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1. 发明申请

US20100148277A1 ISOLATED METAL PLUG PROCESS FOR USE IN FABRICATING CARBON NANOTUBE MEMORY CELLS 失效
标题翻译：用于制备碳纳米管存储器细胞的隔离金属压片方法
公开(公告)号：US20100148277A1
公开(公告)日：2010-06-17
申请号：US12710477
申请日：2010-02-23
申请人： Richard J. Carter , Peter A. Burke , Verne C. Hornback , Thomas Rueckes , Claude L. Bertin
发明人： Richard J. Carter , Peter A. Burke , Verne C. Hornback , Thomas Rueckes , Claude L. Bertin
IPC分类号： H01L27/112
CPC分类号： H01H1/0094 , Y10S977/724 , Y10S977/732 , Y10S977/943
摘要： The present invention is directed to structures and methods of fabricating electromechanical memory cells having nanotube crossbar elements. Such memory cells include a substrate having transistor with a contact that electrically contacts with the transistor. A first support layer is formed over the substrate with an opening that defines a lower chamber above the electrical contact. A nanotube crossbar element is arranged to span the lower chamber. A second support layer is formed with an opening that defines a top chamber above the lower chamber, the top chamber including an extension region that extends beyond an edge of the lower chamber to expose a portion of the top surface of the first support layer. A roof layer covers the top of the top chamber and includes an aperture that exposes a portion of the extension region of the top chamber and includes a plug that extends into the aperture in the roof layer to seal the top and bottom chambers. The memory cell further includes an electrode that overlies the crossbar element such that electrical signals can activate the electrode to attract or repel the crossbar element to set a memory state for the transistor.
摘要翻译：本发明涉及制造具有纳米管横杆元件的机电存储器单元的结构和方法。这种存储单元包括具有与晶体管电接触的接触的晶体管的衬底。第一支撑层形成在衬底上，其开口限定了电触点上方的下腔室。纳米管横杆元件布置成跨越下室。第二支撑层形成有开口，所述开口限定在所述下腔室上方的顶部腔室，所述顶部腔室包括延伸超出所述下部腔室的边缘以暴露所述第一支撑层的顶部表面的一部分的延伸区域。屋顶层覆盖顶部室的顶部，并且包括露出顶部室的延伸区域的一部分并且包括延伸到顶部层中的孔中以密封顶部和底部室的插塞的孔。存储单元还包括覆盖在横杆元件上的电极，使得电信号可以激活电极以吸引或排斥交叉开关元件以设置晶体管的存储状态。

2. 发明授权

US07884430B2 Isolated metal plug process for use in fabricating carbon nanotube memory cells 失效
标题翻译：用于制造碳纳米管记忆单元的隔离金属塞工艺
公开(公告)号：US07884430B2
公开(公告)日：2011-02-08
申请号：US12710477
申请日：2010-02-23
申请人： Richard J. Carter , Peter A. Burke , Verne C. Hornback , Thomas Rueckes , Claude L. Bertin
发明人： Richard J. Carter , Peter A. Burke , Verne C. Hornback , Thomas Rueckes , Claude L. Bertin
IPC分类号： H01L29/84
CPC分类号： H01H1/0094 , Y10S977/724 , Y10S977/732 , Y10S977/943
摘要： The present invention is directed to structures and methods of fabricating electromechanical memory cells having nanotube crossbar elements. Such memory cells include a substrate having transistor with a contact that electrically contacts with the transistor. A first support layer is formed over the substrate with an opening that defines a lower chamber above the electrical contact. A nanotube crossbar element is arranged to span the lower chamber. A second support layer is formed with an opening that defines a top chamber above the lower chamber, the top chamber including an extension region that extends beyond an edge of the lower chamber to expose a portion of the top surface of the first support layer. A roof layer covers the top of the top chamber and includes an aperture that exposes a portion of the extension region of the top chamber and includes a plug that extends into the aperture in the roof layer to seal the top and bottom chambers. The memory cell further includes an electrode that overlies the crossbar element such that electrical signals can activate the electrode to attract or repel the crossbar element to set a memory state for the transistor.
摘要翻译：本发明涉及制造具有纳米管横杆元件的机电存储器单元的结构和方法。这种存储单元包括具有与晶体管电接触的接触的晶体管的衬底。第一支撑层形成在衬底上，其开口限定了电触点上方的下腔室。纳米管横杆元件布置成跨越下室。第二支撑层形成有开口，所述开口限定在所述下腔室上方的顶部腔室，所述顶部腔室包括延伸超出所述下部腔室的边缘以暴露所述第一支撑层的顶部表面的一部分的延伸区域。屋顶层覆盖顶部室的顶部，并且包括露出顶部室的延伸区域的一部分并且包括延伸到顶部层中的孔中以密封顶部和底部室的插塞的孔。存储单元还包括覆盖在横杆元件上的电极，使得电信号可以激活电极以吸引或排斥交叉开关元件以设置晶体管的存储状态。

