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1. 发明授权

US06647993B2 Surface-treated shower head for use in a substrate processing chamber 失效
标题翻译：用于基板处理室的表面处理淋浴喷头
公开(公告)号：US06647993B2
公开(公告)日：2003-11-18
申请号：US09740596
申请日：2000-12-19
申请人： Quanyuan Shang , Sheng Sun , Kam S. Law , Emanuel Beer
发明人： Quanyuan Shang , Sheng Sun , Kam S. Law , Emanuel Beer
IPC分类号： B08B704
CPC分类号： C23C16/45565 , C23C16/4404 , C23C16/4405 , G03F7/70925 , H01J37/32357 , H01J37/3244 , H01J37/32522 , H01J2237/3325 , H01J2237/334 , Y10S438/905
摘要： A substrate processing system includes a processing chamber and a plasma source located external to the chamber. A conduit connects the plasma source to an interior region of the chamber to provide a reactive species to the chamber interior for cleaning interior surfaces of the chamber. A shower head, disposed between the plasma source and an interior region of the chamber, can serve as an electrode and also can serve as a gas distribution mechanism. The shower head includes a surface treatment, such as a non-anodized aluminum outer layer, an electro-polished surface of bare aluminum, or a fluorine-based protective outer layer. The surface-treated shower head improves the rate of removal of materials deposited on the interior surfaces of the chamber during cleaning, reduces contamination of substrates during processing, and provides more efficient use of the power source used for heating the substrate during processing.
摘要翻译：衬底处理系统包括位于腔室外部的处理室和等离子体源。导管将等离子体源连接到腔室的内部区域，以向腔室内部提供反应物质以清洁腔室的内表面。设置在等离子体源和室的内部区域之间的喷头可以用作电极，并且还可以用作气体分配机构。淋浴头包括表面处理，例如非阳极氧化的铝外层，裸铝的电抛光表面或氟基保护外层。表面处理的花洒头在清洁过程中提高了沉积在室内表面上的材料的去除速度，减少了处理过程中衬底的污染，并且在加工过程中提供了用于加热衬底的电源的更有效的使用。

2. 发明授权

US06182603B2 Surface-treated shower head for use in a substrate processing chamber 失效
公开(公告)号：US06182603B2
公开(公告)日：2001-02-06
申请号：US09115111
申请日：1998-07-13
申请人： Quanyuan Shang , Sheng Sun , Kam S. Law , Emanuel Beer
发明人： Quanyuan Shang , Sheng Sun , Kam S. Law , Emanuel Beer
IPC分类号： C23C1600
CPC分类号： C23C16/45565 , C23C16/4404 , C23C16/4405 , G03F7/70925 , H01J37/32357 , H01J37/3244 , H01J37/32522 , H01J2237/3325 , H01J2237/334 , Y10S438/905
摘要： A substrate processing system includes a processing chamber and a plasma source located external to the chamber. A conduit connects the plasma source to an interior region of the chamber to provide a reactive species to the chamber interior for cleaning interior surfaces of the chamber. A shower head, disposed between the plasma source and an interior region of the chamber, can serve as an electrode and also can serve as a gas distribution mechanism. The shower head includes a surface treatment, such as a non-anodized aluminum outer layer, an electro-polished surface of bare aluminum, or a fluorine-based protective outer layer. The surface-treated shower head improves the rate of removal of materials deposited on the interior surfaces of the chamber during cleaning, reduces contamination of substrates during processing, and provides more efficient use of the power source used for heating the substrate during processing.

