知
公开(公告)号：DE69325840T2
公开(公告)日：1999-11-25
申请号：DE69325840
申请日：1993-03-26
申请人： SHINKO ELECTRIC CO LTD
发明人： YAMASHITA TEPPEI , MURATA MASANAO , TANAKA TSUYOSHI , MORITA TERUYA , KAWANO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MITSUHIRO
IPC分类号： G06K17/00 , G06K19/10 , H01L21/02
摘要： Disclosure is an ID recognizing system for a semiconductor manufacturing system in which an ID module can be mounted on a cassette or container without formation of a protrusion which may obstruct the self-cleaning operation, and in order to change the data, it is unnecessary to remove the ID module from the cassette or container and to affix it thereto again, and the ID module has a memory capable of storing a large quantity of data, and the control data can be moved together with the cassette or container. The ID recognizing system comprises IC modules which are set on the surfaces of containers which accommodate wafers and are conveyed from one device to another in the semiconductor manufacturing system, each ID module having a signal transmitting and receiving function, and a reloadable memory; and a fixed station for performing two-way radio communication with the IC modules, which station is fixedly set at a predetermined position in each of the devices, the IC module being operated on the energy of radio waves received.

6. 发明专利

DE69304385T2 未知
公开(公告)号：DE69304385T2
公开(公告)日：1997-01-16
申请号：DE69304385
申请日：1993-04-02
申请人： SHINKO ELECTRIC CO LTD
发明人： YAMASHITA TEPPEI , MURATA MASANAO , TANAKA TSUYOSHI , MORITA TERUYA , KAWANO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MITSUHIRO
IPC分类号： B65D88/12 , B65D81/20 , B65D85/38 , B65D85/86 , B65G49/00 , B65G49/07 , F24F7/007 , H01L21/02 , H01L21/673 , H01L21/00
摘要： Disclosure is a closed container used in a clean room in a semiconductor manufacturing system which eliminates the difficulty that it is necessary to convey a container to an inert gas purge station to supplement it with the inert gas. In the closed container which accommodates wafers in an inert gas atmosphere, and is conveyed from one processing device to another in a semiconductor manufacturing system; in which, a gas passageway is formed in the container in such a manner that one end thereof is open inside the container and the other end is open outside the container, and a portable inert gas bomb is detachably connected to the other end of the gas passageway, to supplement the container with the inert gas.

7. 发明专利

DE69732165D1 未知
公开(公告)号：DE69732165D1
公开(公告)日：2005-02-10
申请号：DE69732165
申请日：1997-09-24
申请人： SHINKO ELECTRIC CO LTD
发明人： ABIKO KENJI , KAWANO HITOSHI , TSUDA MASANORI , NAKAJIMA TADAHITO
IPC分类号： F27B14/06 , H05B6/24 , H05B6/32

8. 发明专利

DE69720083T2 未知
公开(公告)号：DE69720083T2
公开(公告)日：2003-09-04
申请号：DE69720083
申请日：1997-10-02
申请人： SHINKO ELECTRIC CO LTD , ABIKO KENJI
发明人： ABIKO KENJI , HARADA MASANOBU , KAWANO HITOSHI , TSUDA MASANORI , NAKAI YASUHIRO , NAKAJIMA TADAHITO
IPC分类号： C21C5/52 , C21C7/10 , C22B9/00 , C22B9/04 , F27B14/04 , F27B14/06 , F27B17/00 , F27D7/06 , F27D9/00 , F27D19/00
摘要： A vacuum induction melting apparatus comprises a vacuum vessel and a melting furnace in the form of a high-frequency induction heating type crucible, wherein the vacuum vessel has a double-jacket structure that can be heated by circulating hot water supplied from a heat exchanger. The melting furnace includes a metal crucible that can be water-cooled and a high-frequency induction coil that is wound around the crucible and can be water cooled as well.

