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    • 4. 发明专利
    • Gas sensor device and sterilization system employing the same
    • 气体传感器装置和灭菌系统
    • JP2013002809A
    • 2013-01-07
    • JP2011130472
    • 2011-06-10
    • Saian Corp株式会社サイアン
    • HAYASHI HIROSHIMATSUUCHI HIDETAKAIWASAKI RYUICHI
    • G01N21/59A61L2/20
    • PROBLEM TO BE SOLVED: To stably measure a low-concentration area at high speed and with high accuracy in a gas sensor.SOLUTION: In NOgas concentration sensors S1, S2, a first flow passage H0 and a plurality of second flow passages H1 to H4 are provided which are disposed in parallel with each other as gas flow passages. In the first flow passage H0, a high-concentration gas sensor SP comprised of a photosensor is provided and in the second flow passages H1 to H4, low-concentration gas sensors SS1 to SS4 comprised of semiconductors are provided, respectively. At an upstream side of the low-concentration gas sensors SS1 to SS4, solenoid valves VS1 to VS4 are provided. After a measurement of the sensor SP is reduced sufficiently in a photosensor circuit C2, a valve control circuit C1 of a control device C alternatively "opens" the solenoid valves VS1 to VS4 and allows a semiconductor sensor circuit C3 to perform measurement. Therefore, the high-sensitivity sensors SS1 to SS4 are not exposed uselessly under Nogas in the non-measurement state to prevent deterioration or breakdown, and can be used stably over a wide range from a high concentration area to a low concentration area.
    • 要解决的问题:为了在气体传感器中以高速和高精度稳定地测量低浓度区域。 解决方案:在NO 2 气体浓度传感器S1,S2中,设置第一流路H0和多个第二流路H1〜H4, 彼此作为气体流动通道。 在第一流路H0中,设置由光传感器构成的高浓度气体传感器SP,在第二流路H1〜H4中,分别设置由半导体构成的低浓度气体传感器SS1〜SS4。 在低浓度气体传感器SS1〜SS4的上游侧设有电磁阀VS1〜VS4。 传感器SP的测量在光电传感器电路C2中充分降低后,控制装置C的阀控制电路C1交替地“打开”电磁阀VS1至VS4,并允许半导体传感器电路C3进行测量。 因此,在非测量状态下,在No 2 气体下,高灵敏度传感器SS1至SS4不会被无用地暴露,以防止劣化或破坏,并且可以在宽范围内稳定使用 范围从高浓度区域到低浓度区域。 版权所有(C)2013,JPO&INPIT
    • 5. 发明专利
    • Coaxial cable device, and plasma generator and workpiece processing device using the same
    • 同轴电缆装置,等离子体发生器和工件加工装置
    • JP2011097446A
    • 2011-05-12
    • JP2009250848
    • 2009-10-30
    • Saian Corp株式会社サイアン
    • MATSUUCHI HIDETAKAYOSHIDA KAZUHIROMANKAWA HIROSHITOTSUKA TAKAYA
    • H01P3/06H05H1/24
    • PROBLEM TO BE SOLVED: To downsize a structure in a plasma generator used for workpiece processing such as a substrate reformation or the like. SOLUTION: There is provided a plasma generator in which a waveguide for propagating microwaves from a magnetron 4 is separated into a first waveguide 41 and a second waveguide connects both the waveguides with a coaxial cable device 42 and thereby improves a degree of freedom of setting the workpiece or the like. In the plasma generator, the coaxial cable device 42 includes a hollow coaxial cable body 421 and plugs 422, 423 with a through-hole through which both ends air passes. Accordingly, a pipe line is cut down which supplies scavenging air and a plasma raw material gas from the first waveguide 41 to the second waveguide and a plasma generating nozzle, thus permitting the structure to be downsized. Besides, the heat dissipation can be performed for the heat generation of the coaxial cable body 421, caused by high-power microwaves. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了减小用于诸如衬底改质等的工件加工的等离子体发生器中的结构。 解决方案:提供了一种等离子体发生器,其中用于将来自磁控管4的微波传播的波导分离成第一波导41,并且第二波导将两个波导连接到同轴电缆装置42,从而提高自由度 设置工件等。 在等离子体发生器中,同轴电缆装置42包括中空同轴电缆体421和具有两端空气通过的通孔的插塞422,423。 因此,切断从第一波导41向第二波导供给清扫空气和等离子体原料气体的等离子体生成喷嘴的管线,能够使结构小型化。 此外,由高功率微波引起的同轴电缆体421的发热也可以进行散热。 版权所有(C)2011,JPO&INPIT
    • 6. 发明专利
    • Plasma generation device
    • 等离子体生成装置
    • JP2011054422A
    • 2011-03-17
    • JP2009202413
    • 2009-09-02
    • Saian Corp株式会社サイアン
    • MATSUUCHI HIDETAKAFUJISAKA YOSHIKAZUYOSHIDA KAZUHIROMANKAWA HIROSHITOTSUKA TAKAYA
    • H05H1/24H01L21/3065
    • PROBLEM TO BE SOLVED: To provide a plasma generation device with a structure capable of avoiding damages due to heat in a transmission system for transmitting energy of microwaves, and with easy output adjustment. SOLUTION: The plasma generation device includes a microwave generator for generating microwaves, a first waveguide for guiding the microwaves, a cable with a base end for capturing the microwaves and a tip for emitting the captured microwaves, a second waveguide for guiding microwaves emitted from the tip of the cable, an electrode with a base end for capturing microwaves emitted from the tip of the cable, a nozzle body arranged at the tip of the electrode and with an opening for emitting plasma, and a converter converting reflected microwaves reflected on an inner surface of the second waveguide into heat energy. COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供一种等离子体发生装置,其具有能够避免在用于传输微波能量的传输系统中的热量造成的损坏的结构,并且具有容易的输出调节。 解决方案:等离子体产生装置包括用于产生微波的微波发生器,用于引导微波的第一波导,用于捕获微波的基端的电缆和用于发射所捕获的微波的尖端,用于引导微波的第二波导 从电缆的尖端发射的电极,具有用于捕获从电缆末端发射的微波的基端的电极,布置在电极的尖端处的喷嘴体和用于发射等离子体的开口,以及转换器反射的反射微波 在第二波导的内表面上形成热能。 版权所有(C)2011,JPO&INPIT