3. 发明授权

US07824946B1 Isolated metal plug process for use in fabricating carbon nanotube memory cells 有权
标题翻译：用于制造碳纳米管记忆单元的隔离金属塞工艺
公开(公告)号：US07824946B1
公开(公告)日：2010-11-02
申请号：US11429069
申请日：2006-05-05
申请人： Richard J. Carter , Peter A. Burke , Verne C. Hornback , Claude L. Bertin , Thomas Rueckes
发明人： Richard J. Carter , Peter A. Burke , Verne C. Hornback , Claude L. Bertin , Thomas Rueckes
IPC分类号： H01L21/00 , H01L21/64
CPC分类号： H01H1/0094 , Y10S977/724 , Y10S977/732 , Y10S977/943
摘要： The present invention is directed to structures and methods of fabricating electromechanical memory cells having nanotube crossbar elements. Such memory cells include a substrate having transistor with a contact that electrically contacts with the transistor. A first support layer is formed over the substrate with an opening that defines a lower chamber above the electrical contact. A nanotube crossbar element is arranged to span the lower chamber. A second support layer is formed with an opening that defines a top chamber above the lower chamber, the top chamber including an extension region that extends beyond an edge of the lower chamber to expose a portion of the top surface of the first support layer. A roof layer covers the top of the top chamber and includes an aperture that exposes a portion of the extension region of the top chamber and includes a plug that extends into the aperture in the roof layer to seal the top and bottom chambers. The memory cell further includes an electrode that overlies the crossbar element such that electrical signals can activate the electrode to attract or repel the crossbar element to set a memory state for the transistor.
摘要翻译：本发明涉及制造具有纳米管横杆元件的机电存储器单元的结构和方法。这种存储单元包括具有与晶体管电接触的接触的晶体管的衬底。第一支撑层形成在衬底上，其开口限定了电触点上方的下腔室。纳米管横杆元件布置成跨越下室。第二支撑层形成有开口，所述开口限定在所述下腔室上方的顶部腔室，所述顶部腔室包括延伸超出所述下部腔室的边缘以暴露所述第一支撑层的顶部表面的一部分的延伸区域。屋顶层覆盖顶部室的顶部，并且包括露出顶部室的延伸区域的一部分并且包括延伸到顶部层中的孔中以密封顶部和底部室的插塞的孔。存储单元还包括覆盖在横杆元件上的电极，使得电信号可以激活电极以吸引或排斥交叉开关元件以设置晶体管的存储状态。

4. 发明授权

US07928521B1 Non-tensioned carbon nanotube switch design and process for making same 有权
标题翻译：非张力碳纳米管开关的设计与制造过程
公开(公告)号：US07928521B1
公开(公告)日：2011-04-19
申请号：US11142725
申请日：2005-05-31
申请人： Peter A. Burke , Thomas Rueckes , Claude L. Bertin
发明人： Peter A. Burke , Thomas Rueckes , Claude L. Bertin
IPC分类号： H01L29/82
CPC分类号： H01H1/0094 , B82Y10/00 , H01H59/0009 , H01H2001/0042 , H01H2059/0045 , H01L51/0048 , H01L51/0591 , Y10S977/932
摘要： The invention comprises a carbon nanotube switch suitable for use in an integrated circuit structure and capable of being moved from a first position in a first plane in the switch to a second position in a second plane in the switch using approximately the same energy as required to move the switch from the second position back to the first position. The switch comprises a flexible carbon nanotube strip secured clamped at one end in a first plane in a switching chamber, and secured or clamped, at the opposite end of the carbon nanotube, in a second plane in the switching chamber, which is parallel to the first plane but spaced therefrom, to permit the central portion of the carbon nanotube strip to move in the chamber between a first position in the first plane and in electrical contact with one or more first electrodes and a second position in the second plane and in electrical contact with one or more second electrodes.
摘要翻译：本发明包括一种适用于集成电路结构的碳纳米管开关，其能够使用开关中的第一平面中的第一位置移动到开关中的第二平面中的第二位置，使用大约相同的能量将开关从第二个位置移回到第一个位置。开关包括柔性碳纳米管条，其固定在切换室中的第一平面中的一端处夹持，并且在碳纳米管的相对端处固定或夹紧在开关室中的平行于第二平面的第二平面中第一平面但与其间隔开，以允许碳纳米管条的中心部分在室中在第一平面中的第一位置和与一个或多个第一电极电连接并且在第二平面中的第二位置和电气与一个或多个第二电极接触。

