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    • 8. 发明专利
    • Gas sensor device and sterilization system employing the same
    • 气体传感器装置和灭菌系统
    • JP2013002809A
    • 2013-01-07
    • JP2011130472
    • 2011-06-10
    • Saian Corp株式会社サイアン
    • HAYASHI HIROSHIMATSUUCHI HIDETAKAIWASAKI RYUICHI
    • G01N21/59A61L2/20
    • PROBLEM TO BE SOLVED: To stably measure a low-concentration area at high speed and with high accuracy in a gas sensor.SOLUTION: In NOgas concentration sensors S1, S2, a first flow passage H0 and a plurality of second flow passages H1 to H4 are provided which are disposed in parallel with each other as gas flow passages. In the first flow passage H0, a high-concentration gas sensor SP comprised of a photosensor is provided and in the second flow passages H1 to H4, low-concentration gas sensors SS1 to SS4 comprised of semiconductors are provided, respectively. At an upstream side of the low-concentration gas sensors SS1 to SS4, solenoid valves VS1 to VS4 are provided. After a measurement of the sensor SP is reduced sufficiently in a photosensor circuit C2, a valve control circuit C1 of a control device C alternatively "opens" the solenoid valves VS1 to VS4 and allows a semiconductor sensor circuit C3 to perform measurement. Therefore, the high-sensitivity sensors SS1 to SS4 are not exposed uselessly under Nogas in the non-measurement state to prevent deterioration or breakdown, and can be used stably over a wide range from a high concentration area to a low concentration area.
    • 要解决的问题:为了在气体传感器中以高速和高精度稳定地测量低浓度区域。 解决方案:在NO 2 气体浓度传感器S1,S2中,设置第一流路H0和多个第二流路H1〜H4, 彼此作为气体流动通道。 在第一流路H0中,设置由光传感器构成的高浓度气体传感器SP,在第二流路H1〜H4中,分别设置由半导体构成的低浓度气体传感器SS1〜SS4。 在低浓度气体传感器SS1〜SS4的上游侧设有电磁阀VS1〜VS4。 传感器SP的测量在光电传感器电路C2中充分降低后,控制装置C的阀控制电路C1交替地“打开”电磁阀VS1至VS4,并允许半导体传感器电路C3进行测量。 因此,在非测量状态下,在No 2 气体下,高灵敏度传感器SS1至SS4不会被无用地暴露,以防止劣化或破坏,并且可以在宽范围内稳定使用 范围从高浓度区域到低浓度区域。 版权所有(C)2013,JPO&INPIT