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    • 5. 发明申请
    • METHOD OF SEPARATING SEMICONDUCTOR DIES
    • 分离半导体芯片的方法
    • WO2007117805A3
    • 2007-12-13
    • PCT/US2007063589
    • 2007-03-08
    • SEMILEDS CORPCHU CHEN-FUDOAN TRUNG TRICHENG HAO-CHUNFAN FENG-HSUWANG FU-HSIEN
    • CHU CHEN-FUDOAN TRUNG TRICHENG HAO-CHUNFAN FENG-HSUWANG FU-HSIEN
    • H01L21/301H01L21/44H01L21/48H01L21/50
    • H01L33/0079H01L33/0095
    • A method for the separation of multiple dies during semiconductor fabrication is described. On an upper surface of a semiconductor wafer containing multiple dies, metal layers are deposited everywhere except where a block of stop electroplating material exists. The stop electroplating material is obliterated, and a barrier layer is formed above the entire remaining structure. A sacrificial metal element is added above the barrier layer, and then the substrate is removed. After the semiconductor material between the individual dies is eradicated, any desired bonding pads and patterned circuitry are added to the semiconductor surface opposite the sacrificial metal element, a passivation layer is added to this surface, and then the sacrificial metal element is removed. Tape is added to the now exposed barrier layer, the passivation layer is removed, the resulting structure is flipped over, and the tape is expanded to separate the individual dies.
    • 描述了在半导体制造过程中分离多个管芯的方法。 在包含多个管芯的半导体晶片的上表面上,除了存在阻挡电镀材料块的地方之外,金属层被沉积​​在各处。 停止电镀材料被消除,并且在整个剩余结构上方形成阻挡层。 在阻挡层上方添加牺牲金属元素,然后除去衬底。 在各个裸片之间的半导体材料被消除之后,将任何期望的接合焊盘和图案化电路添加到与牺牲金属元件相对的半导体表面,钝化层被添加到该表面,然后去除牺牲金属元件。 将胶带添加到现在暴露的阻挡层中,去除钝化层,翻转所得到的结构,并且将胶带展开以分离各个模具。