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1. 发明授权

US08632145B2 Method and apparatus for printing using a facetted drum 有权
标题翻译：使用刻面滚筒打印的方法和装置
公开(公告)号：US08632145B2
公开(公告)日：2014-01-21
申请号：US13175826
申请日：2011-07-02
申请人： Conor Francis Madigan , Eliyahu Vronsky , Alexander Sou-Kang Ko , Robert B. Lowrance , Christopher Buchner
发明人： Conor Francis Madigan , Eliyahu Vronsky , Alexander Sou-Kang Ko , Robert B. Lowrance , Christopher Buchner
IPC分类号： B41J29/38
CPC分类号： B41J2/0057
摘要： The disclosure generally relates to a method and apparatus for printing from a rotating source. In an exemplary embodiment, the disclosure relates to a facetted drum for simultaneously printing multiple pixels. The facetted drum includes a support structure and a plurality of printheads affixed to the support structure, each printhead having at least one microporous structure for receiving a first quantity of liquid ink having dissolved or suspended film material in a carrier fluid and dispensing a second quantity of ink material substantially free of the carrier fluid. The plurality of printheads are positioned proximal to a substrate to simultaneously print a plurality of spatially-discrete and image-resolved pixels on the substrate.
摘要翻译：本公开总体上涉及一种用于从旋转源打印的方法和装置。在示例性实施例中，本公开涉及用于同时打印多个像素的刻面滚筒。所述多面体滚筒包括支撑结构和固定到所述支撑结构的多个打印头，每个打印头具有至少一个微孔结构，用于接收在载体流体中具有溶解或悬浮的薄膜材料的第一量的液体油墨并且分配第二量油墨基本上不含载体流体。多个打印头位于基板的近侧，以在基板上同时打印多个空间离散和图像分辨的像素。

2. 发明授权

US07711445B2 Systems and methods for transferring small lot size substrate carriers between processing tools 有权
标题翻译：在处理工具之间传送小批量衬底载体的系统和方法
公开(公告)号：US07711445B2
公开(公告)日：2010-05-04
申请号：US11555252
申请日：2006-10-31
申请人： Michael R. Rice , Eric A. Englhardt , Vinay Shah , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Vinay Shah , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens
IPC分类号： G06F19/00
CPC分类号： H01L21/67727 , H01L21/67276 , H01L21/67769 , H01L21/67778 , Y02P80/40 , Y02P90/86
摘要： In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种在小批量半导体器件制造设施内管理正在进行的工作的方法。第一种方法包括提供具有（1）多个处理工具的小批量半导体器件制造设备; 和（2）适于在处理工具之间运输小批量衬底载体的高速运输系统。该方法还包括：（1）增加小批量半导体器件制造设备内的低优先级衬底的平均周期时间，使小批量半导体器件制造设备内的预定工作保持在进行中; 和（2）减小小批量半导体器件制造设备内的高优先级衬底的平均周期时间，以便在小批量半导体器件制造设备内大致维持预定工作进行中的水平。提供了许多其他方面。

3. 发明授权

US07527141B2 System for transporting substrate carriers 有权
公开(公告)号：US07527141B2
公开(公告)日：2009-05-05
申请号：US11554876
申请日：2006-10-31
申请人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G29/00
CPC分类号： H01L21/67276 , H01L21/67769 , H01L21/67778
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

4. 发明授权

US07506752B2 Methods and apparatus for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的方法和装置
公开(公告)号：US07506752B2
公开(公告)日：2009-03-24
申请号：US11494904
申请日：2006-07-28
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
摘要翻译：根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。

5. 发明申请

US20090030547A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 有权
标题翻译：高速装载机校准运输系统
公开(公告)号：US20090030547A1
公开(公告)日：2009-01-29
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

6. 发明授权

US07299831B2 Substrate carrier having door latching and substrate clamping mechanisms 有权
标题翻译：基板载体具有门锁和基板夹紧机构
公开(公告)号：US07299831B2
公开(公告)日：2007-11-27
申请号：US11210199
申请日：2005-08-23
申请人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65B1/04
CPC分类号： H01L21/67353 , H01L21/67373 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种自动开门器，其包括：（1）适于支撑衬底载体的平台; （2）门打开机构，其适于在基板载体由平台支撑的同时打开基板载体的门; 和（3）隧道。隧道适于从洁净室壁中的开口延伸到平台并且至少部分地围绕平台。隧道还适于将来自洁净室壁的空气流引向平台并且离开隧道。提供了许多其他方面。

