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    • 7. 发明授权
    • Submicron dimensional calibration standards and methods of manufacture and use
    • 亚微米尺寸校准标准和制造和使用方法
    • US06646737B2
    • 2003-11-11
    • US09961629
    • 2001-09-24
    • Marco TortoneseIan SmithEllen LairdBradley W. Scheer
    • Marco TortoneseIan SmithEllen LairdBradley W. Scheer
    • G01R3126
    • G01Q40/02H01J2237/30444
    • A calibration standard which may be used to calibrate lateral dimensional measurement systems is provided. The calibration standard may include a first substrate spaced from a second substrate. In addition, the calibration standard may include at least one layer disposed between the first and second substrates. The layer may have a traceably measured thickness. For example, a thickness of the layer may be traceably measured using any measurement technique in which a measurement system may be calibrated with a standard reference material traceable to a national testing authority. The calibration standard may be cross-sectioned in a direction substantially perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the calibration standard may form a viewing surface of the calibration standard. In this manner, a lateral dimensional artifact of the calibration standard may include the traceably measured thickness of at least the one layer.
    • 提供了可用于校准横向尺寸测量系统的校准标准。 校准标准可以包括与第二衬底间隔开的第一衬底。 此外,校准标准可以包括设置在第一和第二基板之间的至少一层。 该层可以具有可追溯测量的厚度。 例如,可以使用任何测量技术来可追溯地测量该层的厚度,其中可以使用可追溯到国家检测机构的标准参考材料校准测量系统。 校准标准可以在基本上垂直于第一衬底的上表面的方向上横截面。 校准标准的横截面部分可以形成校准标准的观察表面。 以这种方式,校准标准的横向尺寸伪影可以包括至少一层的可追溯测量的厚度。