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    • 3. 发明授权
    • Planar gallium arsenide NPNP microwave switch
    • 平面砷化镓NPNP微波开关
    • US5086329A
    • 1992-02-04
    • US558540
    • 1990-07-27
    • Harvey S. Newman
    • Harvey S. Newman
    • H01L29/15H01P1/15
    • H01L29/157H01P1/15
    • A microwave switch is provided for controlling the transmission of microw energy in a microstrip transmission line structure. The microwave switch comprises an electrically conducting ground plane in contact with one side of an undoped semiconductor material having on its other side a superlattice of gallium arsenide consisting of a periodic sequence of p- and n-doped gallium arsenide layers. P- and n-type regions are formed integral with and electrically connected to the superlattice, and first and second microstrip transmission lines are electrically connected to respective ones of the n- and p-type regions.
    • 提供微波开关用于控制微带传输线结构中微波能量的传输。 微波开关包括与未掺杂半导体材料的一侧接触的导电接地平面,其另一侧具有由p型和n型掺杂砷化镓层的周期性序列组成的砷化镓超晶格。 P型和n型区与超晶格形成一体并电连接,并且第一和第二微带传输线与n型和p型区中的相应电极电连接。