会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明授权
    • MIM capacitor high-k dielectric for increased capacitance density
    • MIM电容高k电介质,增加电容密度
    • US07719041B2
    • 2010-05-18
    • US11729350
    • 2007-03-28
    • Hadi Abdul-RidhaDavid Howard
    • Hadi Abdul-RidhaDavid Howard
    • H01L27/108
    • H01L23/5223H01L28/60H01L2924/0002H01L2924/00
    • According to one embodiment of the invention, a method for fabricating a MIM capacitor in a semiconductor die includes a step of depositing a first interconnect metal layer. The method further includes depositing a high-k dielectric layer comprising AlNX (aluminum nitride) on the first interconnect layer. The method further includes depositing a layer of MIM capacitor metal on the high-k dielectric layer. The method further includes etching the layer of MIM capacitor metal to form an upper electrode of the MIM capacitor. According to this exemplary embodiment, the first interconnect metal layer, the high-k dielectric layer, and the layer of MIM capacitor metal can be deposited in a PVD process chamber. The method further includes etching the high-k dielectric layer to form a MIM capacitor dielectric segment and etching the first interconnect metal layer to form a lower electrode of the MIM capacitor.
    • 根据本发明的一个实施例,在半导体管芯中制造MIM电容器的方法包括沉积第一互连金属层的步骤。 该方法还包括在第一互连层上沉积包含AlNX(氮化铝)的高k电介质层。 该方法还包括在高k电介质层上沉积MIM电容器金属层。 该方法还包括蚀刻MIM电容器金属层以形成MIM电容器的上电极。 根据该示例性实施例,第一互连金属层,高k电介质层和MIM电容器金属层可以沉积在PVD处理室中。 该方法还包括蚀刻高k电介质层以形成MIM电容器介电段并蚀刻第一互连金属层以形成MIM电容器的下电极。
    • 10. 发明授权
    • Flying apparatus
    • 飞行器具
    • US07503826B2
    • 2009-03-17
    • US11425971
    • 2006-06-22
    • David Howard
    • David Howard
    • A63H27/18A63H27/00
    • A63H27/001
    • This invention provides a small lightweight glider that is hollow and made from a molded thin film material. Typically the glider is formed in the shape of a bird or a plane. The body of the glider comprises top half and a lower half, which form a hollow fuselage, a left wing and a right wing extending laterally from the fuselage. The glider also comprises a ballast weight, a stiffener, and optionally an interior skeleton. The interior of the glider is open to the outside atmosphere and requires no inflation.
    • 本发明提供一种小型轻型滑翔机,其是中空的并且由模制的薄膜材料制成。 通常,滑翔机形成为鸟或飞机的形状。 滑翔机的主体包括上半部和下半部,其形成中空的机身,左翼和从机身横向延伸的右翼。 滑翔机还包括压载重量,加强件和任选的内部骨架。 滑翔机的内部对外界气氛开放,不需要通风。