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1. 发明专利

JPH0346544A AUTOMATIC INSPECTING DEVICE FOR BANDLIKE BODY 失效
公开(公告)号：JPH0346544A
公开(公告)日：1991-02-27
申请号：JP18228289
申请日：1989-07-13
申请人： NIPPON STEEL CORP , SANKYO SEIKI SEISAKUSHO KK
发明人： OHIGATA NAOHARU , ONO JIRO , MATSUBARA TOSHIRO , TOKIDA HARUHIRO , WADA TAKAAKI , FUJIMURA YUKIO , KANEKO HIROSHI
IPC分类号： G01N21/84 , B65H26/00 , G01N21/88 , G01N21/89 , G01N21/892 , G01N21/93 , H01L21/66 , H04N7/18
摘要： PURPOSE:To improve the work efficiency by guiding selectively a visual observation inspecting means and an image pickup means to a detected part of a defect of a bandlike body (TAB tape), based on information from an inspecting means. CONSTITUTION:While a bandlike body 3 is fed out of a supply reel 1 and wound to a take-up reel 11, whether its defect exists or not is inspected at every prescribed area by an automatic inspecting part 31. In this case, a verification part 41 for bringing the bandlike body 3 to image pickup and sending an image pickup signal to an image display means, and a visual observation inspecting part 51 for bringing the same bandlike body 3 to visual observation are guided selectively to a detected part of the defect of the bandlike body 3 by a moving means, for instance, a rack base using an XY table, based on information of the inspecting part 31. Accordingly, a worker observes a video signal of a defect part sent from a verification part 41 at all times, through an image display means, and can execute the observation directly by switching to a microscope of the inspecting part 51 by the moving means in accordance with necessity.

2. 发明专利

JPH0340447A CONTROL OF REEL 失效
公开(公告)号：JPH0340447A
公开(公告)日：1991-02-21
申请号：JP17578989
申请日：1989-07-07
申请人： SANKYO SEIKI SEISAKUSHO KK , NIPPON STEEL CORP
发明人： FUJIMURA YUKIO , TOKIDA HARUHIRO , HIRASAWA TSUMORU , OHIGATA NAOHARU , ONO JIRO , MATSUBARA TOSHIRO
IPC分类号： H01L21/60 , H01L21/50
摘要： PURPOSE:To inhibit a fluctuation in the tension of a carrier tape and to perform efficiently the stable feed of the tape by a method wherein a take-up force of a fixed torque and a torque to respond to a winding diameter are respectively adjusted automatically to subreels and main reels in the direction of taking-up of the tape. CONSTITUTION:While an interleaver 12 is taken up around a subreel 4, a carrier tape 11 is fed out from a main reel 3 apart from the subreel 4. The tape 11 goes through a prescribed apparatus, the amount of rotation of the tape 11 is controlled by a feed means 10 and the tape 11 is taken up on a main reel 5 by superposition on a leaver 12 of a subreel 6. The subreels 4 and 6 are driven by a motor and a cluch in a fixed torque and the torques of the main reels 3 and 5 are automatically controlled by a control device through an electromagnetic clutch according to a winding diameter. The winding diamater is measured by arms 48 and 49 and potentiometers coupled with arm axes 52 and 53 of the arms 48 and 49 and the result is sent to the control device. Thereby, the excessive stretch and the slack of the carrier tape 1 are prevented whether the tape is fed continuously or intermittently and a stable tension control can be performed.

3. 发明专利

JPH0582056B2 失效
公开(公告)号：JPH0582056B2
公开(公告)日：1993-11-17
申请号：JP17578989
申请日：1989-07-07
申请人： SANKYO SEIKI SEISAKUSHO KK , SHINNIPPON SEITETSU KK
发明人： FUJIMURA YUKIO , TOKIDA HARUHIRO , HIRASAWA TSUMORU , OOHIGATA NAOHARU , OONO JIRO , MATSUBARA TOSHIRO
IPC分类号： H01L21/60 , H01L21/50

