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    • 6. 发明专利
    • WAFER CARRIER
    • JPH01268041A
    • 1989-10-25
    • JP9607688
    • 1988-04-19
    • SHIMIZU CONSTRUCTION CO LTD
    • KAJIMA TOMOAKISUZUKI YOSHINOBUKASE TAKAOOIKAWA SUSUMU
    • B25H3/00H01L21/673H01L21/68
    • PURPOSE:To prevent charging of wafers, to decrease the amount of adhesion of particles to the wafers and to improve the yield of products, by arranging semiconductors or metal wires which are in contact with the wafers in the insides of grooves so that the grooves communicate with one another, and providing grounding terminals. CONSTITUTION:A side plate 13 is manufactured with a nonconductive material such as polypropylene and tetrafluoroethylene resin and the like. A plurality of grooves 12 for holding wafers 10 are formed at the inside of the side plate 13. Conductive semiconductors or metal wires 17 are arranged in contact with the wafers in the grooves 12 so that the grooves 12 are communicated without adverse effects on the semiconductor elements. Grounding terminals 17a and 17b are provided so that the metal wires 17 are brought into contact with a grounding member 18. For example, said metal wires 17 and the grounding terminals 17a and 17b are manufactured with the following materials: thin wire of platinum and the like which are not corroded with chemicals and the like; and thin films of conductive semiconductors such as doped silicon which do not give adverse effects on the semiconductor elements even if the films are corroded with chemicals.
    • 9. 发明专利
    • AIR CLEANER
    • JPH11169639A
    • 1999-06-29
    • JP33752097
    • 1997-12-08
    • SHIMIZU CONSTRUCTION CO LTD
    • TANAKA ISAOKAJIMA TOMOAKI
    • B01D53/14A61L9/00A61L9/01A61L9/20B01D53/00B01J35/02
    • PROBLEM TO BE SOLVED: To excellently exhibit the decomposition/removal capacity for an alkaline gas over a long period by interposing a photocatalyst for decomposing and removing the alkaline gas in response to the irradiation with a specific light in a circulation flow passage in with respect to a device formed by interpos ing an alkaline gas absorbing filter in the midway of the circulation flow pas sage. SOLUTION: Relating to the air cleaner formed by interposing the alkaline gas absorbing filter 27 in the midway of the circulation flow passage for forcibly circulating room air, the photocatalyst 40 for decomposing and removing the alkaline gas in response to the irradiation with ultraviolet ray is carried on the alkaline gas absorbing filter 27. That is, the alkaline gas absorbing filter 27 is constituted of plural filter elements 27A-27C, on each of which the photocatalyst 40 is carried, and an ultraviolet lamps 42 for irradiating the photocatalyst 40 with ultraviolet ray are arranged among the filter elements 27A-27C. And the photocatalyst is arranged on the inner wall surface of a gas circulating duct or a gas feed duct constituting the circulation flow passage to reduce the load of the alkaline gas absorbing filter 27.