专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06764916B1 Manufacturing method for semiconductor device 失效
标题翻译：半导体器件的制造方法
公开(公告)号：US06764916B1
公开(公告)日：2004-07-20
申请号：US09408327
申请日：1999-09-29
申请人： Ryoichi Furukawa , Tadanori Yoshida , Masayuki Tsuneda , Yasuhiro Inokuchi , Satoru Tagami
发明人： Ryoichi Furukawa , Tadanori Yoshida , Masayuki Tsuneda , Yasuhiro Inokuchi , Satoru Tagami
IPC分类号： H01L218242
CPC分类号： H01L21/31637 , C23C16/405 , H01L27/10811 , H01L28/84
摘要： A manufacturing method for a semiconductor device, including forming on or above a semiconductor substrate a silicon film a surface of which has a first polycrystalline silicon film with mushroom or hemisphere-shaped crystal grains, and forming a Ta2O5 film on the silicon film at a pressure of 40 Pa or lower and at a temperature of 480° C. or lower, using a gas obtained by vaporizing Ta(OC2H5)5 as a tantalum source gas.
摘要翻译：一种半导体器件的制造方法，其特征在于，在半导体基板的上方或上方形成有表面具有带有蘑菇状或半球状的晶粒的第一多晶硅膜的硅膜，在所述硅膜上形成Ta2O5膜的压力使用通过蒸发Ta（OC2H5）5作为钽源气体获得的气体，在40Pa以下且在480℃以下的温度下进行。

2. 发明授权

US5365141A Piezoelectric transformer and method for driving the same 失效
标题翻译：压电变压器及其驱动方法
公开(公告)号：US5365141A
公开(公告)日：1994-11-15
申请号：US18290
申请日：1993-02-16
申请人： Jun Kawai , Satoru Tagami
发明人： Jun Kawai , Satoru Tagami
IPC分类号： H01L41/107 , H02M3/24 , H01L41/08
CPC分类号： H01L41/107
摘要： A piezoelectric transformer is constituted of a piezoelectric plate in the form of an elongated plate and electrodes formed thereon. A pair of driver sections and a generator section are formed in two opposite end regions of the piezoelectric plate containing a mechanical resonance node and in a central region of the piezoelectric plate containing a mechanical resonance node, respectively, in an oscillation mode of three times of 1/2 of the resonance wavelength .lambda. of the longitudinal mechanical oscillation in length of the piezoelectric plate. The driver sections are polarized in a thickness direction but in directions opposite to each other. The driver sections have a distance of .lambda./2 from the corresponding end of the piezoelectric plate.
摘要翻译：压电变压器由细长板形成的压电板和形成在其上的电极构成。在包含机械共振节点的压电板的两个相对端区域中分别形成一对驱动器部分和发电机部分，并且在包含机械共振节点的压电板的中心区域中分别以三次的振荡模式压电板长度纵向机械振荡的共振波长λ的1/2。驱动器部分在厚度方向上彼此相反地偏振。驱动器部分与压电板的对应端的距离为λ/ 2。

3. 发明授权

US5402031A Piezoelectric transformer having improved electrode arrangement 失效
标题翻译：具有改进的电极布置的压电变压器
公开(公告)号：US5402031A
公开(公告)日：1995-03-28
申请号：US177070
申请日：1994-01-03
申请人： Satoru Tagami , Jun Kawai , Akira Fukuoka
发明人： Satoru Tagami , Jun Kawai , Akira Fukuoka
IPC分类号： H01L41/107 , H01L41/08
CPC分类号： H01L41/107
摘要： A long relatively thin rectangular body of piezoelectric material is divided into driving and driven regions in a longitudinal direction thereof. Two electrodes are applied respectively to two major surfaces of the driving region which is polarized in a thickness direction of the driving region. Another two electrodes are formed on one major surface of the driven region. Each of the two electrodes applied to the driven region has a plurality of finger-like portions which extend in the longitudinal direction. The finger-like portions of formed on the driven region are arranged in an interdigital manner. The driven region has a plurality of regions which are defined by adjacent finger-like portions and which are polarized in a direction perpendicular to the longitudinal direction.
摘要翻译：压电材料的长相对薄的矩形体在其长度方向被分为驱动区域和被驱动区域。两个电极分别施加在驱动区域的沿驱动区域的厚度方向极化的两个主表面上。在驱动区域的一个主表面上形成另外两个电极。施加到从动区域的两个电极中的每一个具有沿纵向方向延伸的多个指状部分。形成在从动区域上的指状部分以叉指方式排列。被驱动区域具有由相邻的指状部分限定并且在垂直于纵向方向的方向上被极化的多个区域。

