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1. 发明申请

US20040129684A1 Method of laser processing and head for ejecting droplet 失效
标题翻译：激光加工方法和喷头喷头
公开(公告)号：US20040129684A1
公开(公告)日：2004-07-08
申请号：US10706619
申请日：2003-11-12
申请人： SEIKO EPSON CORPORATION
发明人： Daisuke Sawaki , Masato Shimada , Kazushige Umetsu
IPC分类号： B23K026/00
CPC分类号： B23K26/032 , B23K26/046 , B23K26/0624 , B23K26/082 , B23K26/1224 , B23K26/123 , B23K26/14 , B23K26/142 , B23K26/364 , B23K26/389 , B23K26/40 , B23K2103/14 , B23K2103/16 , B23K2103/172 , B23K2103/52 , B41J2/1607 , B41J2/1623 , B41J2/1626 , B41J2/1634 , B41J2002/14241
摘要： A method of laser processing for processing a laminated member where a metal thin film is protruded from an end portion of a silicon substrate at the bottom of the silicon substrate, wherein; a laser beam of which wavelength has the light absorption coefficient of the metal thin film being higher than the light absorption coefficient of the silicon substrate, is irradiated onto an boundary between an end of the silicon substrate and the metal thin film so as to cut the metal thin film.
摘要翻译：一种激光加工方法，用于处理在硅衬底的底部从硅衬底的端部突出金属薄膜的层叠构件，其中：将具有比硅衬底的光吸收系数高的金属薄膜的波长的波长的激光照射到硅衬底的端部与金属薄膜之间的边界上，以切割金属薄膜。

2. 发明申请

US20040134881A1 Method of manufacturing liquid jet head 审中-公开
标题翻译：液体喷头的制造方法
公开(公告)号：US20040134881A1
公开(公告)日：2004-07-15
申请号：US10612411
申请日：2003-07-03
申请人： SEIKO EPSON CORPORATION
发明人： Masato Shimada , Tetsushi Takahashi
IPC分类号： G11B005/127
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419
摘要： Disclosed is a method of manufacturing a liquid jet head, which enables a passage-forming substrate to be easily handled, thus realizing good formation of pressure generating chambers and an improvement in manufacturing efficiency. The method includes the steps of: forming a vibration plate and piezoelectric elements on one surface of the passage-forming substrate; thermally adhering a sealing plate which has a piezoelectric element holding portion for sealing the piezoelectric elements therein, onto the passage-forming substrate; processing the passage-forming substrate to have a predetermined thickness; depositing an insulation film on other surface of the passage-forming substrate at lower temperature than that for adhering the passage-forming substrate and the sealing plate, and patterning the insulation film into a predetermined shape; and etching the passage-forming substrate using the patterned insulation film as a mask to form the pressure generating chambers. Thus, handling of the passage-forming substrate becomes easy, and the pressure generating chambers can be formed with high precision.
摘要翻译：公开了一种制造液体喷射头的方法，其使得能够容易地处理通道形成基板，从而实现良好的压力发生室的形成和提高制造效率。该方法包括以下步骤：在通道形成基板的一个表面上形成振动板和压电元件; 将具有用于将压电元件密封的压电元件保持部分的密封板热粘合到通道形成基板上; 处理通道形成衬底以具有预定厚度; 在比通过用通路形成基板和密封板粘接的温度低的温度下在通路形成基板的其他表面上沉积绝缘膜，并将绝缘膜图案化成预定的形状; 并使用图案化的绝缘膜作为掩模蚀刻通道形成基板以形成压力发生室。因此，通道形成基板的处理变得容易，可以高精度地形成压力发生室。

