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    • 1. 发明授权
    • Method and composition for continuous electroless copper deposition
using a hypophosphite reducing agent in the presence of cobalt or
nickel ions
    • 在钴或镍离子存在下使用次亚磷酸盐还原剂进行连续化学镀铜沉积的方法和组成
    • US4265943A
    • 1981-05-05
    • US964128
    • 1978-11-27
    • Rachel GoldsteinPeter E. KukanskisJohn J. Grunwald
    • Rachel GoldsteinPeter E. KukanskisJohn J. Grunwald
    • C23C18/40C23C18/48C23C3/02
    • C23C18/40
    • Electroless copper deposition solutions, and method of continuously electrolessly depositing copper onto a workpiece using these solutions, are disclosed. The solutions contain, in addition to water as the usual solvent, a soluble source of copper ions, a complexing agent or mixture of agents to maintain the copper in solution, a non-formaldehyde copper reducing agent, such as hypophosphite, effective to reduce the copper ions to metallic copper as a deposit or plating on a prepared surface of a workpiece brought into contact with the solution, and a soluble source of non-copper metallic ions, such as nickel or cobalt ions, which act as an autocatalysis promoter to enable continuous plating using the solutions. The solutions are maintained in an alkaline condition and preferably in a pH range of 11-14 through the addition of pH adjusters. The properties of plating baths using the solutions, such as bath stability as well as plating process parameters such as plating rate, and the quality of deposit may be advantageously controlled through the appropriate selection of the non-copper metallic ion added and the complexing agent used. Optional additives, such as polymers, wetting agents, and various soluble unsaturated organic compounds, may also be utilized to influence these variables.
    • 公开了无电镀铜沉积溶液以及使用这些溶液将铜连续无电沉积到工件上的方法。 该溶液除了作为常规溶剂的水外,还含有一种可溶的铜离子源,一种络合剂或者在溶液中保持铜的试剂混合物,一种非甲醛铜还原剂,如次磷酸盐,有效减少 铜离子作为金属铜沉积或镀在与溶液接触的工件的制备表面上,以及作为自催化促进剂的非铜金属离子的可溶性源,例如镍或钴离子,使得能够 使用溶液进行连续电镀。 通过添加pH调节剂将溶液保持在碱性条件下,优选在11-14的pH范围内。 使用溶液的电镀浴的性质,例如浴稳定性以及电镀工艺参数如电镀速率和沉积质量可以有利地通过适当选择加入的非铜金属离子和使用的络合剂来进行控制 。 还可以使用任选的添加剂,例如聚合物,润湿剂和各种可溶性不饱和有机化合物来影响这些变量。
    • 3. 发明授权
    • Electroless copper composition solution using a hypophosphite reducing
agent
    • 使用次磷酸还原剂的无电铜组合物溶液
    • US4209331A
    • 1980-06-24
    • US909209
    • 1978-05-25
    • Peter E. KukanskisJohn J. GrunwaldDonald R. FerrierDavid A. Sawoska
    • Peter E. KukanskisJohn J. GrunwaldDonald R. FerrierDavid A. Sawoska
    • C23C18/40H05K3/18C23C3/02
    • C23C18/40
    • Electroless copper deposition solutions, and method of electrolessly depositing copper onto a workpiece using these solutions, are disclosed. The solutions contain, in addition to water as the usual solvent, a soluble source of copper ions, a complexing agent or mixture of agents to maintain the copper in solution, and a copper reducing agent effective to reduce the copper ions to metallic copper as a deposit or plating on a prepared surface of a workpiece brought into contact with the solution. The invention comprehends replacing the usual formaldehyde-type reducing agents of commercial electroless copper baths with non-formaldehyde-type agents, specifically hypophosphites, by coordinating the particular complexing agents employed and the bath pH, to effect reduction of cupric ions to a metallic copper plating on a prepared surface of a substrate, wherein the resulting electroless metal deposit has conductive properties at least satisfactory for build-up of additional thickness of metal by standard electroplating techniques. Improvement over the prior formaldehyde-reduced electroless copper solutions is obtained in that the invention teaches those skilled in the art how to achieve satisfactory copper deposition over longer periods of bath operation than has been practical heretofore. Fluctuations in component concentration and bath temperatures are inherent and unavoidable in the course of commercial use of the bath and these are normally detrimental to protracted use of formaldehyde-reduced copper solutions. In the present invention, bath stability is maintained better, in spite of these inherent fluctuations.