5. 发明授权

US08631562B2 Methods of making nanotube switches 有权
标题翻译：制作纳米管开关的方法
公开(公告)号：US08631562B2
公开(公告)日：2014-01-21
申请号：US12953076
申请日：2010-11-23
申请人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
发明人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
IPC分类号： H01H11/00 , H01H65/00
CPC分类号： H01L23/62 , B82Y10/00 , G11C13/025 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/17 , H01H1/0094 , H01L23/60 , H01L27/0248 , H01L27/0251 , H01L51/0048 , H01L2224/16 , H01L2924/01019 , H01L2924/0102 , H01L2924/01025 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01079 , H01L2924/09701 , H01L2924/12044 , H01L2924/19103 , H01L2924/19104 , H01L2924/19105 , H01L2924/3011 , H05K1/0259 , Y10T29/49105 , Y10T29/49117 , Y10T29/49124 , Y10T29/49204
摘要： An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment.
摘要翻译：用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。开关耦合到保护电路和放电路径。纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。纳米管开关可以在芯片载体上。根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。

6. 发明授权

US08357559B2 Method of making sensor platform using a non-horizontally oriented nanotube element 有权
标题翻译：使用非水平取向的纳米管元件制造传感器平台的方法
公开(公告)号：US08357559B2
公开(公告)日：2013-01-22
申请号：US12469402
申请日：2009-05-20
申请人： Brent M. Segal , Thomas Rueckes , Bernhard Vogeli , Darren K. Brock , Venkatachalam C. Jaiprakash , Claude L. Bertin
发明人： Brent M. Segal , Thomas Rueckes , Bernhard Vogeli , Darren K. Brock , Venkatachalam C. Jaiprakash , Claude L. Bertin
IPC分类号： H01L21/00
CPC分类号： G01N27/4146 , B82Y15/00 , G11C13/025 , Y10S977/902 , Y10S977/904 , Y10S977/92 , Y10S977/921 , Y10S977/922 , Y10S977/924 , Y10T29/43 , Y10T29/49082
摘要： Sensor platforms and methods of making them are described. A platform having a non-horizontally oriented sensor element comprising one or more nanostructures such as nanotubes is described. Under certain embodiments, a sensor element has or is made to have an affinity for an analyte. Under certain embodiments, such a sensor element comprises one or more pristine nanotubes. Under certain embodiments, the sensor element comprises derivatized or functionalized nanotubes. Under certain embodiments, a sensor is made by providing a support structure; providing one or more nanotubes on the structure to provide material for a sensor element; and providing circuitry to electrically sense the sensor element's electrical characterization. Under certain embodiments, the sensor element comprises pre-derivatized or pre-functionalized nanotubes. Under other embodiments, sensor material is derivatized or functionalized after provision on the structure or after patterning. Under certain embodiments, a large-scale array of sensor platforms includes a plurality of sensor elements.
摘要翻译：介绍传感器平台及其制作方法。描述了具有包括一个或多个纳米结构如纳米管的非水平定向的传感器元件的平台。在某些实施方案中，传感器元件具有或被制成对分析物具有亲和性。在某些实施例中，这种传感器元件包括一个或多个原始纳米管。在某些实施方案中，传感器元件包括衍生的或功能化的纳米管。在某些实施例中，通过提供支撑结构来制造传感器; 在所述结构上提供一个或多个纳米管以提供用于传感器元件的材料; 以及提供用于电感测传感器元件电特性的电路。在某些实施方案中，传感器元件包括预衍生的或预功能化的纳米管。在其它实施例中，传感器材料在结构上提供之后或在图案化之后被衍生化或功能化。在某些实施例中，传感器平台的大规模阵列包括多个传感器元件。

