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1. 发明申请

US20130049545A1 RESONATOR DEVICE INCLUDING ELECTRODES WITH BURIED TEMPERATURE COMPENSATING LAYERS 有权
标题翻译：谐振器装置，包括带有温度补偿层的电极
公开(公告)号：US20130049545A1
公开(公告)日：2013-02-28
申请号：US13601384
申请日：2012-08-31
申请人： Qiang ZOU , Zhiqiang BI , Kristina LAMERS , Richard C. RUBY
发明人： Qiang ZOU , Zhiqiang BI , Kristina LAMERS , Richard C. RUBY
IPC分类号： H03H9/17
CPC分类号： H03H3/04 , H03H9/02102 , H03H9/131 , H03H9/173 , H03H9/175
摘要： An acoustic resonator includes a substrate and a first composite electrode disposed over the substrate. The first composite electrode includes first and second electrically conductive layers and a first temperature compensating layer disposed between the first and second electrically conductive layers. The second electrically conductive layer forms a first electrical contact with the first electrically conductive layer on at least one side of the first temperature compensating layer, and the first electrical contact electrically shorts a first capacitive component of the first temperature compensating layer.
摘要翻译：声谐振器包括衬底和设置在衬底上的第一复合电极。第一复合电极包括第一和第二导电层和设置在第一和第二导电层之间的第一温度补偿层。所述第二导电层在所述第一温度补偿层的至少一侧与所述第一导电层形成第一电接触，并且所述第一电接触使所述第一温度补偿层的第一电容分量电短路。

2. 发明申请

US20110266925A1 RESONATOR DEVICE INCLUDING ELECTRODE WITH BURIED TEMPERATURE COMPENSATING LAYER 有权
标题翻译：包含电极的谐振器装置，带有温度补偿层
公开(公告)号：US20110266925A1
公开(公告)日：2011-11-03
申请号：US12769791
申请日：2010-04-29
申请人： Richard C. RUBY , Wei PANG , Qiang ZOU , Donald LEE
发明人： Richard C. RUBY , Wei PANG , Qiang ZOU , Donald LEE
IPC分类号： H01L41/04
CPC分类号： H03H9/131 , H03H3/04 , H03H9/02102 , H03H9/173 , H03H9/175
摘要： An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
摘要翻译：声谐振器装置包括在基板上的复合第一电极，复合电极上的压电层和压电层上的第二电极。第一电极包括具有正温度系数的掩埋温度补偿层。压电层具有负温度系数，因此温度补偿层的正温度系数抵消压电层的负温度系数的至少一部分。

3. 发明申请

US20120154074A1 RESONATOR DEVICE INCLUDING ELECTRODE WITH BURIED TEMPERATURE COMPENSATING LAYER 有权
标题翻译：包含电极的谐振器装置，带有温度补偿层
公开(公告)号：US20120154074A1
公开(公告)日：2012-06-21
申请号：US13404095
申请日：2012-02-24
申请人： Richard C. RUBY , Wei PANG , Qiang ZOU , Donald LEE
发明人： Richard C. RUBY , Wei PANG , Qiang ZOU , Donald LEE
IPC分类号： H03H9/15
CPC分类号： H03H9/131 , H03H3/04 , H03H9/02102 , H03H9/173 , H03H9/175
摘要： An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
摘要翻译：声谐振器装置包括在基板上的复合第一电极，复合电极上的压电层和压电层上的第二电极。第一电极包括具有正温度系数的掩埋温度补偿层。压电层具有负温度系数，因此温度补偿层的正温度系数抵消压电层的负温度系数的至少一部分。

4. 发明申请

US20120293278A1 STACKED BULK ACOUSTIC RESONATOR COMPRISING DISTRIBUTED BRAGG REFLECTOR 审中-公开
标题翻译：包装分布式反射器的堆叠式音箱谐振器
公开(公告)号：US20120293278A1
公开(公告)日：2012-11-22
申请号：US13112407
申请日：2011-05-20
申请人： Dariusz BURAK , Alexandre SHIRAKAWA , John D. LARSON, III , Paul BRADLEY , Richard C. RUBY , Bernhard KOELLE , John CHOY , Kevin J. GRANNEN
发明人： Dariusz BURAK , Alexandre SHIRAKAWA , John D. LARSON, III , Paul BRADLEY , Richard C. RUBY , Bernhard KOELLE , John CHOY , Kevin J. GRANNEN
IPC分类号： H03H9/58
CPC分类号： H03H9/585 , H03H9/0211 , H03H9/1007 , H03H9/1014 , H03H9/173 , H03H9/175
摘要： A device comprises a substrate, an acoustic stack, and a distributed Bragg reflector. The acoustic stack comprises a first electrode formed on the substrate, a first piezoelectric layer formed on the first electrode, a second electrode formed on the first piezoelectric layer, a second piezoelectric layer formed on the second electrode, and a third electrode formed on the second piezoelectric layer. The distributed Bragg reflector is formed adjacent to the acoustic stack and provides it with acoustic isolation.
摘要翻译：一种器件包括衬底，声学堆叠和分布式布拉格反射器。声堆叠包括形成在基板上的第一电极，形成在第一电极上的第一压电层，形成在第一压电层上的第二电极，形成在第二电极上的第二压电层，以及形成在第二电极上的第三电极压电层。分布式布拉格反射器形成在声堆叠附近，并提供声隔离。

