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    • 1. 发明申请
    • WIRELESS WIRE VACUUM SENSOR AND VACUUM PANEL
    • 无线电线真空传感器和真空面板
    • WO2004025237A1
    • 2004-03-25
    • PCT/IT2003/000521
    • 2003-08-28
    • SAES GETTERS S.p.A.GIANNANTONIO, RobertoFUMAGALLI, AlessandroCATTANEO, Massimo
    • GIANNANTONIO, RobertoFUMAGALLI, AlessandroCATTANEO, Massimo
    • G01L19/08
    • G01M3/186G01L21/12G01M3/26
    • Method for measuring the pressure (P) of the residual gases in a vacuum environment (7), which comprises the following operating steps: arranging in this environment (7) a sensor comprising a control circuit (6) connected to at least one resistor (2) suitable for dissipating heat through the residual gases; transmitting a first electromagnetic signal (9) to a first inductor (8) connected to said control circuit (6); heating through the Joule effect the resistor (2) with an electric current (I) supplied by said control circuit (6); determining the pressure (P) of the residual gases as a function of the variation of the resistance of the resistor (2) due to its heating; preferably transmitting a second electromagnetic signal (11) outside the vacuum environment (7) by means of a second inductor (10) connected to said control circuit (6). The present invention also relates to a sensor and an apparatus for carrying out said method, as well as to an evacuated panel comprising said sensor.
    • 用于测量真空环境(7)中残余气体的压力(P)的方法,包括以下操作步骤:在该环境(7)中布置传感器,该传感器包括连接到至少一个电阻器(6)的控制电路(6) 2)适用于通过残留气体散热; 向连接到所述控制电路(6)的第一电感器(8)传输第一电磁信号(9); 用所述控制电路(6)提供的电流(I)通过焦耳加热电阻器(2)。 确定残余气体的压力(P)作为由于其加热导致的电阻器(2)的电阻的变化的函数; 优选地通过连接到所述控制电路(6)的第二电感器(10)在真空环境(7)外部传输第二电磁信号(11)。 本发明还涉及用于执行所述方法的传感器和装置,以及包括所述传感器的抽空面板。
    • 8. 发明申请
    • ION MOBILITY SPECTROMETER COMPRISING A CORONA DISCHARGE IONIZATION ELEMENT
    • 包含CORONA放电离子元素的离子移动光谱仪
    • WO2006011171A1
    • 2006-02-02
    • PCT/IT2005/000409
    • 2005-07-18
    • SAES GETTERS S.p.A.GIANNANTONIO, RobertoMAURI, LucaURBANO, MarcoBONUCCI, Antonio
    • GIANNANTONIO, RobertoMAURI, LucaURBANO, MarcoBONUCCI, Antonio
    • G01N27/64
    • G01N27/622G01N27/68H01J49/168
    • An ion mobility spectrometer is disclosed wherein the ionization element is a corona discharge source (300) consisting of a first chamber (308) provided with an inlet (309) for a gas to be analyzed and with at least one first opening (311) for communication between the internal space of the first chamber and the reaction zone of the spectrometer; a second chamber (303), contained in the first chamber, provided with an inlet (306) for an ultra-pure gas or a mixture of ultra-pure gases, and with at least one second communication opening (310, 310') between the first and the second chamber; a pair of electrodes (304, 302'), at least one of which (304) is needle-shaped, arranged in the second chamber, with the pair of electrodes and the second opening arranged in such geometrical relationships that there is no optical path between the zone of the corona discharge and the ion detector of the IMS instrument. The instrument of the invention allows to reproduce the results of a spectrometer equipped with a ?3 Ni ionization source, while avoiding the problems connected to the transportation and use of radioactive material.
    • 公开了一种离子迁移谱仪,其中电离元件是电晕放电源(300),该电晕放电源(300)由设置有待分析气体的入口(309)的第一腔室(308)组成,并具有至少一个第一开口(311) 第一室的内部空间与光谱仪的反应区之间的通信; 包含在第一室中的第二室(303),设置有用于超纯净气体或超纯净气体混合物的入口(306),以及至少一个第二连通开口(310,310')之间, 第一和第二室; 一对电极(304,302'),其中至少一个(304)是针状的,布置在第二室中,一对电极和第二开口以几何关系排列,使得不存在光路 在电晕放电区域和IMS仪器的离子检测器之间。 本发明的仪器允许再现装备有