7. 发明授权

US08125039B2 One-time programmable, non-volatile field effect devices and methods of making same 失效
标题翻译：一次性可编程，非易失性场效应器件及其制作方法
公开(公告)号：US08125039B2
公开(公告)日：2012-02-28
申请号：US11651177
申请日：2007-01-09
申请人： Claude L. Bertin , Thomas Rueckes , Brent M. Segal , Bernhard Vogeli , Darren K. Brock , Venkatachalam C. Jaiprakash
发明人： Claude L. Bertin , Thomas Rueckes , Brent M. Segal , Bernhard Vogeli , Darren K. Brock , Venkatachalam C. Jaiprakash
IPC分类号： H01L29/84
CPC分类号： H01L29/78 , B82Y10/00 , B82Y99/00 , G11C7/065 , G11C13/025 , G11C16/0416 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/16 , G11C2213/17 , G11C2213/79 , H01H1/0094 , H01L27/10 , H01L27/1052 , H01L27/112 , H01L27/11206 , H01L27/115 , H01L27/286 , H01L29/0665 , H01L29/0673 , H01L29/42324 , H01L51/0048 , H01L51/0052 , H01L51/0508 , Y10S977/708 , Y10S977/724 , Y10S977/742 , Y10S977/762 , Y10S977/936 , Y10S977/938 , Y10S977/94 , Y10S977/943
摘要： One-time programmable, non-volatile field effect devices and methods of making same. Under one embodiment, a one-time-programmable, non-volatile field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. Each of the source, drain, and gate has a corresponding terminal. An electromechanically-deflectable, nanotube switching element is electrically coupled to one of the source, drain and gate and has an electromechanically-deflectable nanotube element that is positioned to be deflectable in response to electrical stimulation to form a non-volatile closed electrical state between the one of the source, drain and gate and its corresponding terminal.
摘要翻译：一次性可编程，非易失性场效应器件及其制作方法。在一个实施例中，一次性可编程的非易失性场效应器件包括源极，漏极和栅极，源极和漏极之间具有场可调整通道。源极，漏极和栅极中的每一个具有相应的端子。电机械可偏转的纳米管开关元件电耦合到源极，漏极和栅极中的一个，并且具有可机电偏转的纳米管元件，其被定位成响应于电刺激而可偏转以在第二电极之间形成非易失性闭合电状态源，漏，门之一及其相应的终端。

8. 发明授权

US08102018B2 Nonvolatile resistive memories having scalable two-terminal nanotube switches 有权
标题翻译：具有可扩展的两端纳米管开关的非易失性电阻存储器
公开(公告)号：US08102018B2
公开(公告)日：2012-01-24
申请号：US11835612
申请日：2007-08-08
申请人： Claude L. Bertin , Thomas Rueckes , Jonathan W. Ward , Frank Guo , Steven L. Konsek , Mitchell Meinhold
发明人： Claude L. Bertin , Thomas Rueckes , Jonathan W. Ward , Frank Guo , Steven L. Konsek , Mitchell Meinhold
IPC分类号： G11C11/56 , G11C5/00 , H01L29/00
CPC分类号： B82Y10/00 , G11C11/56 , G11C13/003 , G11C13/025 , G11C19/00 , G11C29/86 , G11C2213/19 , G11C2213/75 , G11C2213/79 , H01L27/101 , H01L27/1052 , H01L27/112 , H01L27/11206
摘要： A non-volatile resistive memory is provided. The memory includes at least one non-volatile memory cell and selection circuitry. Each memory cell has a two-terminal nanotube switching device having and a nanotube fabric article disposed between and in electrical communication with two conductive terminals. Selection circuitry is operable to select the two-terminal nanotube switching device for read and write operations. Write control circuitry, responsive to a control signal, supplies write signals to a selected memory cell to induce a change in the resistance of the nanotube fabric article, the resistance corresponding to an informational state of the memory cell. Resistance sensing circuitry in communication with a selected nonvolatile memory cell, senses the resistance of the nanotube fabric article and provides the control signal to the write control circuitry. Read circuitry reads the corresponding informational state of the memory cell.
摘要翻译：提供了非易失性电阻性存储器。存储器包括至少一个非易失性存储单元和选择电路。每个存储单元具有两端纳米管切换装置，其具有设置在两个导电端子之间并与两个导电端子电连通的纳米管织物制品。选择电路可操作以选择用于读和写操作的两端纳米管切换装置。响应于控制信号的写控制电路向所选存储单元提供写入信号，以引起纳米管织物物品的电阻变化，该电阻对应于存储单元的信息状态。与所选择的非易失性存储器单元通信的电阻感测电路感测纳米管织物制品的电阻并将控制信号提供给写入控制电路。读取电路读取存储单元的相应信息状态。

