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    • 5. 发明申请
    • FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS
    • 半导体真空处理装置的薄膜粘合剂
    • WO2009078923A2
    • 2009-06-25
    • PCT/US2008/013466
    • 2008-12-18
    • LAM RESEARCH CORPORATIONLARSON, Dean JaySTEVENSON, TomWANG, Victor
    • LARSON, Dean JaySTEVENSON, TomWANG, Victor
    • H01L21/67069B32B37/12H01L21/67103H01L21/68757Y10T156/10Y10T156/1062Y10T428/31504
    • A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stresses. The elastomeric sheet comprises a silicone adhesive to withstand a high shear strain of =800% at a temperature range between room temperature and 300°C such as heat curable high molecular weight dimethyl silicone with optional fillers. The sheet form has bond thickness control for parallelism of bonded surfaces. The sheet adhesive may be cut into pre-form shapes to conform to regularly or irregularly shaped features, maximize surface contact area with mating parts, and can be installed into cavities. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar.
    • 提供了一种减少诸如等离子体处理设备的半导体真空室中的粒子污染的结合组件,其包括在部件和支撑构件的配合表面之间的弹性体片粘合剂结合以适应热应力。 该弹性体片材包含有机硅粘合剂以在室温和300℃之间的温度范围内承受800%的高剪切应变,例如具有任选填料的可热固化高分子量二甲基硅氧烷。 片材形式具有粘合厚度控制,用于粘合表面的平行度。 可以将片状粘合剂切割成预成型形状以符合规则或不规则形状的特征,使与配合部件的表面接触面积最大化,并且可以将其安装到腔体中。 可以手动安装,也可以使用安装工具手动安装,也可以使用自动化机械。 具有不同物理特性的片状粘合剂复合层可以层压或共面。