7. 发明授权

US06799939B2 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers 失效
标题翻译：用于处理和转移半导体晶片的多个独立的机器人组件和设备
公开(公告)号：US06799939B2
公开(公告)日：2004-10-05
申请号：US10378864
申请日：2003-03-05
申请人： Robert B. Lowrance , Howard Grunes
发明人： Robert B. Lowrance , Howard Grunes
IPC分类号： B66F1100
CPC分类号： H01L21/67742 , H01L21/68707 , H01L21/68742 , Y10S414/135
摘要： A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower robot assemblies adapted to handle multiple objects. The upper robot is stacked above the lower robot and the two robots are mounted concentrically to allow fast wafer transfer. Concentric drive mechanisms may also be provided for imparting rotary motion to either rotate the robot assembly or extend an extendable arm assembly into an adjacent chamber. Each robot can be either a single blade robot or a dual blade robot. Also provided is an apparatus for processing semiconductor wafers comprising a pre/post process transfer chamber housing multiple independent robot assemblies and surrounded by a plurality of pre-process chambers and post process chambers. Within each process, pre-process and post-process chamber is an apparatus for holding a plurality of stacked wafers. The apparatus includes a wafer lifting and storing apparatus exhibiting a plurality of vertically movable lift pins surrounding the chamber pedestal. The lift pins are configured to receive and hold a plurality of stacked wafers, preferably two, therein.
摘要翻译：提供了包括多个可独立操作的机器人组件的机器人组件，用于半导体晶片处理。机器人组件包括适于处理多个物体的独立的同轴上下机器人组件。上部机器人堆叠在下部机器人的上方，两个机器人同心安装以允许快速的晶片传送。也可以提供同心驱动机构用于赋予旋转运动以旋转机器人组件或将可伸展臂组件延伸到相邻的腔室中。每个机器人可以是单刀片机器人或双刀片机器人。还提供了一种用于处理半导体晶片的装置，其包括容纳多个独立机器人组件并被多个预处理室和后处理室包围的前/后处理转移室。在每个过程中，预处理室和后处理室是用于保持多个堆叠的晶片的装置。该装置包括晶片提升和存储装置，其显示围绕室底座的多个可垂直移动的提升销。提升销被配置为在其中接收和保持多个堆叠的晶片，优选地两个。

8. 发明授权

US6102164A Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers 失效
公开(公告)号：US6102164A
公开(公告)日：2000-08-15
申请号：US608237
申请日：1996-02-28
申请人： William McClintock , Robert B. Lowrance , Howard Grunes
发明人： William McClintock , Robert B. Lowrance , Howard Grunes
IPC分类号： B25J9/06 , B25J18/02 , B65G49/07 , H01L21/677 , H01L21/687 , B65G35/00
CPC分类号： H01L21/67742 , H01L21/68707 , H01L21/68742 , Y10S414/135
摘要： A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower robot assemblies adapted to handle multiple objects. The upper robot is stacked above the lower robot and the two robots are mounted concentrically to allow fast wafer transfer. Concentric drive mechanisms may also be provided for imparting rotary motion to either rotate the robot assembly or extend an extendable arm assembly into an adjacent chamber. Each robot can be either a single blade robot or a dual blade robot. Also provided is an apparatus for processing semiconductor wafers comprising a pre/post process transfer chamber housing multiple independent robot assemblies and surrounded by a plurality of pre-process chambers and post process chambers. Within each process, pre-process and post-process chamber is an apparatus for holding a plurality of stacked wafers. The apparatus includes a wafer lifting and storing apparatus exhibiting a plurality of vertically movable lift pins surrounding the chamber pedestal. The lift pins are configured to receive and hold a plurality of stacked wafers, preferably two, therein.

9. 发明授权

US06027574A Method of drying a substrate by lowering a fluid surface level 有权
标题翻译：通过降低流体表面水平来干燥基材的方法
公开(公告)号：US06027574A
公开(公告)日：2000-02-22
申请号：US216359
申请日：1998-12-18
申请人： Boris Fishkin , John S. Hearne , Robert B. Lowrance
发明人： Boris Fishkin , John S. Hearne , Robert B. Lowrance
IPC分类号： F26B5/00 , F26B9/06 , F26B21/00 , H01L21/00 , H01L21/304 , H01L21/687 , B08B3/04 , B08B5/00
CPC分类号： H01L21/68728 , H01L21/67034 , Y10S134/902
摘要： A method of removing liquid on a substrate, the method comprising the steps of placing the substrate in a fluid reservoir having a surface level, maintaining a partial pressure of vapor over the fluid surface level, lowering the fluid surface level of the reservoir while adding fluid, whereby the liquid flows off the substrate, and holding the substrate at different holding points, while lowering the fluid surface level so that the lowering surface level does not pass across a holding point that is being used to hold the substrate.
摘要翻译：一种在衬底上去除液体的方法，该方法包括以下步骤：将衬底放置在具有表面水平的流体储存器中，保持蒸气的分压超过流体表面水平，降低储存器的流体表面水平，同时加入流体从而液体流出基板，并且将基板保持在不同的保持点，同时降低流体表面水平，使得下降表面水平不通过用于保持基板的保持点。

10. 发明授权

US5656902A Two-axis magnetically coupled robot 失效
标题翻译：双轴磁耦合机器人
公开(公告)号：US5656902A
公开(公告)日：1997-08-12
申请号：US548945
申请日：1995-10-26
申请人： Robert B. Lowrance
发明人： Robert B. Lowrance
IPC分类号： B25J9/06 , B25J9/10 , B25J9/12 , B25J19/00 , B25J21/00 , F16D7/02 , F16H49/00 , H01L21/00 , H01L21/673 , H01L21/677 , G21K5/10 , B25J9/14
CPC分类号： H01L21/67742 , B25J21/005 , B25J9/107 , B25J9/126
摘要： A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the robot. In the preferred embodiment, these separate motions are radial and rotational.
摘要翻译：一种具有一对磁耦合器的机器人，每个磁耦合器将圆柱形第一腔室中的马达耦合到与所述第一腔室的圆柱形壁紧密间隔的相关联的圆柱形环。机器人包括将这些环中的每一个的旋转转换成机器人的单独运动的机构。在优选实施例中，这些分开的运动是径向的和旋转的。

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