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1. 发明授权

US06752897B2 Wet etch system with overflow particle removing feature 失效
标题翻译：具有溢流颗粒去除功能的湿式蚀刻系统
公开(公告)号：US06752897B2
公开(公告)日：2004-06-22
申请号：US10278969
申请日：2002-10-22
申请人： Ruei-Hung Jang , Chih-Lin Ying , Tien-Hsing Woo , Tsung-Chi Hsieh , Shih-Shiung Chen
发明人： Ruei-Hung Jang , Chih-Lin Ying , Tien-Hsing Woo , Tsung-Chi Hsieh , Shih-Shiung Chen
IPC分类号： C23F102
CPC分类号： H01L21/67086
摘要： A wet etch system including a process tank having an inner etch bath chamber and an outer overflow chamber surrounding the etch bath chamber. A frame which is removably mounted on the process tank defines a diversion channel between the upper ends of the etch bath chamber and overflow chamber. The etch bath chamber receives a wafer-containing cassette, which displaces etchant from the etch bath chamber, through the diversion channel and into the overflow chamber, where the etchant is drained from the process tank. Particulate impurities leave the etch bath chamber, enter the overflow chamber and drain from the process tank with the overflow etchant. Fresh etchant is poured into the etch bath chamber prior to a subsequent etch cycle. A water spray loop may be provided in the overflow chamber for removing etch particles from the interior wall surfaces of the overflow chamber.
摘要翻译：湿式蚀刻系统，其包括具有内部蚀刻浴室和围绕蚀刻浴室的外部溢流室的处理罐。可移除地安装在处理罐上的框架在蚀刻槽室的上端和溢流室之间形成分流通道。蚀刻浴室接收含晶片的盒，其将来自蚀刻浴室的蚀刻剂移动通过引流通道并进入溢流室，其中蚀刻剂从处理罐排出。颗粒杂质离开蚀刻槽室，进入溢流室，并从溢流蚀刻液从处理槽排出。在随后的蚀刻循环之前，将新的蚀刻剂倒入蚀刻槽室中。可以在溢流室中设置喷水回路，以从溢流室的内壁表面去除蚀刻颗粒。

2. 发明授权

US06687456B1 In-line fluid heater 失效
标题翻译：在线流体加热器
公开(公告)号：US06687456B1
公开(公告)日：2004-02-03
申请号：US10196595
申请日：2002-07-15
申请人： Tien-Hsing Woo , Ruei-Hung Jang , Chih-Lin Ying , Ming-Kuo Yu , Shih-Shiung Chen
发明人： Tien-Hsing Woo , Ruei-Hung Jang , Chih-Lin Ying , Ming-Kuo Yu , Shih-Shiung Chen
IPC分类号： F21V700
CPC分类号： H01L21/67115
摘要： An in-line fluid heater including a heater housing that contains a parabolic lamp vessel which houses an infrared lamp. A parabolic reflection vessel in the heater housing is separated from the parabolic lamp vessel by a convex lens. A quartz plate seals the heater housing, and at least one, and typically, multiple leak detectors may be provided in the heater housing. The interior reflective surface of the reflection vessel reflects the heat energy in parallel rays through the quartz plate and to the fluid to be heated. The leak detectors may be connected to an RC circuit which operates a controller to actuate a buzzer or alarm and terminate operation of the heater upon leakage of fluid into the heater housing.
摘要翻译：一种在线流体加热器，其包括加热器壳体，该加热器壳体包含容纳红外灯的抛物面灯管。加热器壳体中的抛物面反射容器通过凸透镜与抛物线灯容器分离。石英板密封加热器壳体，并且可以在加热器壳体中提供至少一个，并且通常多个泄漏检测器。反射容器的内部反射表面将平行射线中的热能反射通过石英板和待加热的流体。泄漏检测器可以连接到RC电路，RC电路操作控制器来致动蜂鸣器或报警器，并且在将流体泄漏到加热器壳体中时终止加热器的操作。

3. 发明授权

US06601986B2 Fluid mixing apparatus 有权
公开(公告)号：US06601986B2
公开(公告)日：2003-08-05
申请号：US09941532
申请日：2001-08-29
申请人： Ruei-Hung Jang , Tien-Hsing Woo , Chih-Lin Ying , Tsung-Chi Hsieh , Ming-Kuo Yu
发明人： Ruei-Hung Jang , Tien-Hsing Woo , Chih-Lin Ying , Tsung-Chi Hsieh , Ming-Kuo Yu
IPC分类号： B04C300
CPC分类号： B01F5/0057 , B01F5/0256 , B01F5/064
摘要： A static mixer comprises a mixing chamber with an inlet mixing module, fluids to be mixed being fed into the module to undergo swirling and jet collision, at least one intermediate mixing module connected to the inlet mixing module and provided with means for splitting liquid flow into a plurality of jet flows with subsequent recombination of said jets and mixing action of vortices formed around the jet flows, and an outlet mixing module connected to the intermediate mixing module and provided with means for further swirling premixed fluids.