4. 发明专利

JPH09280837A BINARIZATION METHOD OF FRINGE PATTERN PROJECTED PICTURE FOR SHAPE MEASUREMENT 失效
公开(公告)号：JPH09280837A
公开(公告)日：1997-10-31
申请号：JP9665296
申请日：1996-04-18
申请人： NIPPON STEEL CORP
发明人： UEDA KENJI , MATSUBARA TOSHIRO , HAMAMURA HIDEYUKI
IPC分类号： G01B11/24 , G06T1/00 , G06T5/00 , G06T7/00
摘要： PROBLEM TO BE SOLVED: To process data in a short time without limiting the measurement object by dividing the pattern into the rage in which at least one bright fringe is included in every scan line and binarizing the fringe image which the range using the binarization threshold value which is set for every range. SOLUTION: When the binarizing process of the fringe image having bright and dark fringe patterns formed by plural slit light beams is performed, the process is conducted by the binarzation threshold value having a fixed strength. Then, the widths of bright fringes become smaller as the fringes move from the center to the outer side and all fringes, which have luminance values less than a threshold valued disappear. Then, when the measurement of a shape is implemented by detecting the position of the fringes, an erroneous detection or a measurement unable case occurs. Therefore, the fringe picture data are divided into the ranges (for example, 50 pixels) so that at least one each of bright and dark fringes are included for every scan line and a binarization threshold value is determined for every ranges from the maximum and the minimum luminance values of each range. When the fringe picture in each range is binarized using the threshold value, the variation in the widths of fringes caused by the unevenness in brightness is reduced and the binarization process is accurately performed.

5. 发明专利

JPH0575965B2 失效
公开(公告)号：JPH0575965B2
公开(公告)日：1993-10-21
申请号：JP16105589
申请日：1989-06-23
申请人： NIPPON STEEL CORP
发明人： MATSUBARA TOSHIRO , INOE MASAKI , KOBAYASHI TETSUO
IPC分类号： G01B11/00 , G01N21/88 , G01N21/93 , G01N21/956 , H01L21/66

6. 发明专利

JPH11295607A THREE-DIMENSIONAL MICROSCOPE 失效
公开(公告)号：JPH11295607A
公开(公告)日：1999-10-29
申请号：JP10111098
申请日：1998-04-13
申请人： NIPPON STEEL CORP
发明人： UEDA KENJI , MATSUBARA TOSHIRO
IPC分类号： G02B21/00
摘要： PROBLEM TO BE SOLVED: To measure a three-dimensional(3D) shape in a short time with an inexpensive device by successively photographing interference stripes moving inside the visual field of the microscope while utilizing the interference of light of different frequencies. SOLUTION: Illumination light 10 is modulated at the frequency of 40 MHz and illumination light 11 is modulated at the frequency of 40.00001 MHz by an acoustic/optic modulating device. The illumination lights 10 and 11 perpendicularly cross, an object to be measured is irradiated with the lights so that the center line of its crossing angle and the normal of an object 12 to be measured can be inclined at 30 deg.. In this case, the interval of interference stripes 17 formed on the object to be measured becomes 1 μm, and the scanning speed of the interference stripes 17 is determined by the differential frequency of 10 Hz between the illumination lights 10 and 11 and becomes 10 μm/sec. Concerning the image pickup device of 30 Hz, photographing is enabled at the pitch of 0.33 μm and since the time required for measuring the entire visual field is a time for the interference stripe 17 to move to the place of the adjacent interference stripe, photographing is completed in 0.1 sec. The photographed interference stripes are processed by a signal processor 18 and displayed as a 3D image.

