专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO1997048183A1 METHOD AND APPARATUS FOR MATCHING A VARIABLE LOAD IMPEDANCE WITH AN RF POWER GENERATOR IMPEDANCE 审中-公开
标题翻译：用于匹配具有RF发电机阻抗的可变负载阻抗的方法和装置
公开(公告)号：WO1997048183A1
公开(公告)日：1997-12-18
申请号：PCT/US1997010291
申请日：1997-06-11
申请人： RF POWER PRODUCTS, INC.
发明人： RF POWER PRODUCTS, INC. , MAVRETIC, Anton , CISZEK, Andrew , STACH, Joseph
IPC分类号： H03H07/40
CPC分类号： H03H7/40
摘要： A method and apparatus for matching the variable impedance of a load with the fixed impedance of a radio frequency (RF) power generator to provide maximum power transfer. The impedance matching network further allows an RF power generator to vary the frequency of the voltage applied to a load, e.g., a plasma chamber as may be utilized in semi-conductor or flat panel plasma display manufacturing processes. The impedance matching network further utilizes fixed solid state components to adjust the impedance of the attached load to provide maximum power transfer between the generator and the load. A parallel switched capacitor network is controlled by an electrical switching means such as PIN diodes to turn fixed capacitors on or off. A means for varying the frequency of the applied voltage is used to match the impedance of the load with the impedance of the RF power generator within milliseconds.
摘要翻译：一种用于将负载的可变阻抗与射频（RF）发电机的固定阻抗匹配以提供最大功率传输的方法和装置。阻抗匹配网络还允许RF功率发生器改变施加到诸如半导体或平板等离子体显示器制造工艺中的负载（例如等离子体室）的电压的频率。阻抗匹配网络进一步利用固定固态分量来调节所连接负载的阻抗，从而在发电机和负载之间提供最大功率传输。并联开关电容网络由诸如PIN二极管之类的电开关装置来控制以打开或关闭固定电容器。用于改变施加电压的频率的手段用于将负载的阻抗与毫微秒内的RF发生器的阻抗相匹配。

2. 发明公开

EP0904634A1 METHOD AND APPARATUS FOR MATCHING A VARIABLE LOAD IMPEDANCE WITH AN RF POWER GENERATOR IMPEDANCE 失效
标题翻译：方法和装置可变负载阻抗与RF发生器阻抗调整
公开(公告)号：EP0904634A1
公开(公告)日：1999-03-31
申请号：EP97931168.0
申请日：1997-06-11
申请人： RF Power Products, Inc.
发明人： MAVRETIC, Anton , CISZEK, Andrew , STACH, Joseph
IPC分类号： H03H7
CPC分类号： H03H7/40
摘要： A method and apparatus for matching the variable impedance of a load with the fixed impedance of a radio frequency (RF) power generator to provide maximum power transfer. The impedance matching network further allows an RF power generator to vary the frequency of the voltage applied to a load, e.g., a plasma chamber as may be utilized in semi-conductor or flat panel plasma display manufacturing processes. The impedance matching network further utilizes fixed solid state components to adjust the impedance of the attached load to provide maximum power transfer between the generator and the load. A parallel switched capacitor network is controlled by an electrical switching means such as PIN diodes to turn fixed capacitors on or off. A means for varying the frequency of the applied voltage is used to match the impedance of the load with the impedance of the RF power generator within milliseconds.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式