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    • 7. 发明申请
    • WIRELESS WIRE VACUUM SENSOR AND VACUUM PANEL
    • 无线电线真空传感器和真空面板
    • WO2004025237A1
    • 2004-03-25
    • PCT/IT2003/000521
    • 2003-08-28
    • SAES GETTERS S.p.A.GIANNANTONIO, RobertoFUMAGALLI, AlessandroCATTANEO, Massimo
    • GIANNANTONIO, RobertoFUMAGALLI, AlessandroCATTANEO, Massimo
    • G01L19/08
    • G01M3/186G01L21/12G01M3/26
    • Method for measuring the pressure (P) of the residual gases in a vacuum environment (7), which comprises the following operating steps: arranging in this environment (7) a sensor comprising a control circuit (6) connected to at least one resistor (2) suitable for dissipating heat through the residual gases; transmitting a first electromagnetic signal (9) to a first inductor (8) connected to said control circuit (6); heating through the Joule effect the resistor (2) with an electric current (I) supplied by said control circuit (6); determining the pressure (P) of the residual gases as a function of the variation of the resistance of the resistor (2) due to its heating; preferably transmitting a second electromagnetic signal (11) outside the vacuum environment (7) by means of a second inductor (10) connected to said control circuit (6). The present invention also relates to a sensor and an apparatus for carrying out said method, as well as to an evacuated panel comprising said sensor.
    • 用于测量真空环境(7)中残余气体的压力(P)的方法,包括以下操作步骤:在该环境(7)中布置传感器,该传感器包括连接到至少一个电阻器(6)的控制电路(6) 2)适用于通过残留气体散热; 向连接到所述控制电路(6)的第一电感器(8)传输第一电磁信号(9); 用所述控制电路(6)提供的电流(I)通过焦耳加热电阻器(2)。 确定残余气体的压力(P)作为由于其加热导致的电阻器(2)的电阻的变化的函数; 优选地通过连接到所述控制电路(6)的第二电感器(10)在真空环境(7)外部传输第二电磁信号(11)。 本发明还涉及用于执行所述方法的传感器和装置,以及包括所述传感器的抽空面板。