4. 发明授权

US07204751B2 Method and apparatus for filtering contaminants 有权
标题翻译：用于过滤污染物的方法和设备
公开(公告)号：US07204751B2
公开(公告)日：2007-04-17
申请号：US10614564
申请日：2003-07-07
申请人： Ruei-Hung Jang , Chun-Li Fang , Wen-Hung Tseng , Tsung-Chi Hsieh , Shih-Shiung Chen
发明人： Ruei-Hung Jang , Chun-Li Fang , Wen-Hung Tseng , Tsung-Chi Hsieh , Shih-Shiung Chen
IPC分类号： B01L1/04
CPC分类号： B01D53/0446 , B01D2253/102 , B01D2258/0216
摘要： A self-contained ventilator includes a housing having a support member for supporting a pollution source. A filter is further disposed in the housing for filtering contaminants emitted from the pollution source. A conduit is adapted to connect to the housing to provide non-housing communication between portions of the housing. A fan is situated in the conduit to generate an airflow that follows a path through the housing, through the conduit, and back to the housing. The airflow entrains the contaminants such that the contaminants are captured by the filter upon passage of the airflow through the filter.
摘要翻译：独立式通风机包括具有用于支撑污染源的支撑构件的壳体。过滤器还设置在壳体中，用于过滤污染物排放的污染物。管道适于连接到壳体以在壳体的部分之间提供非壳体连通。风扇位于管道中，以产生气流，其沿着通过壳体的路径，穿过导管并返回到壳体。气流夹带污染物，使得当气流通过过滤器时，污染物被过滤器捕获。

5. 发明申请

US20050066633A1 Method and apparatus for filtering contaminants 有权
标题翻译：用于过滤污染物的方法和设备
公开(公告)号：US20050066633A1
公开(公告)日：2005-03-31
申请号：US10614564
申请日：2003-07-07
申请人： Ruei-Hung Jang , Chun-Li Fang , Wen-Hung Tseng , Tsung-Chi Hsieh , Shih-Shiung Chen
发明人： Ruei-Hung Jang , Chun-Li Fang , Wen-Hung Tseng , Tsung-Chi Hsieh , Shih-Shiung Chen
IPC分类号： B01D50/00 , B01D53/04
CPC分类号： B01D53/0446 , B01D2253/102 , B01D2258/0216
摘要： A self-contained ventilator includes a housing having a support member for supporting a pollution source. A filter is further disposed in the housing for filtering contaminants emitted from the pollution source. A conduit is adapted to connect to the housing to provide non-housing communication between portions of the housing. A fan is situated in the conduit to generate an airflow that follows a path through the housing, through the conduit, and back to the housing. The airflow entrains the contaminants such that the contaminants are captured by the filter upon passage of the airflow through the filter.
摘要翻译：独立式通风机包括具有用于支撑污染源的支撑构件的壳体。过滤器还设置在壳体中，用于过滤污染物排放的污染物。管道适于连接到壳体以在壳体的部分之间提供非壳体连通。风扇位于管道中，以产生气流，其沿着通过壳体的路径，穿过导管并返回到壳体。气流夹带污染物，使得当气流通过过滤器时，污染物被过滤器捕获。

