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    • 3. 发明申请
    • Tunable active inductor
    • 可调谐有源电感
    • US20060170523A1
    • 2006-08-03
    • US11141123
    • 2005-05-31
    • Rajarshi MukhopadhySebastien NuttinckSang-Hyun WooJong-Han KimSeong-Soo LeeChang-Ho LeeJoy Laskar
    • Rajarshi MukhopadhySebastien NuttinckSang-Hyun WooJong-Han KimSeong-Soo LeeChang-Ho LeeJoy Laskar
    • H03H11/00
    • H03H11/50H03H11/48
    • An active inductor capable of tuning a self-resonant frequency, an inductance, a Q factor, and a peak Q frequency by applying a tunable feedback resistor to a cascode-grounded active inductor is disclosed. The tunable active inductor includes a first transistor having a source connected to a power supply voltage and a gate connected to first bias voltage; a second transistor having a drain connected to a drain of the first transistor and a gate connected to a second bias voltage; a third transistor having a drain connected to a source of the second transistor and a source connected to a ground voltage; a fourth transistor having a drain connected to a gate of the third transistor, a source connected to the ground voltage and a gate connected to a third bias voltage; a fifth transistor having a source connected to the drain of the fourth transistor and a drain connected to the power supply voltage.
    • 公开了一种通过将可调谐反馈电阻器施加到共源共栅接地有源电感器来调谐自谐振频率,电感,Q因子和峰值Q频率的有源电感器。 可调谐有源电感器包括具有连接到电源电压的源极和连接到第一偏置电压的栅极的第一晶体管; 第二晶体管,具有连接到所述第一晶体管的漏极的漏极和连接到第二偏置电压的栅极; 具有连接到所述第二晶体管的源极的漏极和连接到接地电压的源极的第三晶体管; 具有连接到第三晶体管的栅极的漏极的第四晶体管,连接到接地电压的源极和连接到第三偏置电压的栅极; 第五晶体管,其源极连接到第四晶体管的漏极,漏极连接到电源电压。
    • 4. 发明授权
    • Tunable active inductor
    • 可调谐有源电感
    • US07253707B2
    • 2007-08-07
    • US11141123
    • 2005-05-31
    • Rajarshi MukhopadhySebastien NuttinckSang-Hyun WooJong-Han KimSeong-Soo LeeChang-Ho LeeJoy Laskar
    • Rajarshi MukhopadhySebastien NuttinckSang-Hyun WooJong-Han KimSeong-Soo LeeChang-Ho LeeJoy Laskar
    • H03H11/00H03H11/04
    • H03H11/50H03H11/48
    • An active inductor capable of tuning a self-resonant frequency, an inductance, a Q factor, and a peak Q frequency by applying a tunable feedback resistor to a cascode-grounded active inductor is disclosed. The tunable active inductor includes a first transistor having a source connected to a power supply voltage and a gate connected to first bias voltage; a second transistor having a drain connected to a drain of the first transistor and a gate connected to a second bias voltage; a third transistor having a drain connected to a source of the second transistor and a source connected to a ground voltage; a fourth transistor having a drain connected to a gate of the third transistor, a source connected to the ground voltage and a gate connected to a third bias voltage; a fifth transistor having a source connected to the drain of the fourth transistor and a drain connected to the power supply voltage.
    • 公开了一种通过将可调谐反馈电阻器施加到共源共栅接地有源电感器来调谐自谐振频率,电感,Q因子和峰值Q频率的有源电感器。 可调谐有源电感器包括具有连接到电源电压的源极和连接到第一偏置电压的栅极的第一晶体管; 第二晶体管,具有连接到所述第一晶体管的漏极的漏极和连接到第二偏置电压的栅极; 具有连接到所述第二晶体管的源极的漏极和连接到接地电压的源极的第三晶体管; 具有连接到第三晶体管的栅极的漏极的第四晶体管,连接到接地电压的源极和连接到第三偏置电压的栅极; 第五晶体管,其源极连接到第四晶体管的漏极,漏极连接到电源电压。
    • 5. 发明授权
    • Three-dimensional stacked-fin-MOS device with multiple gate regions
    • 具有多个栅极区域的三维堆叠鳍式MOS器件
    • US08093659B2
    • 2012-01-10
    • US12161709
    • 2007-01-22
    • Sebastien Nuttinck
    • Sebastien Nuttinck
    • H01L21/762H01L27/12
    • H01L29/7856B82Y10/00B82Y40/00H01L21/845H01L27/1211H01L29/0673H01L29/66439H01L29/66795H01L29/775
    • The invention provides a three-dimensional stacked fin metal oxide semiconductor (SF-MOS) device (10,30) comprising a protrusion or fin structure with a plurality of stacked semiconductor regions (3,5,12), in which a second semiconductor region (5,12) is separated from a first semiconductor region (3,5) by an isolation region (4,11). A gate isolation layer (8) extends at least over the sidewalls of the protrusion (7) and a gate electrode extends over the gate isolation layer (8). The gate electrode comprises a plurality of gate regions (13,14,15) wherein each gate region (13,14,15) extends over another semiconductor region (3,5,12). In this way each gate region (13,14,15) influences the conduction channel of another semiconductor region (3,5,12) and hence adds another degree of freedom with which the performance of the SF-MOS device (10,30) can be optimized. The invention further provides a method of manufacturing the SF-MOS device (10,30) according to the invention.
