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    • 10. 发明专利
    • DE60313560T2
    • 2008-01-31
    • DE60313560
    • 2003-11-20
    • SAMSUNG ELECTRONICS CO LTD
    • SONG HOONPARK JUN-HYUBOH YONG-SOOLEE CHANG-SEUNGKIM YOUNG-JAELIM JI-HYUKKUK KEON
    • B41J2/05B41J2/14B41J2/16
    • A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a heater disposed between two ink chambers. In the monolithic ink-jet printhead, a lower ink chamber filled with ink to be ejected is formed on the upper surface of a substrate, and a manifold for supplying ink to the lower ink chamber is formed on the bottom surface of the substrate. An ink channel is disposed between the lower ink chamber and the manifold and perpendicularly penetrates the substrate. A nozzle plate has a plurality of passivation layers stacked on the substrate and a metal layer stacked on the passivation layers. In the nozzle plate, an upper ink chamber is formed on the bottom surface of the metal layer, and a nozzle connected to the upper ink chamber is formed on the upper surface of the metal layer, and a connection hole connecting the upper ink chamber and the lower ink chamber is formed in and penetrates the passivation layers. A heater is provided between the passivation layers and is located between the upper ink chamber and the lower ink chamber for heating ink contained in the ink chambers. A conductor is provided between the passivation layers and is electrically connected to the heater to apply a current to the heater. Since most of heat energy generated from the heater is transferred to ink and a rise in the temperature of the printhead is suppressed, energy efficiency and operating frequency can be increased and the printhead can operate in a stable manner for a long time.