6. 发明授权

US06571607B2 Fluid leak detection via thermal sensing 有权
标题翻译：通过热敏感检测流体泄漏
公开(公告)号：US06571607B2
公开(公告)日：2003-06-03
申请号：US09881389
申请日：2001-06-13
申请人： Ruei-Hung Jang , Chih-Lin Ying , Tien-Hsing Woo , Ming-Kuo Yu
发明人： Ruei-Hung Jang , Chih-Lin Ying , Tien-Hsing Woo , Ming-Kuo Yu
IPC分类号： G01N1700
CPC分类号： G01M3/002
摘要： Fluid leak detection through thermal sensing is disclosed. A sensor includes one or more flexible, thermally conductive, fluid isolating layers, and a thermally sensitive detector situated within the flexible, thermally conductive, fluid isolating layers. The detector is responsive to a temperature change resulting from leaking fluid coming in contact with the sensor. The sensor may also including an affixing mechanism, such as glue, on the isolating layers, to affix the sensor to a potential fluid leak source, such as a tank or a piping line. The sensor may further include connectors located at its ends. The detector may be a thermally sensitive resistor, such as platinum or nickel, and the, fluid isolating layers may be capton.
摘要翻译：公开了通过热感测的流体泄漏检测。传感器包括一个或多个柔性的，导热的流体隔离层，以及位于柔性导热的流体隔离层内的热敏检测器。检测器响应于与传感器接触的泄漏流体导致的温度变化。传感器还可以在隔离层上包括诸如胶水的固定机构，以将传感器固定到潜在的流体泄漏源，例如罐或管道。传感器还可以包括位于其端部的连接器。检测器可以是热敏电阻器，例如铂或镍，并且流体隔离层可以是卡顿的。

7. 发明授权

US06685842B2 Thermophoretic particle removing system 有权
标题翻译：热解颗粒去除系统
公开(公告)号：US06685842B2
公开(公告)日：2004-02-03
申请号：US10039477
申请日：2001-12-31
申请人： Ruei-Hung Jang , Chih-Lin Ying , Tien-Hsing Woo , Shan-Hua Wu , Ming-Kuo Yu
发明人： Ruei-Hung Jang , Chih-Lin Ying , Tien-Hsing Woo , Shan-Hua Wu , Ming-Kuo Yu
IPC分类号： B01D1709
CPC分类号： B01D21/009
摘要： A method and apparatus for carrying out a method for thermophoretically removing particles from a particulate containing liquid the method including providing a heated turbulent flowing particulate contain liquid through a first conduit; redirecting a portion of the particulate containing liquid through a second conduit to provide laminar flow having a flow direction substantially parallel to the first conduit; forming a thermal gradient in said second conduit substantially perpendicular to the flow direction; concentrating particles in the particulate containing liquid in a portion of the second conduit aided at least in part by thermophoretic forces; and, separating the particulate containing liquid into at least a relatively concentrated particle containing portion and a relatively unconcentrated particle containing portion.
摘要翻译：一种用于实施用于从含颗粒的液体中热去除颗粒的方法的方法和装置，该方法包括提供加热的紊流流动的颗粒通过第一导管容纳液体; 通过第二导管将含部分颗粒的液体重新定向以提供具有基本上平行于第一导管的流动方向的层流; 在所述第二导管中基本上垂直于所述流动方向形成热梯度; 在第二导管的一部分中将颗粒聚集在含微粒的液体中至少部分地通过热电解力来辅助; 并且将含微粒的液体分离成至少相对浓缩的含有颗粒的部分和相对不浓缩的含颗粒的部分。

8. 发明申请

US20050183510A1 Method and apparatus for measuring gripping strength of a vacuum wand 失效
公开(公告)号：US20050183510A1
公开(公告)日：2005-08-25
申请号：US10782036
申请日：2004-02-19
申请人： Ruei-Hung Jang , Chih-Lin Ying , Tsung-Chi Hsieh , Sheng-Liang Pan , Ching-Hui Tai
发明人： Ruei-Hung Jang , Chih-Lin Ying , Tsung-Chi Hsieh , Sheng-Liang Pan , Ching-Hui Tai
IPC分类号： G01L1/00 , G01L5/00 , G01L5/22 , G01L7/00
CPC分类号： G01L5/0033 , G01L5/226
摘要： A method and apparatus for measuring the vacuum gripping strength of a vacuum wand or robotic arm provides a pressure gauge and a conduit extending from the pressure gauge and terminating at an opening formed in a receiving surface. A vacuum wand head is positioned on the receiving surface such that the gripping surface of the vacuum wand forms a conterminous boundary with the receiving surface and the vacuum port of the vacuum wand is aligned over the opening formed in the receiving surface. The receiving surface replicates a wafer surface so that the same vacuum gripping strength as would be delivered to a wafer being gripped by the vacuum wand, is thereby sensed by the pressure gauge. Spring loaded positioning members act in conjunction with a clamp member and a mechanical stop position the vacuum wand head in the receiving area and over the opening and also to assure that the gripping surface of the vacuum wand head is flush against the surface of the receiving area. Diminution of vacuum gripping strength caused by scratches or other defects of the gripping surface that cause vacuum leaks between gripping surface and the wafer surface, are similarly reproduced and sensed by the pressure gauge.

