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    • 6. 发明授权
    • Fluid ejection device and method of fabricating
    • 流体喷射装置及其制造方法
    • US06481831B1
    • 2002-11-19
    • US09611810
    • 2000-07-07
    • Colin C. DavisEric L. NikkelMartha A. TruningerRonald L. Enck
    • Colin C. DavisEric L. NikkelMartha A. TruningerRonald L. Enck
    • B41J205
    • B41J2/1629B41J2/14129B41J2/1603B41J2/1628B41J2/1631B41J2/1632B41J2/1642B41J2/1646
    • An inkjet printhead and a method of fabricating an inkjet printhead is disclosed. The inkjet printhead includes a conducting material layer deposited on an insulative dielectric. The conducting material layer has a chamber formed between a first and a second section of the conducting material layer. A dielectric material is fabricated on the first and second sections of the conducting material layer and on the insulative dielectric in the chamber. The dielectric material has a planarized top surface. A first via is formed in the dielectric material, thereby exposing a portion of the first section of the conducting material layer. A second via is formed in the dielectric material, thereby exposing a portion of the second section of the conducting material layer. The first and second vias each having sidewalls sloped at an angle in the range of approximately 10-60 degrees. A resistive material layer is formed in the first and second vias and on the planarization dielectric between the first and second vias through a single photoresist mask and a single etch process. A passivation material layer is formed onto the planarization dielectric material and onto the resistive material layer.
    • 公开了喷墨打印头和制造喷墨打印头的方法。 喷墨打印头包括沉积在绝缘电介质上的导电材料层。 导电材料层具有形成在导电材料层的第一和第二部分之间的室。 介电材料制造在导电材料层的第一和第二部分以及室中的绝缘电介质上。 电介质材料具有平坦化的顶表面。 在电介质材料中形成第一通孔,从而暴露导电材料层的第一部分的一部分。 在电介质材料中形成第二通道,从而暴露导电材料层的第二部分的一部分。 第一和第二通孔各自具有以大约10-60度的角度倾斜的侧壁。 电阻材料层通过单个光致抗蚀剂掩模和单个蚀刻工艺在第一和第二通孔中以及在第一和第二通孔之间的平坦化电介质上形成。 在平坦化电介质材料上和电阻材料层上形成钝化材料层。