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    • 9. 发明授权
    • III-nitride current control device and method of manufacture
    • III族氮化物电流控制装置及其制造方法
    • US08174048B2
    • 2012-05-08
    • US11040312
    • 2005-01-21
    • Robert Beach
    • Robert Beach
    • H01L29/66
    • H01L29/7787H01L29/2003H01L29/42316H01L29/66462H01L29/872
    • A III-nitride device includes a recessed electrode to produce a nominally off, or an enhancement mode, device. By providing a recessed electrode, a conduction channel formed at the interface of two III-nitride materials is interrupted when the electrode contact is inactive to prevent current flow in the device. The electrode can be a schottky contact or an insulated metal contact. Two ohmic contacts can be provided to form a rectifier device with nominally off characteristics. The recesses formed with the electrode can have sloped sides. The electrode can be formed in a number of geometries in conjunction with current carrying electrodes of the device. A nominally on device, or pinch resistor, is formed when the electrode is not recessed. A diode is also formed by providing non-recessed ohmic and schottky contacts through an insulator to an AlGaN layer.
    • III族氮化物器件包括用于产生名义上关闭的凹陷电极或增强模式的器件。 通过设置凹陷电极,当电极接触不活动以阻止电流在器件中时,形成在两个III族氮化物材料的界面处的导电通道被中断。 电极可以是肖特基接触或绝缘金属接触。 可以提供两个欧姆接触以形成具有标称关闭特性的整流器件。 形成有电极的凹部可以具有倾斜的侧面。 电极可以结合设备的载流电极以多种几何形状形成。 当电极不凹陷时,形成标称的器件或夹持电阻器。 还通过将绝缘体提供非凹入的欧姆和肖特基接触到AlGaN层来形成二极管。
    • 10. 发明授权
    • Method of forming a III-nitride selective current carrying device including a contact in a recess
    • 在凹部中形成包含接触的III族氮化物选择性载流装置的方法
    • US08043906B2
    • 2011-10-25
    • US11602706
    • 2006-11-21
    • Robert Beach
    • Robert Beach
    • H01L21/338
    • H01L29/7787H01L29/2003H01L29/42316H01L29/66462H01L29/872
    • A III-nitride device includes a recessed electrode to produce a nominally off, or an enhancement mode, device. By providing a recessed electrode, a conduction channel formed at the interface of two III-nitride materials is interrupted when the electrode contact is inactive to prevent current flow in the device. The electrode can be a schottky contact or an insulated metal contact. Two ohmic contacts can be provided to form a rectifier device with nominally off characteristics. The recesses formed with the electrode can have sloped sides. The electrode can be formed in a number of geometries in conjunction with current carrying electrodes of the device. A nominally on device, or pinch resistor, is formed when the electrode is not recessed. A diode is also formed by providing non-recessed ohmic and schottky contacts through an insulator to an AlGaN layer.
    • III族氮化物器件包括用于产生名义上关闭的凹陷电极或增强模式的器件。 通过设置凹陷电极,当电极接触不活动以阻止电流在器件中时,形成在两个III族氮化物材料的界面处的导电通道被中断。 电极可以是肖特基接触或绝缘金属接触。 可以提供两个欧姆接触以形成具有标称关闭特性的整流器件。 形成有电极的凹部可以具有倾斜的侧面。 电极可以结合设备的载流电极以多种几何形状形成。 当电极不凹陷时,形成标称的器件或夹持电阻器。 还通过将绝缘体提供非凹入的欧姆和肖特基接触到AlGaN层来形成二极管。