    • 本发明提供了一种三维堆叠鳍状金属氧化物半导体(SF-MOS)器件(10,30),其包括具有多个堆叠半导体区域(3,5,12)的突起或鳍状结构,其中第二半导体区域 (5,12)通过隔离区域(4,11)与第一半导体区域(3,5)分离。 栅极隔离层(8)至少在突起(7)的侧壁上延伸,并且栅电极在栅极隔离层(8)上延伸。 栅极电极包括多个栅极区域(13,14,15),其中每个栅极区域(13,14,15)在另一个半导体区域(3,5,12)上延伸。 以这种方式,每个栅极区域(13,14,15)影响另一个半导体区域(3,5,12)的导电沟道,因此增加了SF-MOS器件(10,30)的性能的另一自由度, 可以优化。 本发明还提供一种制造根据本发明的SF-MOS器件(10,30)的方法。
    • 6. 发明申请
    • METHOD OF MANUFACTURING A BIPOLAR TRANSISTOR
    • 制造双极晶体管的方法
    • US20100022056A1
    • 2010-01-28
    • US12439363
    • 2007-08-29
    • Johannes J. T. M. DonkersSebastien NuttinckGuillaume L. R. BoccardiFrancois Neuilly
    • Johannes J. T. M. DonkersSebastien NuttinckGuillaume L. R. BoccardiFrancois Neuilly
    • H01L21/331
    • H01L29/7378H01L29/407H01L29/66242
    • The invention provides for an alternative and less complex method of manufacturing a bipolar transistor comprising a field plate (17) in a trench (7) adjacent to a collector region (21), which field plate (17) employs a reduced surface field (Resurf) effect. The Resurf effect reshapes the electric field distribution in the collector region (21) such that for the same collector-base breakdown voltage the doping concentration of the collector region (21) can effectively be increased resulting in a reduced collector resistance and hence an increased bipolar transistor speed. The method comprises a step of forming a base window (6) in a first base layer (4) thereby exposing a top surface of the collector region (21) and a part of an isolation region (3). The trench (7) is formed by removing the exposed part of the isolation region (3), after which isolation layers (9,10) are formed on the surface of the trench (7). A second base layer (13) is formed on the isolation layer (10), thereby forming the field plate (17), on the top surface of the collector region (21), thereby forming a base region (31), and on a sidewall of the first base layer (4), thereby forming an electrical connection between the first base layer (4), the base region (31) and the field plate (17). An emitter region (41) is formed on a top part of the base region (31), thereby forming the Resurf bipolar transistor.
    • 本发明提供了制造双极晶体管的替代和较不复杂的方法,其包括在与集电极区域(21)相邻的沟槽(7)中的场板(17),该场板(17)采用减小的表面场(Resurf )效果。 Resurf效应重塑了集电极区域(21)中的电场分布,使得对于相同的集电极 - 基极击穿电压,可以有效地增加集电极区域(21)的掺杂浓度,从而降低集电极电阻,从而增加双极性 晶体管速度。 该方法包括在第一基层(4)中形成基窗(6)从而暴露集电区(21)的顶表面和隔离区(3)的一部分的步骤。 通过去除隔离区域(3)的露出部分形成沟槽(7),之后隔离层(9,10)形成在沟槽(7)的表面上。 在隔离层(10)上形成第二基层(13),从而在集电区域(21)的顶面上形成场板(17),从而形成基极区域(31) 从而在第一基底层(4),基底区域(31)和场板(17)之间形成电连接。 在基极区域(31)的顶部形成发射极区域(41),从而形成Resurf双极型晶体管。
    • 7. 发明申请
    • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE OBTAINED WITH SUCH A METHOD
    • 制造半导体器件的方法和采用这种方法获得的半导体器件
    • US20090159938A1
    • 2009-06-25
    • US12160210
    • 2007-01-04
    • Sebastien NuttinckGilberto CuratolaErwin HijzenPhilippe Meunier-Beillard
    • Sebastien NuttinckGilberto CuratolaErwin HijzenPhilippe Meunier-Beillard
    • H01L29/78H01L21/336
    • H01L29/0653H01L21/02381H01L21/02532H01L21/0262H01L29/66545H01L29/66628H01L29/66636H01L29/7834
    • The invention relates to a method of manufacturing a semiconductor device (10) comprising a field effect transistor, in which method a semiconductor body of silicon (12) with a substrate (11) is provided at a surface thereof with a source region (1) and a drain region (2) of a first conductivity type which are situated above a buried isolation region (3,4) and with a channel region (5), between the source and drain regions (1,2), of a second conductivity type, opposite to the first conductivity type, and with a gate region (6) separated from the surface of the semiconductor body (12) by a gate dielectric (7) and situated above the channel region (5), and wherein a mesa (M) is formed in the semiconductor body (12) in which the channel region (5) is formed and wherein the source and drain regions (1,2) are formed on both sides of the mesa (M) in a semiconductor region (8) that is formed using epitaxial growth, the source and drain regions (1,2) thereby contacting the channel region (5). According to the invention the semiconductor region (8) is formed contacting the mesa (M) over substantially the whole thickness of the semiconductor region (8) and is formed below the level of the gate dielectric (7). This method is more versatile and the device (10) obtained thus has an improved high-frequency behavior.