5. 发明申请

US20130049888A1 ACOUSTIC RESONATOR FORMED ON A PEDESTAL 有权
标题翻译：在PEDESTAL上形成的声学谐振器
公开(公告)号：US20130049888A1
公开(公告)日：2013-02-28
申请号：US13216633
申请日：2011-08-24
申请人： Richard C. RUBY
发明人： Richard C. RUBY
IPC分类号： H03H9/54 , H01F41/00 , H01L41/22
CPC分类号： H03H3/04 , H03H9/02047 , H03H9/02102 , H03H9/02133 , H03H9/0514 , H03H9/172 , Y10T29/42 , Y10T29/49005 , Y10T29/4908
摘要： An acoustic resonator structure comprises a substrate having a trench, a conductive pattern formed in the trench, a pillar formed within the trench, and an acoustic resonator supported at a central location by the pillar and suspended over the trench.
摘要翻译：声谐振器结构包括具有沟槽的衬底，形成在沟槽中的导电图案，形成在沟槽内的柱状体，以及由中心位置由柱支撑并悬挂在沟槽上的声谐振器。

6. 发明申请

US20120075026A1 PACKAGED DEVICE WITH ACOUSTIC RESONATOR AND ELECTRONIC CIRCUITRY AND METHOD OF MAKING THE SAME 有权
标题翻译：具有声学谐振器和电子电路的封装器件及其制造方法
公开(公告)号：US20120075026A1
公开(公告)日：2012-03-29
申请号：US12891039
申请日：2010-09-27
申请人： Richard C. RUBY , Martha K. SMALL
发明人： Richard C. RUBY , Martha K. SMALL
IPC分类号： H03L1/04 , H01L21/50 , H03H9/17
CPC分类号： H03H9/1014 , H01L23/10 , H01L2924/0002 , H03H9/0538 , H03L1/04 , H01L2924/00
摘要： A device includes: a base substrate having a bonding pad and a peripheral pad, the peripheral pad encompassing the bonding pad; an acoustic resonator on the base substrate; a cap substrate having a bonding pad seal and a peripheral pad seal, the bonding pad seal bonding around the perimeter of the bonding pad and the peripheral pad seal bonding with the peripheral pad to define a hermetically sealed volume between the cap substrate and the base substrate, the cap substrate having a through hole therein over the bonding pad providing access for a connection to the bonding pad; a low-resistivity material layer region disposed on a portion of a surface of the cap substrate disposed inside the hermetically sealed volume, the material layer region being isolated from the bonding pad seal; and electronic circuitry disposed in the material layer region and electrical connected with the acoustic resonator.
摘要翻译：一种器件包括：具有接合焊盘和外围焊盘的基底衬底，所述外围焊盘包围所述接合焊盘; 在基底基板上的声共振器; 具有接合焊盘密封件和外围焊盘密封件的盖衬底，所述接合焊盘密封件围绕所述接合焊盘的周边结合，并且所述外围焊盘密封件与所述外围焊盘接合，以限定所述盖基板和所述基板之间的气密密封体积所述盖基板在所述焊盘上方具有通孔，所述通孔提供用于与所述焊盘的连接的通路; 所述低电阻率材料层区域设置在所述盖衬底的设置在所述密封体内的表面的一部分上，所述材料层区域与所述焊盘密封件隔离; 以及设置在材料层区域中并与声谐振器电连接的电子电路。

7. 发明申请

US20120318060A1 CAPACITANCE DETECTOR FOR ACCELEROMETER AND GYROSCOPE AND ACCELEROMETER AND GYROSCOPE WITH CAPACITANCE DETECTOR 有权
标题翻译：用于加速度计和陀螺仪的加速度检测器和带电容检测器的加速度计和陀螺仪
公开(公告)号：US20120318060A1
公开(公告)日：2012-12-20
申请号：US13162883
申请日：2011-06-17
申请人： Richard C. RUBY
发明人： Richard C. RUBY
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01C19/5776 , G01P15/0802 , G01P2015/0831
摘要： A capacitance-to-frequency converter is configured to convert a difference between first and second capacitances produced of a teeter-totter capacitive transducer as a result of a rotational force being applied to the teeter-totter capacitive transducer to a first signal having a first frequency that is a function of the rotational force, and to convert a sum of the first and second capacitances produced as a result of an acceleration force to a second signal having a second frequency that is a function of the acceleration force. The capacitance-to-frequency converter includes a first oscillator having a first oscillator frequency that changes in response to a change in the first capacitance; a second oscillator having a second oscillator frequency that changes in response to a change in the second capacitance; and a mixer having first and second mixer inputs connected outputs of the first and second oscillators.
摘要翻译：电容 - 频率转换器被配置为转换由跷跷板电容式换能器产生的第一和第二电容之间的差异，这是由于旋转力被施加到跷跷板电容换能器而具有第一频率的第一信号这是旋转力的函数，并且将作为加速力的结果产生的第一和第二电容的和转换成具有作为加速力的函数的第二频率的第二信号。电容 - 频率转换器包括具有响应于第一电容的变化而改变的第一振荡器频率的第一振荡器; 具有响应于所述第二电容的变化而改变的第二振荡器频率的第二振荡器; 以及具有连接第一和第二振荡器的输出的第一和第二混频器输入的混频器。

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