3. 发明申请

US20040130601A1 Liquid-jet head, method of manufacturing the same, and liquid-jet apparatus 有权
标题翻译：喷液头，制造方法和液体喷射装置
公开(公告)号：US20040130601A1
公开(公告)日：2004-07-08
申请号：US10679515
申请日：2003-10-07
申请人： SEIKO EPSON CORPORATION
发明人： Masato Shimada
IPC分类号： B41J002/045
CPC分类号： B41J2/1433 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1635 , B41J2002/14241 , B41J2002/14419 , B41J2202/11
摘要： Provided are a liquid-jet head in which a passage-forming substrate and a nozzle plate can be suitably joined, a method of manufacturing the same, and a liquid-jet apparatus. A covering plate has a piezoelectric element holding portion which covers piezoelectric elements. This covering plate is joined with a side of the passage-forming substrate where the piezoelectric elements are provided. At the same time, the nozzle plate provided with nozzle orifices is joined with a side of the passage-forming substrate opposite the side where the covering plate is joined. Moreover, at least a region of the passage-forming substrate facing the piezoelectric element holding portion is formed to be relatively thicker than the outside of the region facing the piezoelectric element holding portion.
摘要翻译：提供一种液体喷射头，其中通道形成基板和喷嘴板可以适当地接合，其制造方法和液体喷射装置。盖板具有覆盖压电元件的压电元件保持部。该覆盖板与设置有压电元件的通道形成基板的一侧接合。同时，具有喷嘴孔的喷嘴板与通道形成基板的与盖板接合的一侧相反的一侧接合。此外，至少面向压电元件保持部的通路形成基板的区域形成为比面向压电元件保持部的区域的外侧更厚。

4. 发明申请

US20020018105A1 Process for producing a laminated ink-jet recording head 失效
标题翻译：用于制造层压喷墨记录头的方法
公开(公告)号：US20020018105A1
公开(公告)日：2002-02-14
申请号：US09974441
申请日：2001-10-11
申请人： SEIKO EPSON CORPORATION
发明人： Minoru Usui , Masato Shimada , Masami Murai , Kouji Sumi , Tsutomu Nishiwaki
IPC分类号： B41J002/045 , H04R017/00 , B23P017/00
CPC分类号： B41J2/1625 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/1425 , B41J2002/14387 , B41J2202/03 , H01L41/317 , H01L41/319 , Y10T29/42 , Y10T29/49155 , Y10T29/49401
摘要： A process for producing a laminated ink-jet recording head including the steps of forming a titanium layer across a surface of a diaphragm, and forming a layer of a piezoelectric material on the titanium layer by a hydrothermal method.
摘要翻译：一种层压喷墨记录头的制造方法，包括以下步骤：在隔膜的表面上形成钛层，并通过水热法在钛层上形成压电材料层。

5. 发明申请

US20040141032A1 Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效
标题翻译：喷墨记录头，其制造方法和喷墨记录装置
公开(公告)号：US20040141032A1
公开(公告)日：2004-07-22
申请号：US10754712
申请日：2004-01-12
申请人： SEIKO EPSON CORPORATION
发明人： Akira Matsuzawa , Masato Shimada , Tetsushi Takahashi
IPC分类号： B41J002/045
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein. The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 dose to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.
摘要翻译：公开了一种提高压电元件和压力发生室之间的相对位置精度的喷墨记录头，以改善喷墨特性和稳定性，能够以高密度排列压力发生室，并减少压力产生室之间的串扰。此外，公开了其制造方法和其中内置喷墨记录头的喷墨记录装置。喷墨记录头包括：通道形成基板10，其具有形成在其中的压力发生室11，其与喷嘴孔连通; 以及压电元件300，其通过构成压力发生室11的一部分的振动板，在与压力发生室11对应的区域中由薄膜和平版印刷法形成。喷墨记录头的特征在于，与压力发生室11连通并且具有由振动板构成的至少一个表面的空间部分41设置在通道形成基板10和振动板之间的区域中，该区域与压力产生室11相对，并且在压缩产生室11的空间部分41的最小宽度被设定为等于空间部分41的宽度以下，从而提高了压力发生室11与压电元件300之间的相对位置精度。