7. 发明专利

JPH09257427A METHOD AND APPARATUS FOR MEASUREMENT OF SIZE AND SHAPE OF OBJECT 失效
公开(公告)号：JPH09257427A
公开(公告)日：1997-10-03
申请号：JP6591296
申请日：1996-03-22
申请人： NIPPON STEEL CORP
发明人： MATSUBARA TOSHIRO , UEDA KENJI , HAMAMURA HIDEYUKI
IPC分类号： G01B11/02 , G01B11/24 , G01B11/245 , G01B21/02 , G01B21/20 , G01C3/06
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus, for the precise measurement of the size and the shape of an object, in which, when the size and the shape of the object to be measured are measured by using a plurality of sensors, their measurement is not affected even when the positional relationship between the sensors is changed and in which their measurement is not affected even when the position and the posture of the object to be measured are changed. SOLUTION: A reference object 5 which has at least two sets of mutually corresponding cross planes whose mutual positional relationship is known in such a way that the direction of an intersection line is different and whose size is known is arranged so as to be close to an object 4 to be measured. Then, the reference object 5 and the object 4 to be measured are measured simultaneously. On the basis of information on the reference object 5, measured results by a plurality of sensors are integrated so as to align their positions and directions precisely. On the basis of the positional relationship between respective faces of the object 4, to be measured, after their integration, its size is computed.

8. 发明专利

JPH07260429A METHOD AND APPARATUS FOR MEASURING DIMENSIONS OF OBJECT 失效
公开(公告)号：JPH07260429A
公开(公告)日：1995-10-13
申请号：JP7272394
申请日：1994-03-17
申请人： NIPPON STEEL CORP
发明人： MATSUBARA TOSHIRO , HAMAMURA HIDEYUKI
IPC分类号： G01B11/02 , G01C3/06
摘要： PURPOSE:To provide method and apparatus for measuring the dimensions of an object with high accuracy. CONSTITUTION:Projectors 1a, 2a project a luminous flux, carrying information related to the projecting direction, on an object U to be measured and a reference object K having known dimensions disposed closely each other. A plurality of area three-dimensional sensors 1, 2 pick up the luminous flux, deformed according to the profile of each object, using image pickup units 1b, 2b. Positions on the objects U and K are then determined using the luminous flux image picked up by means of the area three-dimensional sensors 1, 2 and the principle of triangulation. Subsequently, the distances between respective positions are determined and employed, along with the known dimensions of the reference object K, in the determination of dimensions of the object U to be measured.

9. 发明专利

JPH07218358A TENSION DISTRIBUTION MEASUREMENT METHOD OF A STRIP OF BODY 失效
公开(公告)号：JPH07218358A
公开(公告)日：1995-08-18
申请号：JP1076994
申请日：1994-02-02
申请人： NIPPON STEEL CORP
发明人： HAMAMURA HIDEYUKI , MATSUBARA TOSHIRO
IPC分类号： G01L5/04 , B21C51/00
摘要： PURPOSE:To accurately measure the tension distribution in side direction of a strip of body without specifying a vibration position and a vibration force by determining the number of modes to be utilized from a steel plate dimension and an average tension and then using a normalized mode amplitude where the amplitude is normalized for each mode. CONSTITUTION:A strip of body where tension is applied in longer direction is vibrated by a vibrator, the free vibration is measured by a displacement meter 4, and a frequency analysis is made by an FFT analyzer 5 and the obtained result is input to a computer 6. On the other hand, the frequency to the utilized mode number and the amplitude are read using a database 9, a steel plate dimension data 7, and an average tension measurement data 8. A normalization mode converter 10 detects the maximum value of the amplitude for each mode and then converts each mode to the normalized amplitude. Then, a subdivision normalizer 11 performs the regression curve approximation of each normalization mode amplitude value for subdivision, arranges the subdivided normalized values for each coordinate, and normalizes them so that the maximum value is equal to 1. Then, the normalized amplitude and the mode frequency are converted to tension by a tension value conversion expression and the tension distribution in side direction of a strip of band is measured accurately.

10. 发明专利

JPH061168B2 失效
公开(公告)号：JPH061168B2
公开(公告)日：1994-01-05
申请号：JP9760285
申请日：1985-05-08
申请人： NIPPON STEEL CORP
发明人： MATSUBARA TOSHIRO , SOEJIMA KAORU , OOTA SHIGEMITSU
IPC分类号： B21B37/00 , B21B38/02 , G01B11/24 , G01B11/30 , G01N21/89 , G01N21/892 , B23K26/00 , G01N21/88

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