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    • 8. 发明申请
    • Datum plate for use in installations of substrate handling systems
    • 用于基板处理系统安装的基板
    • US20060104749A1
    • 2006-05-18
    • US11280028
    • 2005-11-16
    • William Weaver
    • William Weaver
    • H01L21/677
    • H01L21/67778H01L21/67766H01L21/67772H01L21/67775
    • A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a set of predetermined attachment locations adapted to couple one or more automatic door opener platforms to the datum plate; and a set of predetermined attachment locations adapted to couple one or more substrate handlers contained within the chamber, to the datum plate. The attachment locations are positioned such that when the datum plate is coupled to the chamber, and the automatic door opener platform and the substrate handler are coupled to the datum plate, the substrate handler and automatic door opener platform are aligned for substrate transfer therebetween. Numerous other aspects are provided.
    • 提供了用于基板处理系统的安装的基准板。 基准板具有适于将基准板连接到腔室的一组预定的附接位置; 一组预定的附接位置,其适于将一个或多个自动开门器平台联接到基准板上; 以及一组预定的附接位置,其适于将容纳在腔室内的一个或多个衬底处理器连接到基准板。 附接位置定位成使得当基准板联接到室时,并且自动开门器平台和基板处理器联接到基准板时,衬底处理器和自动开门器平台被对准以用于其间的衬底传送。 提供了许多其他方面。