6. 发明申请

US20020085065A1 Ink-jet recording head and ink-jet recording apparatus 有权
标题翻译：喷墨记录头和喷墨记录装置
公开(公告)号：US20020085065A1
公开(公告)日：2002-07-04
申请号：US09977197
申请日：2001-10-16
申请人： SEIKO EPSON CORPORATION
发明人： Masato Shimada , Yoshinao Miyata , Hiroyuki Kamei , Tetsushi Takahashi
IPC分类号： B41J002/045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber 12 a piezoelectric active portion 320 as a substantial drive portion of the piezoelectric element 300 and a piezoelectric non-active portions 330 having the piezoelectric layer continuous from the piezoelectric active portion but not being substantially driven, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof, electrode wiring 90 drawn out of the upper electrode 80 is provided on one end portion in the longitudinal direction of the pressure generating chamber 12. And there is provided a protection layer 100 on the other end portion in the longitudinal direction of the pressure generating chamber 12 for protecting the vibration plate being provided in a region facing an end portion of the pressure generating chamber 12 and in region facing an end portion of the piezoelectric layer 70 within the region facing the pressure generating chamber. Rigidity of the vibration plate is thereby increased.
摘要翻译：提供了防止其振动板由于压电元件的驱动而引起的损坏的喷墨记录头和喷墨记录装置。在面向压力产生室12的区域内设有作为压电元件300的实质驱动部分的压电有源部分320和具有与压电有源部分连续但不被实质驱动的压电层的压电非有效部分330 压电非有效部分设置在压电有源部分的纵向方向的两端部上，从上电极80引出的电极布线90设置在压力发生室12的纵向方向的一个端部并且在压力发生室12的长度方向的另一端部设置有保护层100，用于保护设置在面向压力发生室12的端部的区域中的振动板以及面向端部的区域压电层70的面向压榨区域的部分再生室。因此振动板的刚度增加。

7. 发明申请

US20020051040A1 Ink-jet recording head and ink-jet recording apparatus 审中-公开
标题翻译：喷墨记录头和喷墨记录装置
公开(公告)号：US20020051040A1
公开(公告)日：2002-05-02
申请号：US09977380
申请日：2001-10-16
申请人： SEIKO EPSON CORPORATION
发明人： Masato Shimada , Yoshinao Miyata , Hiroyuki Kamei , Tetsushi Takahashi
IPC分类号： B41J002/045
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus. In an ink-jet recording head, comprising: a pressure generating chamber (12) communicating with a nozzle orifice; and a piezoelectric element (300) having a lower electrode (60), a piezoelectric layer (70) and an upper electrode (80), the piezoelectric element (300) being provided in a region corresponding to the pressure generating chamber (12) with a vibration plate interposed therebetween, the piezoelectric element (300) includes a piezoelectric active portion (320) as a substantial drive portion and a piezoelectric non-active portion (330) having the piezoelectric layer (70) continuous from the piezoelectric active portion (320) but not being substantially driven, and a stress suppression layer (100) for suppressing stress due to drive of the piezoelectric element (300) is provided, straddling a boundary between the piezoelectric active portion (320) and the piezoelectric non-active portion (330).
摘要翻译：公开了一种喷墨记录头，其中喷嘴可以以高密度排列并且其制造成本降低，并且喷墨记录装置。在喷墨记录头中，包括：与喷嘴孔连通的压力产生室（12）; 以及具有下电极（60），压电层（70）和上电极（80）的压电元件（300），所述压电元件（300）设置在与所述压力发生室（12）对应的区域中，所述压电元件压电元件（300）包括作为实质驱动部分的压电有源部分（320）和压电非活性部分（330），其压电层（70）与压电有源部分（320）连续）而不是被大致驱动，并且设置用于抑制由于压电元件（300）的驱动引起的应力的应力抑制层（100），跨越压电有源部分（320）和压电非有效部分 330）。

8. 发明申请

US20030214561A1 Ink-jet recording head inkjet recording apparatus 有权
标题翻译：喷墨记录头喷墨记录装置
公开(公告)号：US20030214561A1
公开(公告)日：2003-11-20
申请号：US10446937
申请日：2003-05-29
申请人： SEIKO EPSON CORPORATION
发明人： Masato Shimada , Yoshinao Miyata , Hiroyuki Kamei , Tetsushi Takahashi
IPC分类号： B41J002/045
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus. In an ink-jet recording head, comprising: a pressure generating chamber (12) communicating with a nozzle orifice; and a piezoelectric element (300) having a lower electrode (60), a piezoelectric layer (70) and an upper electrode (80), the piezoelectric element (300) being provided in a region corresponding to the pressure generating chamber (12) with a vibration plate interposed therebetween, the piezoelectric element (300) includes a piezoelectric active portion (320) as a substantial drive portion and a piezoelectric non-active portion (330) having the piezoelectric layer (70) continuous from the piezoelectric active portion (320) but not being substantially driven, and a stress suppression layer (100) for suppressing stress due to drive of the piezoelectric element (300) is provided, straddling a boundary between the piezoelectric active portion (320) and the piezoelectric non-active portion (330).
摘要翻译：公开了一种喷墨记录头，其中喷嘴可以以高密度排列并且其制造成本降低，并且喷墨记录装置。在喷墨记录头中，包括：与喷嘴孔连通的压力产生室（12）; 以及具有下电极（60），压电层（70）和上电极（80）的压电元件（300），所述压电元件（300）设置在与所述压力发生室（12）对应的区域中，所述压电元件压电元件（300）包括作为实质驱动部分的压电有源部分（320）和压电非活性部分（330），其压电层（70）与压电有源部分（320）连续）而不是被大致驱动，并且设置用于抑制由于压电元件（300）的驱动引起的应力的应力抑制层（100），跨越压电有源部分（320）和压电非有效部分 330）。

