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    • 3. 发明申请
    • SRAM memories and microprocessors having logic portions implemented in high-performance silicon substrates and SRAM array portions having field effect transistors with linked bodies and methods for making same
    • 具有在高性能硅衬底中实现的逻辑部分的SRAM存储器和微处理器以及具有连接体的场效应晶体管的SRAM阵列部分及其制造方法
    • US20060157788A1
    • 2006-07-20
    • US11038593
    • 2005-01-19
    • Rajiv JoshiRichard WachnikYue TanKerry Bernstein
    • Rajiv JoshiRichard WachnikYue TanKerry Bernstein
    • H01L27/12H01L27/01
    • H01L27/1203H01L21/84H01L27/0207H01L27/1104
    • The present invention generally concerns fabrication methods and device architectures for use in memory circuits, and more particularly concerns hybrid silicon-on-insulator (SOI) and bulk architectures for use in memory circuits. Once aspect of the invention concerns CMOS SRAM cell architectures where at least one pair of adjacent NFETs in an SRAM cell have body regions linked by a leakage path diffusion region positioned beneath shallow source/drain diffusions, where the leakage path diffusion region extends from the bottom of the source/drain diffusion to the buried oxide layer, and at least one pair of NFETs from adjacent SRAM cells which have body regions linked by a similar leakage path diffusion region beneath adjacent source/drain diffusions. Another aspect of this invention concerns a microprocessor fabricated on an hybrid orientation substrate where the logic portion of the circuit has NFETs fabricated in (100) crystal orientation SOI silicon regions with floating body regions and PFETs fabricated in (110) crystal orientation bulk silicon regions; and where the SRAM memory portion has NFETs fabricated in (100) crystal orientation SOI silicon regions with body regions linked by leakage path diffusion regions beneath shallow source/drain diffusions and PFETs fabricated in (110) crystal orientation silicon regions.
    • 本发明一般涉及用于存储器电路的制造方法和器件架构,更具体地说,涉及用于存储器电路的混合绝缘体上硅(SOI)和批量结构。 本发明的一个方面涉及SRAM SRAM单元结构,其中SRAM单元中的至少一对相邻NFET具有通过位于浅源/漏扩散之下的泄漏路径扩散区连接的体区,其中泄漏路径扩散区从底部延伸 源极/漏极扩散到掩埋氧化物层的至少一对NFET,以及来自相邻SRAM单元的至少一对NFET,其具有通过相邻的源极/漏极扩散附近的相似泄漏路径扩散区域连接的体区。 本发明的另一方面涉及一种制造在混合取向基板上的微处理器,其中该电路的逻辑部分具有在具有浮动体区域的(100)晶体取向SOI硅区域和在(110)晶体取向体硅区域中制造的PFET)制造的NFET。 并且其中SRAM存储器部分具有在(100)晶体取向SOI硅区域中制造的NFET,其中主体区域通过在(110)晶体取向硅区域中制造的浅源/漏扩散下的泄漏路径扩散区域和PFET连接。