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    • 4. 发明申请
    • Method for fabricating an enlarged fluid channel
    • 制造扩大流体通道的方法
    • US20050127028A1
    • 2005-06-16
    • US10987087
    • 2004-11-12
    • Wei-Lin ChenHung-Sheng Hu
    • Wei-Lin ChenHung-Sheng Hu
    • B41J2/16G01D15/00
    • B41J2/1629B41J2/1603B41J2/1628B41J2/1642
    • A method for fabricating an enlarged fluid channel. The method includes providing a substrate with a patterned sacrificial layer thereon. A patterned support layer is formed on the substrate and covers the sacrificial layer. A fluid channel is formed by wet etching the substrate and exposing the sacrificial layer. A first chamber is formed by removing a portion of the sacrificial layer in the wet etching process. Finally, the first chamber and the exit-end of the fluid channel are enlarged by wet etching. More specifically, the exit-end of the fluid channel is enlarged using multiple steps of etching the sacrificial layer without changing the dimensions of the entry-end of the fluid channel.
    • 一种制造扩大流体通道的方法。 该方法包括在其上提供具有图案化牺牲层的衬底。 图案化支撑层形成在衬底上并覆盖牺牲层。 通过湿蚀刻衬底并暴露牺牲层形成流体通道。 通过在湿蚀刻工艺中去除牺牲层的一部分来形成第一室。 最后,流体通道的第一腔室和出口端通过湿法蚀刻而增大。 更具体地,流体通道的出口端通过蚀刻牺牲层的多个步骤来扩大,而不改变流体通道入口端的尺寸。
    • 5. 发明申请
    • Fluid injection devices and fabrication methods thereof
    • 流体注射装置及其制造方法
    • US20060071302A1
    • 2006-04-06
    • US11242780
    • 2005-10-05
    • Wei-Lin ChenHung-Sheng HuDer-Rong Shyn
    • Wei-Lin ChenHung-Sheng HuDer-Rong Shyn
    • H01L23/58
    • B41J2/14137B41J2/1603B41J2/1625B41J2/1629B41J2/1631B41J2/1642B41J2/1643B41J2/1646
    • Fluid injection devices and fabrication methods thereof. A first structural layer is disposed on a substrate. A fluid chamber is disposed between the substrate and the first structural layer. At least one bubble generator is disposed on the first structural layer and on the opposite side of the fluid chamber. A first passivation layer is disposed on the first structural layer covering the bubble generator. A second structural layer is disposed on the passivation layer. A second passivation layer is conformably deposited on the second passivation layer. A nozzle adjacent to the bubble generator passes through the second passivation layer, the second structural layer, the first passivation layer, and the first structural layer communicating the fluid chamber, wherein the sidewall of the nozzle is made of the first structural, the first passivation layer and the second passivation layer.
    • 流体注射装置及其制造方法。 第一结构层设置在基板上。 流体室设置在基板和第一结构层之间。 至少一个气泡生成器设置在第一结构层上和流体室的相对侧上。 第一钝化层设置在覆盖气泡发生器的第一结构层上。 第二结构层设置在钝化层上。 第二钝化层顺应地沉积在第二钝化层上。 与气泡发生器相邻的喷嘴穿过第二钝化层,第二结构层,第一钝化层和连通流体室的第一结构层,其中喷嘴的侧壁由第一结构,第一钝化 层和第二钝化层。
    • 8. 发明授权
    • Methods for fabricating fluid injection devices
    • 制造流体注射装置的方法
    • US07439163B2
    • 2008-10-21
    • US11355982
    • 2006-02-17
    • Hung-Sheng HuWei-Lin ChenTsung-Ping HsuDer-Rong Shyn
    • Hung-Sheng HuWei-Lin ChenTsung-Ping HsuDer-Rong Shyn
    • H01L21/20
    • B41J2/14137B41J2/1603B41J2/1626B41J2/1631
    • Methods for fabricating fluid injection devices. A patterned sacrificial layer is formed on a substrate. A patterned first structural layer is formed on the substrate covering the sacrificial layer. At least one fluid actuator is formed on the structural layer. A first passivation layer is formed on the first structural covering the at least one fluid actuator. An under bump metal (UBM) layer is conformably formed on the first passivation layer. A patterned first photoresist is formed at a predetermined nozzle site and a contact opening site exposes the UBM layer. A second structural layer is formed on the UBM layer. An etching protective layer is formed on the second structural layer. The first photoresist is removed creating an opening at the nozzle site exposing the UBM layer. The UBM layer in the opening is removed.
    • 制造流体注射装置的方法。 图案化的牺牲层形成在衬底上。 在覆盖牺牲层的基板上形成图案化的第一结构层。 在结构层上形成至少一个流体致动器。 在覆盖至少一个流体致动器的第一结构上形成第一钝化层。 在第一钝化层上顺应地形成凸块下金属(UBM)层。 在预定的喷嘴位置处形成图案化的第一光致抗蚀剂,并且接触开口部位露出UBM层。 在UBM层上形成第二结构层。 在第二结构层上形成蚀刻保护层。 去除第一光致抗蚀剂,在暴露UBM层的喷嘴位置产生开口。 开口中的UBM层被去除。