9. 发明授权

US08013363B2 Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same 有权
标题翻译：非挥发性纳米管二极管和非易失性纳米管块及使用其的系统及其制造方法
公开(公告)号：US08013363B2
公开(公告)日：2011-09-06
申请号：US11835759
申请日：2007-08-08
申请人： Claude L. Bertin , Thomas Rueckes , X. M. Henry Huang , Ramesh Sivarajan , Eliodor G. Ghenciu , Steven L. Konsek , Mitchell Meinhold , Jonathan W. Ward , Darren K. Brock
发明人： Claude L. Bertin , Thomas Rueckes , X. M. Henry Huang , Ramesh Sivarajan , Eliodor G. Ghenciu , Steven L. Konsek , Mitchell Meinhold , Jonathan W. Ward , Darren K. Brock
IPC分类号： H01L27/10
CPC分类号： H01L27/1021 , B82Y10/00 , G11C13/025 , G11C2213/19 , H01L21/8221 , H01L23/5256 , H01L27/0688 , H01L27/1203 , H01L2924/0002 , H01L2924/00
摘要： Under one aspect, a nonvolatile nanotube diode includes: a substrate; a semiconductor element disposed over the substrate, the semiconductor element having an anode and a cathode and capable of forming an electrically conductive pathway between the anode and the cathode; a nanotube switching element disposed over the semiconductor element, the nanotube switching element including a conductive contact and a nanotube fabric element capable of a plurality of resistance states; and a conductive terminal disposed in spaced relation to the conductive contact, wherein the nanotube fabric element is interposed between and in electrical communication with the conductive contact and the conductive contact is in electrical communication with the cathode, and wherein in response to electrical stimuli applied to the anode and the conductive terminal, the nonvolatile nanotube diode is capable of forming an electrically conductive pathway between the anode and the conductive terminal.
摘要翻译：在一个方面，非易失性纳米管二极管包括：基板; 设置在所述衬底上的半导体元件，所述半导体元件具有阳极和阴极，并且能够在所述阳极和所述阴极之间形成导电通路; 设置在所述半导体元件上的纳米管开关元件，所述纳米管开关元件包括导电接触件和能够具有多个电阻状态的纳米管织物元件; 以及导电端子，其以导电接触件的间隔设置，其中所述纳米管织物元件置于所述导电接触件之间并与所述导电接触件电连通，并且所述导电接触件与所述阴极电连通，并且其中响应于施加到阳极和导电端子，非易失性纳米管二极管能够在阳极和导电端子之间形成导电通路。

10. 发明申请

US20110062993A1 NANOTUBE-BASED SWITCHING ELEMENTS AND LOGIC CIRCUITS 有权
标题翻译：基于NANOTUBE的开关元件和逻辑电路
公开(公告)号：US20110062993A1
公开(公告)日：2011-03-17
申请号：US12951896
申请日：2010-11-22
申请人： Claude L. Bertin , Thomas Rueckes , Brent M. Segal
发明人： Claude L. Bertin , Thomas Rueckes , Brent M. Segal
IPC分类号： H03K19/20 , B82Y15/00 , B82Y30/00
CPC分类号： H01L29/0665 , B82Y10/00 , G11C13/025 , G11C23/00 , G11C2213/16 , G11C2213/17 , H01H1/0094 , H01H1/027 , H01H2001/0005 , H01L27/28 , H01L29/0673 , H01L29/73 , H01L29/78 , H01L51/0048 , H01L51/0508 , Y10S977/762 , Y10S977/932 , Y10S977/94 , Y10T29/49002
摘要： Nanotube-based switching elements and logic circuits are disclosed. Under one embodiment of the invention, a Boolean logic circuit includes at least one input terminal and an output terminal, and a network of nanotube switching elements electrically disposed between said at least one input terminal and said output terminal. The network of nanotube switching elements effectuates a Boolean function transformation of Boolean signals on said at least one input terminal. The Boolean function transformation includes a Boolean inversion within the function, such as a NOT or NOR function.
摘要翻译：公开了基于纳米管的开关元件和逻辑电路。在本发明的一个实施例中，布尔逻辑电路包括至少一个输入端子和输出端子，以及电气设置在所述至少一个输入端子和所述输出端子之间的纳米管开关元件网络。纳米管切换元件的网络在所述至少一个输入端上实现布尔信号的布尔函数变换。布尔函数变换包括函数内的布尔反转，如NOT或NOR函数。

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