会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Positive resist composition and method of forming resist pattern
    • 正型抗蚀剂组合物和形成抗蚀剂图案的方法
    • US07645559B2
    • 2010-01-12
    • US12064288
    • 2006-08-16
    • Ryoji WatanabeMasaru Takeshita
    • Ryoji WatanabeMasaru Takeshita
    • G03F7/004G03F7/30
    • G03F7/0045C08F220/28G03F7/0397Y10S430/111Y10S430/122
    • A positive resist composition and method of forming a resist pattern are provided which enable formation of a resist pattern having excellent shape with reduced LWR.The positive resist composition includes a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon irradiation, the resin component (A) having a structural unit (a1) which has an acetal-type protection group, and the acid-generator component (B) including an acid generator (B1) having a cation moiety represented by general formula (b-5) shown below: wherein Ra and Rb each independently represents an alkyl group, an alkoxy group, a halogen atom or a hydroxyl group; Rc represents an aryl group or alkyl group which may or may not have a substituent; and n′ and n″ each independently represents an integer of 0 to 3.
    • 提供一种正型抗蚀剂组合物和形成抗蚀剂图案的方法,其能够形成具有优异形状的抗蚀剂图案,其具有减小的LWR。 正型抗蚀剂组合物包括在酸作用下表现出增加的碱溶性的树脂组分(A)和在照射时产生酸的酸产生剂组分(B),具有结构单元(a1)的树脂组分(A)具有 缩醛型保护基和含有具有下述通式(b-5)表示的阳离子部分的酸发生剂(B1)的酸发生剂成分(B):其中,Ra和Rb各自独立地表示烷基, 烷氧基,卤素原子或羟基; Rc表示可以具有或不具有取代基的芳基或烷基; n'和n“各自独立地表示0〜3的整数。
    • 2. 发明授权
    • Positive resist composition and method of forming resist pattern
    • 正型抗蚀剂组合物和形成抗蚀剂图案的方法
    • US08247159B2
    • 2012-08-21
    • US12299529
    • 2007-04-18
    • Masaru TakeshitaRyoji Watanabe
    • Masaru TakeshitaRyoji Watanabe
    • G03F7/039G03F7/20G03F7/30
    • G03F7/0397
    • A positive resist composition including a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including a structural unit (a0) represented by general formula (a0) shown below and a structural unit (a1) derived from an acrylate ester having a polycyclic group-containing, acid dissociable, dissolution inhibiting group of a tertiary alkyl ester-type: wherein: R represents a hydrogen atom, a halogen atom, a lower alkyl group or a halogenated lower alkyl group; Y1 represents an aliphatic cyclic group; Z represents a tertiary alkyl group-containing group; a represents an integer of 1 to 3, and b represents an integer of 0 to 2, such that a+b=1 to 3; and each of c, d and e independently represents an integer of 0 to 3.
    • 一种正型抗蚀剂组合物,其包含在酸作用下表现出增加的碱溶性的树脂组分(A)和暴露时产生酸的酸产生剂组分(B),所述树脂组分(A)包含由 由下述通式(a0)表示的结构单元(a1)和由具有含多环基团的酸解离性溶解抑制基团的叔烷基酯型的丙烯酸酯衍生的结构单元(a1):其中:R表示氢原子,卤素 原子,低级烷基或卤代低级烷基; Y1表示脂肪族环状基团; Z表示含叔烷基的基团; a表示1〜3的整数,b表示0〜2的整数,a + b = 1〜3。 c,d和e各自独立地表示0〜3的整数。
    • 3. 发明授权
    • Positive resist composition and method of forming resist pattern
    • 正型抗蚀剂组合物和形成抗蚀剂图案的方法
    • US07776511B2
    • 2010-08-17
    • US12299523
    • 2007-05-18
    • Masaru TakeshitaRyoji Watanabe
    • Masaru TakeshitaRyoji Watanabe
    • G03F7/004G03F7/30
    • G03F7/0397G03F7/0045Y10S430/111
    • A positive resist composition including a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including a structural unit (a0-1) represented by general formula (a0-1) shown below and a structural unit (a0-2) represented by general formula (a0-2) shown below: wherein: R represents a hydrogen atom, a halogen atom, a lower alkyl group or a halogenated lower alkyl group; each of Y1 and Y3 independently represents an aliphatic cyclic group; Z represents a tertiary alkyl group-containing group or an alkoxyalkyl group; a represents an integer of 1 to 3, and b represents an integer of 0 to 2, such that a+b=1 to 3; each of c, d and e independently represents an integer of 0 to 3; each of g and h independently represents an integer of 0 to 3; and i represents an integer of 1 to 3.
