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    • 1. 发明专利
    • DE60305597D1
    • 2006-07-06
    • DE60305597
    • 2003-10-10
    • SAMSUNG ELECTRONICS CO LTD
    • SHIN SU-HOOH YONG-SOOKUK KEONSHIN SEUNG-JULIM HYUNG-TAEKKIM MIN-SOOLEE CHANG-SEUNGLEE YOU-SEOP
    • B41J2/05B41J2/14B41J2/16B41J2/335B41J29/377
    • A monolithic ink jet printhead comprises a substrate (110), a nozzle plate (120) comprised of passivation layers (121, 122, 126) and a heat dissipating layer (128) made of thermally conductive metal, a heater (142), and a conductor (144) provided between the passivation layers and connected to the heater. A monolithic ink jet printhead comprises a substrate having an ink chamber (132) filled with ink to be ejected on its front surface, a manifold (136) for supplying ink to the ink chamber on its rear surface, and an ink channel (134) between the ink chamber and the manifold; a nozzle plate comprised of passivation layers stacked on the substrate and a heat dissipating layer on the passivation layers, the nozzle plate having a nozzle (138), through which ink is ejected from the ink chamber, formed by penetrating the nozzle plate; a heater formed between the passivation layers and located above the ink chamber for heating the ink within the chamber; and a conductor provided between the passivation layers and connected to the heater for applying current across the heater, where the heat dissipating layer is made of a thermally conductive metal for dissipating heat in or around the heater to the outside. An independent claim is also included for a method of manufacturing a monolithic ink jet printhead comprising: (i) forming a heater and a conductor connected to the heater between the passivation layers while stacking passivation layers on a substrate; (ii) forming a heat dissipating layer on the passivation layers and forming a nozzle to penetrate the passivation layers and heat dissipating layer to construct a nozzle plate; (iii) etching the substrate exposed through the nozzle to form an ink chamber filled with ink; (iv) etching a rear surface of the substrate to form a manifold for supplying ink; and (v) forming an ink channel by etching the substrate so that it penetrates the substrate between the manifold and the ink chamber.
    • 2. 发明专利
    • DE602004018579D1
    • 2009-02-05
    • DE602004018579
    • 2004-07-28
    • SAMSUNG ELECTRONICS CO LTD
    • SONG HOONOH YONG-SOOSHIN JONG-WOOLIM HYUNG-TAEK
    • B41J2/05B41J2/16B41J2/135B41J2/14B41J2/235
    • Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate (100), which includes an ink chamber (106) formed in an upper portion thereof to store ink, a manifold (110) formed in a lower portion thereof to supply the ink to the ink chamber, and an ink channel (108) formed between the ink chamber and the manifold to connect the ink chamber to the manifold, a nozzle plate (120), which includes a plurality of passivation layers (121,123,125) stacked on the substrate, a heat dissipation layer (127) disposed on the plurality of passivation layers and made of a thermal conductive metal material, and a nozzle (104) passing therethrough and connected to the ink chamber, and a heater (122) and a conductor (124), each of which is interposed between the plurality of passivation layers of the nozzle plate, the heater heating the ink filled in the ink chamber and the conductor applying current to the heater. The heat dissipation layer includes a first metal layer (127a) formed on the plurality of passivation layers and a second metal layer (127b) formed on the first metal layer.
    • 4. 发明专利
    • DE60305597T2
    • 2007-04-26
    • DE60305597
    • 2003-10-10
    • SAMSUNG ELECTRONICS CO LTD
    • SHIN SU-HOOH YONG-SOOKUK KEONSHIN SEUNG-JULIM HYUNG-TAEKKIM MIN-SOOLEE CHANG-SEUNGLEE YOU-SEOP
    • B41J2/05B41J2/14B41J2/16B41J2/335B41J29/377
    • A monolithic ink jet printhead comprises a substrate (110), a nozzle plate (120) comprised of passivation layers (121, 122, 126) and a heat dissipating layer (128) made of thermally conductive metal, a heater (142), and a conductor (144) provided between the passivation layers and connected to the heater. A monolithic ink jet printhead comprises a substrate having an ink chamber (132) filled with ink to be ejected on its front surface, a manifold (136) for supplying ink to the ink chamber on its rear surface, and an ink channel (134) between the ink chamber and the manifold; a nozzle plate comprised of passivation layers stacked on the substrate and a heat dissipating layer on the passivation layers, the nozzle plate having a nozzle (138), through which ink is ejected from the ink chamber, formed by penetrating the nozzle plate; a heater formed between the passivation layers and located above the ink chamber for heating the ink within the chamber; and a conductor provided between the passivation layers and connected to the heater for applying current across the heater, where the heat dissipating layer is made of a thermally conductive metal for dissipating heat in or around the heater to the outside. An independent claim is also included for a method of manufacturing a monolithic ink jet printhead comprising: (i) forming a heater and a conductor connected to the heater between the passivation layers while stacking passivation layers on a substrate; (ii) forming a heat dissipating layer on the passivation layers and forming a nozzle to penetrate the passivation layers and heat dissipating layer to construct a nozzle plate; (iii) etching the substrate exposed through the nozzle to form an ink chamber filled with ink; (iv) etching a rear surface of the substrate to form a manifold for supplying ink; and (v) forming an ink channel by etching the substrate so that it penetrates the substrate between the manifold and the ink chamber.
    • 7. 发明专利
    • DE602004014845D1
    • 2008-08-21
    • DE602004014845
    • 2004-05-26
    • SAMSUNG ELECTRONICS CO LTD
    • KIM MIN-SOOSHIN SU-HOOH YONG-SOOLIM HYUNG-TAEKSHIN JONG-WOOBAEK SEOG-SOON
    • B41J2/05B41J2/14B41J2/16B41J2/335B41J2/45
    • An ink-jet printhead comprises an ink passage formed in the same plane as an ink chamber, a metallic nozzle plate disposed on a substrate, a heat dissipating layer formed of a metallic material, and a heater and conductor disposed between passivation layers of a nozzle plate. An ink-jet printhead comprises a substrate (100), an ink chamber (106) to be filled with ink and formed on the substrate surface, a manifold that supplies ink to the ink chamber formed on a rear surface of the substrate, and an ink passage connecting the ink chamber and the manifold and formed parallel to the substrate surface; a nozzle plate (120) including passivation layers stacked on the substrate and formed of an insulating material, and a heat dissipating layer (128) formed of a metallic material having good thermal conductivity and through which a nozzle connected to the ink chamber is formed; and a heater and a conductor disposed between the passivation layers of the nozzle plate. The heater (108) is positioned on the ink chamber and heats ink in the chamber. The conductor applies a current to the heater. An independent claim is also included for a method of manufacturing an ink-jet printhead comprising forming a sacrificial layer on a substrate surface, stacking passivation layers on the substrate and forming a heater and conductor connected to the heater between the passivation layers, forming a heat dissipating layer of metal on the passivation layers and forming a nozzle to expose the sacrificial layer; forming a manifold on a rear surface of the substrate; removing the sacrificial layer to form an ink chamber and ink passage; and connecting the manifold and ink passage.