3. 发明申请

US20050255253A1 Apparatus and methods for curing ink on a substrate using an electron beam 审中-公开
标题翻译：使用电子束在基板上固化油墨的装置和方法
公开(公告)号：US20050255253A1
公开(公告)日：2005-11-17
申请号：US11061121
申请日：2005-02-18
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
IPC分类号： B05D1/00 , B05D3/04 , B05D3/06 , B41J2/01 , B41J11/00 , B41M7/00 , C08F2/46
CPC分类号： B41J11/0015 , B05D3/0486 , B05D3/068 , B41M7/0072 , B41M7/0081
摘要： In a first aspect, a method of curing ink on a substrate is provided. The method includes the steps of (1) placing a substrate on a support stage of an ink curing chamber; and (2) scanning an electron beam over a surface of the substrate within the ink curing chamber so as to cure ink present on the substrate. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种在基板上固化油墨的方法。该方法包括以下步骤：（1）将基板放置在油墨固化室的支撑台上; 和（2）在油墨固化室内的基板的表面上扫描电子束，以固化存在于基板上的油墨。提供了许多其他方面。

4. 发明申请

US20070070099A1 METHODS AND APPARATUS FOR INKJET PRINTING ON NON-PLANAR SUBSTRATES 审中-公开
标题翻译：用于印刷非平板基板的方法和装置
公开(公告)号：US20070070099A1
公开(公告)日：2007-03-29
申请号：US11536533
申请日：2006-09-28
申请人： Emanuel Beer , Chang Lin , Shinichi Kurita , Quanyuan Shang , Benjamin Johnston
发明人： Emanuel Beer , Chang Lin , Shinichi Kurita , Quanyuan Shang , Benjamin Johnston
IPC分类号： B41J25/308
CPC分类号： B41J2/0456 , B41J2/0458 , B41J2/04588 , B41J3/28 , B41J3/4073 , B41J11/0035 , B41J25/308 , G02F1/1303 , G02F1/133516
摘要： A sensor apparatus for an inkjet printing device is provided. The sensor apparatus may include 1) at least one print head adapted to deposit ink on a top surface of a substrate, wherein the substrate is in motion relative to the print head, 2) at least one sensor adapted to detect the distance of the at least one sensor from the top surface of the substrate, and 3) a controller adapted to determine the substrate to nozzle distance based on the distance of the sensor to the top surface of the substrate, and adjust the trajectory of the ink being deposited on the substrate based on the substrate to nozzle distance. Numerous other aspects are provided.
摘要翻译：提供了一种用于喷墨打印装置的传感器装置。所述传感器装置可以包括：1）适于将墨水沉积在基底的顶表面上的至少一个打印头，其中所述基底相对于所述打印头运动; 2）至少一个传感器，适于检测所述at 至少一个传感器，以及3）控制器，其适于基于所述传感器与所述基板顶表面的距离来确定所述基板与喷嘴的距离，并且调整沉积在所述基板上的所述油墨的轨迹基板基于基板与喷嘴的距离。提供了许多其他方面。

5. 发明申请

US20080291228A1 METHODS AND APPARATUS FOR INKJET PRINTING WITH MULTIPLE ROWS OF PRINT HEADS 审中-公开
标题翻译：用于打印头多个打印头的方法和装置
公开(公告)号：US20080291228A1
公开(公告)日：2008-11-27
申请号：US11751231
申请日：2007-05-21
申请人： JOHN M. WHITE , Fan-Cheung Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
发明人： JOHN M. WHITE , Fan-Cheung Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
IPC分类号： B41J29/38 , B41J2/145
CPC分类号： B41J2/145 , B41J2/515 , B41J25/003 , B41J2202/09 , H01L51/0005
摘要： According to the present invention, multiple rows of nozzles within a print head may be arranged proximal to and offset from each other to facilitate inkjet printing. Print heads may comprise a single row of nozzles or may comprise a plurality of rows of nozzles. Each row of nozzles may be situated such that the immediately adjacent row of nozzles may be offset by a predetermined distance. In some embodiments, adjacent rows of nozzles may each print with the same color. In this way, adjacent offset rows of nozzles may be used in combination to dispense ink drops into sub-pixel wells in improved patterns and with improved ink distribution within the sub-pixel well. These offset print techniques may also enable tighter grouping of ink drops within a sub-pixel well and enable faster printing operations.
摘要翻译：根据本发明，打印头内的多排喷嘴可以布置成彼此靠近并且彼此偏离，以便于喷墨打印。打印头可以包括单排喷嘴，或者可以包括多排喷嘴。每排喷嘴可以被定位成使得紧邻的喷嘴排可以偏移预定距离。在一些实施例中，相邻排的喷嘴可以以相同的颜色打印。以这种方式，相邻的喷嘴排可以组合使用，以将墨滴以改进的图案分配到子像素阱中，并且改进子像素阱内的油墨分布。这些偏移打印技术还可以使得子像素内的墨滴更紧密地分组并且能够实现更快的打印操作。

