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    • 7. 发明申请
    • SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURE
    • 半导体元件及其制造方法
    • US20080277694A1
    • 2008-11-13
    • US11746437
    • 2007-05-09
    • Zia HossainFrancine Y. RobbPrasad Venkatraman
    • Zia HossainFrancine Y. RobbPrasad Venkatraman
    • H01L27/095H01L21/44H01L29/76
    • H01L27/0629H01L21/28512H01L21/28518H01L21/28537H01L21/76855H01L21/76895H01L21/8249
    • A semiconductor component that includes a Schottky device, an edge termination structure, a non-Schottky semiconductor device, combinations thereof and a method of manufacturing the semiconductor component. A semiconductor material includes a first epitaxial layer disposed on a semiconductor substrate and a second epitaxial layer disposed on the first epitaxial layer. The second epitaxial layer has a higher resistivity than the semiconductor substrate. A Schottky device and a non-Schottky semiconductor device are manufactured from the second epitaxial layer. In accordance with another embodiment, a semiconductor material includes an epitaxial layer disposed over a semiconductor substrate. The epitaxial layer has a higher resistivity than the semiconductor substrate. A doped region is formed in the epitaxial layer. A Schottky device and a non-Schottky semiconductor device are manufactured from the epitaxial layer.
    • 一种包括肖特基器件,边缘端接结构,非肖特基半导体器件及其组合的半导体部件和制造半导体部件的方法。 半导体材料包括设置在半导体衬底上的第一外延层和设置在第一外延层上的第二外延层。 第二外延层具有比半导体衬底更高的电阻率。 由第二外延层制造肖特基器件和非肖特基半导体器件。 根据另一实施例,半导体材料包括设置在半导体衬底上的外延层。 外延层具有比半导体衬底更高的电阻率。 在外延层中形成掺杂区域。 由外延层制造肖特基器件和非肖特基半导体器件。