    • 本发明涉及一种制造半导体器件(10)的方法,该半导体器件(10)包括场效应晶体管,其中在其表面上设置有源极区(1)的具有衬底(11)的硅(12)的半导体本体, 和位于源极和漏极区域(1,2)之间的第一导电类型的漏极区域(2),其位于掩埋隔离区域(3,4)和沟道区域(5)之上,具有第二导电性 类型,与第一导电类型相反,并且具有通过栅极电介质(7)与半导体本体(12)的表面分离并位于沟道区(5)上方的栅极区(6),并且其中台面 M)形成在其中形成沟道区(5)的半导体本体(12)中,并且在半导体区域(8)中在栅极(M)的两侧形成源区和漏区(1,2) ),源极和漏极区域(1,2)由此与沟道区域(5)接触。 根据本发明,半导体区域(8)形成在半导体区域(8)的基本上整个厚度上与台面(M)接触并形成在栅极电介质(7)的下方。 该方法更通用,因此所获得的装置(10)具有改进的高频行为。
    • 8. 发明授权
    • Method of manufacturing a bipolar transistor
    • 制造双极晶体管的方法
    • US08026146B2
    • 2011-09-27
    • US12439363
    • 2007-08-29
    • Johannes J. T. M. DonkersSebastien NuttinckGuillaume L. R. BoccardiFrancois Neuilly
    • Johannes J. T. M. DonkersSebastien NuttinckGuillaume L. R. BoccardiFrancois Neuilly
    • H01L21/8222
    • H01L29/7378H01L29/407H01L29/66242
    • The invention provides for an alternative and less complex method of manufacturing a bipolar transistor comprising a field plate (17) in a trench (7) adjacent to a collector region (21), which field plate (17) employs a reduced surface field (Resurf) effect. The Resurf effect reshapes the electric field distribution in the collector region (21) such that for the same collector-base breakdown voltage the doping concentration of the collector region (21) can effectively be increased resulting in a reduced collector resistance and hence an increased bipolar transistor speed. The method comprises a step of forming a base window (6) in a first base layer (4) thereby exposing a top surface of the collector region (21) and a part of an isolation region (3). The trench (7) is formed by removing the exposed part of the isolation region (3), after which isolation layers (9,10) are formed on the surface of the trench (7). A second base layer (13) is formed on the isolation layer (10), thereby forming the field plate (17), on the top surface of the collector region (21), thereby forming a base region (31), and on a sidewall of the first base layer (4), thereby forming an electrical connection between the first base layer (4), the base region (31) and the field plate (17). An emitter region (41) is formed on a top part of the base region (31), thereby forming the Resurf bipolar transistor.
    • 本发明提供了制造双极晶体管的替代和较不复杂的方法,其包括在与集电极区域(21)相邻的沟槽(7)中的场板(17),该场板(17)采用减小的表面场(Resurf )效果。 Resurf效应重塑了集电极区域(21)中的电场分布,使得对于相同的集电极 - 基极击穿电压,可以有效地增加集电极区域(21)的掺杂浓度,从而降低集电极电阻,从而增加双极性 晶体管速度。 该方法包括在第一基层(4)中形成基窗(6)从而暴露集电区(21)的顶表面和隔离区(3)的一部分的步骤。 通过去除隔离区域(3)的露出部分形成沟槽(7),之后隔离层(9,10)形成在沟槽(7)的表面上。 在隔离层(10)上形成第二基层(13),从而在集电区域(21)的顶面上形成场板(17),从而形成基极区域(31) 从而在第一基底层(4),基底区域(31)和场板(17)之间形成电连接。 在基极区域(31)的顶部形成发射极区域(41),从而形成Resurf双极型晶体管。