9. 发明申请

US20030081080A1 Liquid-jet head, method of manufacturing the same and liquid-jet apparatus 审中-公开
标题翻译：液体喷射头，其制造方法和液体喷射装置
公开(公告)号：US20030081080A1
公开(公告)日：2003-05-01
申请号：US10278026
申请日：2002-10-23
申请人： SEIKO EPSON CORPORATION
发明人： Souichi Moriya , Masato Shimada , Shiro Yazaki , Tsutomu Nishiwaki , Masami Murai
IPC分类号： B41J002/045
CPC分类号： B41J2/1632 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03
摘要： A liquid-jet head capable of preventing malfunction attributable to an external environment such as humidity of a piezoelectric element and of achieving miniaturization thereof, a manufacturing method thereof and a liquid-jet apparatus are disclosed. The liquid-jet head including a passage-forming substrate in which a pressure generating chamber communicating with a nozzle orifice ejecting a liquid is defined and a piezoelectric element composed of a lower electrode, a piezoelectric layer and an upper electrode on one surface of the passage-forming substrate with a vibration plate interposed therebetween, wherein the liquid-jet head includes a sealing plate joined to a piezoelectric element aide of the passage-forming substrate and having a piezoelectric element holding portion, the sealing plate hermetically sealing a space secured in a region facing to the piezoelectric element to an extent not to hinder a movement thereof, and at least a part of a peripheral portion of the piezoelectric element holding portion of the sealing plate is joined to the passage-forming substrate via a glass joining layer made of glass. Thus, intrusion of moisture into the piezoelectric element holding portion is prevented.
摘要翻译：公开了一种能够防止归因于诸如压电元件的湿度的外部环境并且实现其小型化的故障的液体喷射头，其制造方法和液体喷射装置。液体喷射头包括通道形成基板，其中限定了与喷射喷嘴的喷嘴孔连通的压力产生室，以及在通道的一个表面上由下电极，压电层和上电极组成的压电元件其中所述液体喷射头包括与所述通道形成基板的压电元件侧接合并具有压电元件保持部分的密封板，所述密封板将固定在所述通道形成基板上的空间密封面向压电元件的区域不会妨碍其移动的程度，并且密封板的压电元件保持部分的周边部分的至少一部分通过玻璃接合层与通道形成基板接合，该玻璃接合层由玻璃。因此，防止湿气侵入压电元件保持部。

10. 发明申请

US20030063165A1 Liquid-jet head and liquid-jet apparatus 有权
标题翻译：喷液头和液体喷射装置
公开(公告)号：US20030063165A1
公开(公告)日：2003-04-03
申请号：US10228272
申请日：2002-08-27
申请人： SEIKO EPSON CORPORATION
发明人： Masato Shimada
IPC分类号： B41J002/045
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： A liquid-jet head includes a passage-forming substrate having a plurality of pressure generation chambers communicating with corresponding nozzle orifices; and a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements including a lower electrode, a piezoelectric layer, and an upper electrode. The passage-forming substrate has a plurality of liquid supply paths that are equal in depth with the pressure generation chambers and communicate with corresponding longitudinal ends of the pressure generation chambers for supplying liquid to the pressure generation chambers. A reinforcement film is provided on the vibration plate in regions that face the liquid supply paths. The overall internal stress of the reinforcement film and the vibration plate is tensile.
摘要翻译：液体喷射头包括具有与相应的喷嘴孔连通的多个压力产生室的通道形成基板; 以及多个压电元件，其经由振动板设置在通道形成基板的一侧，每个压电元件包括下电极，压电层和上电极。通道形成基板具有与压力产生室相等深度的多个液体供给路径，并与用于向压力发生室供给液体的压力产生室的相应纵向端部连通。在面对液体供给路径的区域中，在振动板上设置加强膜。加强膜和振动板的整体内部应力是拉伸的。

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