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    • 4. 发明授权
    • Semiconductor laser device and method of manufacturing the same
    • 半导体激光器件及其制造方法
    • US07903709B2
    • 2011-03-08
    • US12357282
    • 2009-01-21
    • Ryoji HiroyamaDaijiro InoueYasuyuki BesshoMasayuki Hata
    • Ryoji HiroyamaDaijiro InoueYasuyuki BesshoMasayuki Hata
    • H01S5/00
    • H01S5/34333B82Y20/00H01S5/0201H01S5/0202H01S5/0203H01S5/0425H01S5/16H01S5/22H01S5/2201
    • A semiconductor laser device includes a substrate and a semiconductor layer formed on a surface of the substrate and having a waveguide extending in a first direction parallel to the surface, wherein the waveguide is formed on a region approaching a first side from a center of the semiconductor laser device in a second direction parallel to the surface and intersecting with the first direction, a first region separated from the waveguide on a side opposite to the first side of the waveguide and extending parallel to the first direction and a first recess portion separated from the waveguide on an extension of a facet of the waveguide, intersecting with the first region and extending in the second direction are formed on an upper surface of the semiconductor laser device, and a thickness of the semiconductor layer on the first region is smaller than a thickness of the semiconductor layer on a region other than the first region.
    • 半导体激光器件包括衬底和形成在衬底的表面上的半导体层,并且具有沿平行于表面的第一方向延伸的波导,其中波导形成在从半导体的中心接近第一侧的区域 激光装置在与第一方向平行的第二方向上与第一方向相交的第一区域,与波导的与波导的第一侧相反的一侧并且平行于第一方向延伸的第一凹部, 在半导体激光器件的上表面上形成有与第一区域交叉且沿第二方向延伸的波导的小平面的延伸的波导,并且第一区域上的半导体层的厚度小于厚度 的第一区域以外的区域。
    • 6. 发明授权
    • Semiconductor laser device and method of manufacturing the same
    • 半导体激光器件及其制造方法
    • US08193016B2
    • 2012-06-05
    • US12985632
    • 2011-01-06
    • Ryoji HiroyamaDaijiro InoueYasuyuki BesshoMasayuki Hata
    • Ryoji HiroyamaDaijiro InoueYasuyuki BesshoMasayuki Hata
    • H01L21/00
    • H01S5/34333B82Y20/00H01S5/0201H01S5/0202H01S5/0203H01S5/0425H01S5/16H01S5/22H01S5/2201
    • A semiconductor laser device includes a substrate and a semiconductor layer formed on a surface of the substrate and having a waveguide extending in a first direction parallel to the surface, wherein the waveguide is formed on a region approaching a first side from a center of the semiconductor laser device in a second direction parallel to the surface and intersecting with the first direction, a first region separated from the waveguide on a side opposite to the first side of the waveguide and extending parallel to the first direction and a first recess portion separated from the waveguide on an extension of a facet of the waveguide, intersecting with the first region and extending in the second direction are formed on an upper surface of the semiconductor laser device, and a thickness of the semiconductor layer on the first region is smaller than a thickness of the semiconductor layer on a region other than the first region.
    • 半导体激光器件包括衬底和形成在衬底的表面上的半导体层,并且具有沿平行于表面的第一方向延伸的波导,其中波导形成在从半导体的中心接近第一侧的区域 激光装置在与第一方向平行的第二方向上与第一方向相交的第一区域,与波导的与波导的第一侧相反的一侧并且平行于第一方向延伸的第一凹部, 在半导体激光器件的上表面上形成有与第一区域交叉且沿第二方向延伸的波导的小平面的延伸的波导,并且第一区域上的半导体层的厚度小于厚度 的第一区域以外的区域。