6. 发明申请

US20060092436A1 Methods and apparatus for inkjet printing of color filters for displays 审中-公开
标题翻译：用于显示器的彩色滤光片的喷墨打印的方法和装置
公开(公告)号：US20060092436A1
公开(公告)日：2006-05-04
申请号：US11061148
申请日：2005-02-18
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
IPC分类号： G06K15/02
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： Methods and apparatus are provided wherein data representative of an image is received, the data being indicative of a plurality of theoretical ink jetting drop positions. The data may be converted into an image data file, the image data file being indicative of a plurality of actual physical ink jetting drop positions, each physical ink jetting drop position corresponding to a theoretical ink jetting drop position. A print system may be controlled based on the image data file, wherein the actual physical ink jetting drop positions may each be selected based upon being within a predefined percentage of a print resolution in a printing direction of a corresponding one of the theoretical ink jetting drop positions.
摘要翻译：提供了方法和装置，其中接收到表示图像的数据，该数据表示多个理论喷墨滴落位置。数据可以被转换为图像数据文件，图像数据文件指示多个实际物理喷墨滴落位置，每个物理喷墨滴下位置对应于理论喷墨滴落位置。可以基于图像数据文件来控制打印系统，其中可以基于理论喷墨滴的相应一个的打印方向上的打印分辨率的预定百分比内的每一个来选择实际物理喷墨落下位置职位

7. 发明授权

US07847566B2 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US07847566B2
公开(公告)日：2010-12-07
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译：描述了一种在基板上测试电子器件的方法。该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

8. 发明申请

US20090122099A1 METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING 审中-公开
标题翻译：用于校准喷墨定位的方法和系统
公开(公告)号：US20090122099A1
公开(公告)日：2009-05-14
申请号：US12354759
申请日：2009-01-15
申请人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
发明人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
IPC分类号： B41J29/393
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供了用于喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

9. 发明申请

US20090090883A1 CHAMBER ISOLATION VALVE RF GROUNDING 有权
标题翻译：室隔离阀射频接地
公开(公告)号：US20090090883A1
公开(公告)日：2009-04-09
申请号：US12333043
申请日：2008-12-11
申请人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
发明人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
IPC分类号： F16K25/00
CPC分类号： F16K3/0227 , F16K51/02 , H01J37/32844 , H01J2237/166 , H01L21/67126 , Y02C20/30 , Y02P70/605 , Y10S277/919 , Y10S277/92 , Y10T137/8242
摘要： Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.
摘要翻译：本文描述的实施例提供了用于使腔室隔离阀接地的方法和装置。在一个实施例中，描述了用于等离子体处理系统的接地室隔离阀。室隔离阀包括门和可移动地附接到门并与其相对的支撑构件，以及至少一个与门电连通的导电构件，所述至少一个导电构件包括设置在支撑上的一个或多个反应缓冲器当门处于关闭位置时，适于接触等离子体处理系统的至少一个接地部件的构件。

10. 发明授权

US07330021B2 Integrated substrate transfer module 有权
标题翻译：集成基板传输模块
公开(公告)号：US07330021B2
公开(公告)日：2008-02-12
申请号：US11018236
申请日：2004-12-21
申请人： Shinichi Kurita , Emanuel Beer , Hung T. Nguyen , Benjamin Johnston , Fayez E. Abboud
发明人： Shinichi Kurita , Emanuel Beer , Hung T. Nguyen , Benjamin Johnston , Fayez E. Abboud
IPC分类号： G01R13/04
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.
摘要翻译：提供了用于支撑和转移衬底的衬底台和方法。衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。分段段适于围绕末端执行器升高和降低。

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