    • 公开了无电镀铜沉积溶液以及使用这些溶液将铜无机沉积在工件上的方法。 该溶液除了作为常规溶剂的水外还含有一种可溶的铜离子源,一种络合剂或将溶液中的铜保持在一起的试剂混合物,以及一种有效地将铜离子还原为金属铜的铜还原剂,作为 在与溶液接触的工件的制备表面上沉积或电镀。 本发明通过配合所用的特定络合剂和浴的pH来理解用非甲醛型试剂,特别是次磷酸盐代替通常的商业无电解铜浴的甲醛型还原剂,以将铜离子还原成金属镀铜 在基底的制备表面上,其中所得到的无电金属沉积物具有至少令人满意的导电性能,以通过标准电镀技术积累额外的金属厚度。 获得了现有的甲醛还原的无电解铜溶液的改进,因为本发明教导了本领域技术人员如何在较长时间的浴操作中实现比迄今为止实际的更好的铜沉积。 组分浓度和浴温度的波动在浴的商业使用过程中是固有的和不可避免的,并且这些通常不利于延长使用降低甲醛的铜溶液。 在本发明中,尽管存在这些固有的波动,浴的稳定性仍然更好。
    • 4. 发明授权
    • Electroless copper deposition solution using a hypophosphite reducing
agent
    • 使用次磷酸还原剂的无电镀铜沉积溶液
    • US4279948A
    • 1981-07-21
    • US69742
    • 1979-08-27
    • Peter E. KukanskisJohn J. GrunwaldDonald R. FerrierDavid A. Sawoska
    • Peter E. KukanskisJohn J. GrunwaldDonald R. FerrierDavid A. Sawoska
    • C23C18/40C23C3/02
    • C23C18/40
    • Electroless copper deposition solutions, and method of electrolessly depositing copper onto a workpiece using these solutions, are disclosed. The solutions contain, in addition to water as the usual solvent, a soluble source of copper ions, a complexing agent or mixture of agents to maintain the copper in solution, and a copper reducing agent effective to reduce the copper ions to metallic copper as a deposit or plating on a prepared surface of a workpiece brought into contact with the solution. The invention comprehends replacing the usual formaldehyde-type reducing agents of commercial electroless copper baths with inorganic non-formaldehyde-type agents, for example hypophosphites, by coordinating the particular complexing agents employed and the bath pH, to effect reduction of cupric ions to a metallic copper plating on a prepared surface of a substrate, wherein the resulting electroless metal deposit has conductive properties at least satisfactory for build-up of additional thickness of metal by standard electroplating techniques. Improvement over the prior formaldehyde-reduced electroless copper solutions is obtained in that the invention teaches those skilled in the art how to achieve satisfactory copper deposition over longer periods of bath operation than has been practical heretofore. Fluctuations in component concentration and bath temperatures are inherent and unavoidable in the course of commercial use of the bath and these are normally detrimental to protracted use of formaldehyde-reduced copper solutions. In the present invention, bath stability is maintained better, in spite of these inherent fluctuations.
    • 公开了无电镀铜沉积溶液以及使用这些溶液将铜无机沉积在工件上的方法。 该溶液除了作为常规溶剂的水外还含有一种可溶的铜离子源,一种络合剂或将溶液中的铜保持在一起的试剂混合物,以及一种有效地将铜离子还原为金属铜的铜还原剂,作为 在与溶液接触的工件的制备表面上沉积或电镀。 本发明通过配合所用的特定络合剂和浴的pH来理解用无机非甲醛型试剂(例如次磷酸盐)代替通常的商业无电解铜浴的甲醛型还原剂,以将铜离子还原成金属 在基材的制备表面上的镀铜,其中所得到的无电金属沉积物具有至少令人满意的导电性能,以通过标准电镀技术积累额外的金属厚度。 获得了现有的甲醛还原的无电解铜溶液的改进,因为本发明教导了本领域技术人员如何在较长时间的浴操作中实现比迄今为止实际的更好的铜沉积。 组分浓度和浴温度的波动在浴的商业使用过程中是固有的和不可避免的,并且这些通常不利于延长使用降低甲醛的铜溶液。 在本发明中,尽管存在这些固有的波动,浴的稳定性仍然更好。