4. 发明授权

US5463266A Piezoelectric transformer having improved electrode arrangement 失效
标题翻译：具有改进的电极布置的压电变压器
公开(公告)号：US5463266A
公开(公告)日：1995-10-31
申请号：US177069
申请日：1994-01-03
申请人： Akira Fukuoka , Jun Kawai , Satoru Tagami
发明人： Akira Fukuoka , Jun Kawai , Satoru Tagami
IPC分类号： H01L41/107 , H01L41/08
CPC分类号： H01L41/107
摘要： A long thin rectangular body of piezoelectric material is divided, in the longitudinal direction thereof, into a plurality of regions which include at least one driving region and at least one driven region. The driven region includes two electrodes which are formed such as to respectively cover opposite side surfaces of the driven region in a plane parallel to the longitudinal direction and to respectively extend inwardly in a transverse direction of the body by a predetermined amount over two major surfaces of the driven region. The driven region is polarized in a lateral direction of the body. As an alternative, the driven region is provided with two electrodes each of which consists of a pair of relatively narrow strip-like portions. The strip-like portions of one electrode extend over the two major surfaces adjacent to one edge of the driven region in the longitudinal direction of the body. The strip-like portions of the other electrode are similarly provided at the opposite side of the driven region. The driven region is polarized in a direction perpendicular to the longitudinal direction of the body.
摘要翻译：压电材料的长薄的矩形体在其纵向方向上分成多个区域，其包括至少一个驱动区域和至少一个从动区域。被驱动区域包括两个电极，它们形成为分别在平行于纵向方向的平面中覆盖被驱动区域的相对侧表面，并且在主体的两个主表面上分别在身体的横向方向上向内延伸预定量被驱动区域。被驱动区域在主体的横向被极化。作为替代，驱动区域设置有两个电极，每个电极由一对相对窄的条状部分组成。一个电极的带状部分在主体的纵向方向上相邻于从动区域的一个边缘的两个主表面延伸。另一个电极的带状部分类似地设置在驱动区域的相对侧。被驱动区域在与主体的纵向方向垂直的方向上被偏振。

5. 发明授权

US6060819A Piezoelectric transformer 失效
标题翻译：压电变压器
公开(公告)号：US6060819A
公开(公告)日：2000-05-09
申请号：US873196
申请日：1997-06-11
申请人： Satoru Tagami , Koichi Zama , Tsuyoshi Kitami , Hiromi Suzuki , Takayuki Inoi
发明人： Satoru Tagami , Koichi Zama , Tsuyoshi Kitami , Hiromi Suzuki , Takayuki Inoi
IPC分类号： H01L41/107 , H02M3/24 , H02N2/00 , H01L41/047 , H02M5/04
CPC分类号： H01L41/107
摘要： A piezoelectric transformer includes strip form electrodes on opposing upper and lower surfaces of a piezoelectric ceramic plate formed by screen printing using a conductive paste. By using strip form electrodes, discharge of a driving portion during polarization, degradation of reliability of mechanical strength due to excessive stress in a power generating portion during polarization, and instability of transformer output due to breakage of the electrode is prevented.
摘要翻译：压电变压器包括通过使用导电浆料的丝网印刷形成的压电陶瓷板的相对的上表面和下表面上的带状电极。通过使用带状电极，在极化期间放电驱动部分，在极化期间由于发电部分中的过度应力导致的机械强度的可靠性降低，并且防止了由于电极断裂导致的变压器输出的不稳定性。

6. 发明授权

US5475278A Method for driving piezoelectric actuator 失效
标题翻译：驱动压电致动器的方法
公开(公告)号：US5475278A
公开(公告)日：1995-12-12
申请号：US219698
申请日：1994-03-30
申请人： Masako Inagawa , Sadayuki Takahashi , Koichi Morimoto , Satoru Tagami
发明人： Masako Inagawa , Sadayuki Takahashi , Koichi Morimoto , Satoru Tagami
IPC分类号： H01L41/09 , H01L41/04 , H01L41/053 , H01L41/083 , H01L41/08
CPC分类号： H01L41/083 , H01L41/042 , H01L41/0533
摘要： A piezoelectric actuator is driven by continuously applying a pulse voltage or an AC voltage to a piezoelectric element, so as to cause the piezoelectric element to generate heat because of a dielectric loss of the piezoelectric element itself. If the temperature of the piezoelectric element reaches a temperature not less than 15.degree. C., moisture contained in atmosphere is effectively prevented from entering into a resin casing of the piezoelectric actuator enclosing therein the piezoelectric element. Otherwise, moisture condensation or sweating would occur on a surface of the piezoelectric element. Therefore, even if the piezoelectric actuator is used in atmosphere of high humidity, a discharge breakdown will not occur, and reliability is remarkably increased.
摘要翻译：通过向压电元件连续施加脉冲电压或AC电压来驱动压电致动器，由于压电元件本身的介电损耗而使压电元件产生热量。如果压电元件的温度达到不低于15℃的温度，则有效地防止大气中含有的水分进入包围压电元件的压电致动器的树脂壳体中。否则，会在压电元件的表面上发生湿气凝结或出汗。因此，即使在高湿度的气氛中使用压电致动器，也不会发生放电击穿，可靠性显着提高。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式