    • 包含在酸作用下表现出增加的碱溶性的树脂组分(A)和暴露时产生酸的酸产生剂组分(B)的正型抗蚀剂组合物,包括结构单元(a0-1)的树脂组分(A) 由下述通式(a0-1)表示的结构单元(a0-2)和下述通式(a0-2)表示的结构单元(a0-2)表示:其中:R表示氢原子,卤素原子,低级烷基或 卤代低级烷基; Y 1和Y 3各自独立地表示脂族环基; Z表示含叔烷基的基团或烷氧基烷基; a表示1〜3的整数,b表示0〜2的整数,a + b = 1〜3。 c,d和e各自独立地表示0〜3的整数, g和h各自独立地表示0〜3的整数, i表示1〜3的整数。
    • 4. 发明申请
    • POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
    • 正电阻组合物和形成电阻图案的方法
    • US20090246683A1
    • 2009-10-01
    • US12064288
    • 2006-08-16
    • Ryoji WatanabeMasaru Takeshita
    • Ryoji WatanabeMasaru Takeshita
    • G03F7/20G03F7/004
    • G03F7/0045C08F220/28G03F7/0397Y10S430/111Y10S430/122
    • A positive resist composition and method of forming a resist pattern are provided which enable formation of a resist pattern having excellent shape with reduced LWR.The positive resist composition includes a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon irradiation, the resin component (A) having a structural unit (a1) which has an acetal-type protection group, and the acid-generator component (B) including an acid generator (B1) having a cation moiety represented by general formula (b-5) shown below: wherein Ra and Rb each independently represents an alkyl group, an alkoxy group, a halogen atom or a hydroxyl group; Rc represents an aryl group or alkyl group which may or may not have a substituent; and n′ and n″ each independently represents an integer of 0 to 3.
    • 提供一种正型抗蚀剂组合物和形成抗蚀剂图案的方法,其能够形成具有优异形状的抗蚀剂图案,其具有减小的LWR。 正型抗蚀剂组合物包括在酸作用下表现出增加的碱溶性的树脂组分(A)和在照射时产生酸的酸产生剂组分(B),具有结构单元(a1)的树脂组分(A)具有 缩醛型保护基和含有具有下述通式(b-5)表示的阳离子部分的酸发生剂(B1)的酸发生剂成分(B):其中,Ra和Rb各自独立地表示烷基, 烷氧基,卤素原子或羟基; Rc表示可以具有或不具有取代基的芳基或烷基; n'和n“各自独立地表示0〜3的整数。
    • 5. 发明申请
    • POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
    • 正电阻组合物和形成电阻图案的方法
    • US20090075204A1
    • 2009-03-19
    • US12299523
    • 2007-05-18
    • Masaru TakeshitaRyoji Watanabe
    • Masaru TakeshitaRyoji Watanabe
    • G03F7/027G03F7/20
    • G03F7/0397G03F7/0045Y10S430/111
    • A positive resist composition including a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including a structural unit (a0-1) represented by general formula (a0-1) shown below and a structural unit (a0-2) represented by general formula (a0-2) shown below: wherein: R represents a hydrogen atom, a halogen atom, a lower alkyl group or a halogenated lower alkyl group; each of Y1 and Y3 independently represents an aliphatic cyclic group; Z represents a tertiary alkyl group-containing group or an alkoxyalkyl group; a represents an integer of 1 to 3, and b represents an integer of 0 to 2, such that a+b=1 to 3; each of c, d and e independently represents an integer of 0 to 3; each of g and h independently represents an integer of 0 to 3; and i represents an integer of 1 to 3.
    • 包含在酸作用下表现出增加的碱溶性的树脂组分(A)和暴露时产生酸的酸产生剂组分(B)的正型抗蚀剂组合物,包括结构单元(a0-1)的树脂组分(A) 由下述通式(a0-1)表示的结构单元(a0-2)和下述通式(a0-2)表示的结构单元(a0-2)表示:其中:R表示氢原子,卤素原子,低级烷基或 卤代低级烷基; Y 1和Y 3各自独立地表示脂族环基; Z表示含叔烷基的基团或烷氧基烷基; a表示1〜3的整数,b表示0〜2的整数,a + b = 1〜3。 c,d和e各自独立地表示0〜3的整数, g和h各自独立地表示0〜3的整数, i表示1〜3的整数。
    • 6. 发明申请
    • POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
    • 正电阻组合物和形成电阻图案的方法
    • US20090068592A1
    • 2009-03-12
    • US12299529
    • 2007-04-18
    • Masaru TakeshitaRyoji Watanabe
    • Masaru TakeshitaRyoji Watanabe
    • G03F7/027G03F7/20
    • G03F7/0397
    • A positive resist composition including a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including a structural unit (a0) represented by general formula (a0) shown below and a structural unit (a1) derived from an acrylate ester having a polycyclic group-containing, acid dissociable, dissolution inhibiting group of a tertiary alkyl ester-type: wherein: R represents a hydrogen atom, a halogen atom, a lower alkyl group or a halogenated lower alkyl group; Y1 represents an aliphatic cyclic group; Z represents a tertiary alkyl group-containing group; a represents an integer of 1 to 3, and b represents an integer of 0 to 2, such that a+b 1 to 3; and each of c, d and e independently represents an integer of 0 to 3.
    • 一种正型抗蚀剂组合物,其包含在酸作用下表现出增加的碱溶性的树脂组分(A)和暴露时产生酸的酸产生剂组分(B),所述树脂组分(A)包含由 由下述通式(a0)表示的结构单元(a1)和由具有含多环基团的酸解离性溶解抑制基团的叔烷基酯型的丙烯酸酯衍生的结构单元(a1):其中:R表示氢原子,卤素 原子,低级烷基或卤代低级烷基; Y1表示脂肪族环状基团; Z表示含叔烷基的基团; a表示1〜3的整数,b表示0〜2的整数,a + b 1〜3; c,d和e各自独立地表示0〜3的整数。