9. 发明授权

US06971270B2 Method and apparatus for measuring gripping strength of a vacuum wand 失效
标题翻译：用于测量真空棒的夹紧强度的方法和装置
公开(公告)号：US06971270B2
公开(公告)日：2005-12-06
申请号：US10782036
申请日：2004-02-19
申请人： Ruei-Hung Jang , Chih-Lin Ying , Tsung-Chi Hsieh , Sheng-Liang Pan , Ching-Hui Tai
发明人： Ruei-Hung Jang , Chih-Lin Ying , Tsung-Chi Hsieh , Sheng-Liang Pan , Ching-Hui Tai
IPC分类号： G01L1/00 , G01L5/00 , G01L5/22 , G01L7/00
CPC分类号： G01L5/0033 , G01L5/226
摘要： A method and apparatus for measuring the vacuum gripping strength of a vacuum wand or robotic arm provides a pressure gauge and a conduit extending from the pressure gauge and terminating at an opening formed in a receiving surface. A vacuum wand head is positioned on the receiving surface such that the gripping surface of the vacuum wand forms a conterminous boundary with the receiving surface and the vacuum port of the vacuum wand is aligned over the opening formed in the receiving surface. The receiving surface replicates a wafer surface so that the same vacuum gripping strength as would be delivered to a wafer being gripped by the vacuum wand, is thereby sensed by the pressure gauge. Spring loaded positioning members act in conjunction with a clamp member and a mechanical stop position the vacuum wand head in the receiving area and over the opening and also to assure that the gripping surface of the vacuum wand head is flush against the surface of the receiving area. Diminution of vacuum gripping strength caused by scratches or other defects of the gripping surface that cause vacuum leaks between gripping surface and the wafer surface, are similarly reproduced and sensed by the pressure gauge.
摘要翻译：用于测量真空棒或机器人手臂的真空夹紧强度的方法和装置提供压力计和从压力计延伸并终止于形成在接收表面中的开口的导管。真空棒头定位在接收表面上，使得真空棒的抓握表面与接收表面形成一个连续的边界，并且真空棒的真空端口在形成在接收表面中的开口上对准。接收表面复制晶片表面，从而通过压力计感测到与由真空棒夹持的晶片相同的真空夹紧强度。弹簧加载的定位构件与夹紧构件一起作用并且机械地将真空棒头位于接收区域中并在开口上并且还确保真空棒头的夹持表面与接收区域的表面齐平。通过压力计类似地再现和感测由夹紧表面上的擦伤或其他缺陷导致抓握表面和晶片表面之间的真空泄漏的真空夹紧强度的减小。

10. 发明申请

US20050230407A1 Toxic waste receptacle 审中-公开
标题翻译：有毒废物容器
公开(公告)号：US20050230407A1
公开(公告)日：2005-10-20
申请号：US10810382
申请日：2004-03-26
申请人： Chun-Li Fang , Ruei-Hung Jang , Wen-Hung Tseng , Tsung-Chi Hsieh , Sheng-Liang Pan
发明人： Chun-Li Fang , Ruei-Hung Jang , Wen-Hung Tseng , Tsung-Chi Hsieh , Sheng-Liang Pan
IPC分类号： B65D25/14 , B65F1/06 , B65F1/16
CPC分类号： B65F1/06 , B65F1/163 , B65F2001/1676 , B65F2210/1675 , B65F2210/1795
摘要： A toxic waste receptacle with a cover includes an exhaust hood that exhausts toxic gases from the waste receptacle and an interior bag closure mechanism that is operable externally and closes the bag disposed within an interior receptacle of the toxic waste receptacle. The exhaust system exhausts toxic gases from the interior of the waste receptacle and the internal bag closure mechanism confines harmful toxic gases within the bag prior to opening the cover of the waste receptacle to prevent toxic gases from escaping into the work environment.
摘要翻译：具有盖的有毒废物容器包括从废物容器排出有毒气体的排气罩和可在外部操作并封闭设置在有毒废物容器的内部容器内的袋的内部袋封闭机构。排气系统从废物容器的内部排出有毒气体，并且在打开废物容器的盖子之前，内部袋封闭机构将有害的有毒气体限制在袋内，以防止有毒气体逸出到工作环境中。

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