9. 发明专利

DE69228014T2 未知
公开(公告)号：DE69228014T2
公开(公告)日：1999-05-27
申请号：DE69228014
申请日：1992-01-28
申请人： SHINKO ELECTRIC CO LTD
发明人： YAMASHITA TEPPEI , MURATA MASANAO , TANAKA TSUYOSHI , MORITA TERUYA , KAWANO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MITSUHIRO , MORITA HIROMI
IPC分类号： H01L21/677 , H01L21/00 , B65G1/06
摘要： A first aspect of the invention is to provide a wafer keeping facility comprising a wafer keeping box (10) composed of wafer keeping shelves (15, 16) having filters (20) at the rear portions thereof, a loading apparatus (70) having a vertically movable loading mechanism which is mounted thereon and travels along a rail disposed on a front passage before the wafer keeping shelves (15, 16), a fluid circulating device (23) for supplying inert gas to the rear portion of the wafer keeping shelves (15, 16) and generating flowing passage, which directs to the front passage through the filters (20), and exhaust outlets (30B, 31B), first and second path boxes (30, 31) provided at taking-in-and-out outlet of the wafer keeping box (10), a gas reservoir (40) for storing inert gas therein, a first gas supply pipe (41) having a first valve (51), the first gas supply pipe (41) extending from the gas reservoir (40) toward the first pass box (31), a second gas supply pipe (42) having a second valve (52), the second gas supply pipe (42) extending from the gas reservoir (40) toward the second pass box (31), and a fluid control device (50). A second aspect of the present invention is to provide a wafer airtight keeping unit (100) having a plurality of partitioned shelves (111) to which semiconductor wafers are taken in and out characterized in that each of the partitioned shelves (111) is a box having an opening at the front thereof and comprises a wafer accommodating room (114) partitioned by filters (111A, 11B), a fluid supply passage (113A) and a fluid discharge passage (113B) respectively communicate with the wafer accommodating room (114), and a door (12) which can airtightly shut the opening of the partitioned shelf (111) and is closable by a closable mechanism, wherein the fluid supply passage (113A) is connected to an end of a gas supply pipe (131A) to which inert gas is supplied from an exterior fluid reservoir, and the fluid discharge passage (113B) communicate with a gas discharge pipe (131B). A third aspect of the invention is to provide a wafer airtight keeping unit comprising a cylindrical stocker casing (200) having openings at the upper and lower portions thereof and a N2 gas purge space (A) at the inner space thereof, rotary stocker bodies (230) which are partitioned and housed in the stocker casing (200) and having gas passages defined between an inner wall of the stocker casing (200) and the N2 gas purge space (A), rotary mechanisms (245, 246) for rotatively driving the stocker bodies (230), a position sensor (250) for detecting the rotary position of the stocker bodies (230), an air supply chamber (260) for introducing N2 gas into the stocker casing (200) through a filter (261) covering the upper opening of the stocker casing (200) and a air discharge unit (270) communicating with a discharge port (214) defined at the lower opening of the stocker casing (200), characterized in that the stocker bodies (200) are arranged circularly around a hollow supporting shaft (241), which has a closed upper end and a lower end open toward the air discharge port (214), each stocker body (230) is open toward the gas passage and has a plurality of cassette accommodating rooms (R), which are arranged in plural vertical stages and communicate with the hollow supporting shaft (241) through the discharge port (214), each of the stocker casing (200) has a cassette taking-in-and-out port (217) defined at each stage of the stocker body (230) and a door unit (200) for airtightly shutting the cassette taking-in-and-out port (217), the position sensor (25) issues a door opening permission signal when the cassette accommodating room R turns to a predetermined position where the cassette accommodating room (R) confront the cassette taking-in-and-out port (217), and the door unit (222) seals airtightly the cassette accommodating room (R) from other portion of the stocker casing (200) when it is open.

10. 发明专利

DE69732165T2 未知
公开(公告)号：DE69732165T2
公开(公告)日：2005-12-22
申请号：DE69732165
申请日：1997-09-24
申请人： SHINKO ELECTRIC CO LTD
发明人： ABIKO KENJI , KAWANO HITOSHI , TSUDA MASANORI , NAKAJIMA TADAHITO
IPC分类号： F27B14/06 , H05B6/24 , H05B6/32

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