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    • 4. 发明申请
    • SYSTEMS METHODS FOR CAMERA CONTROL USING HISTORICAL OR PREDICTED EVENT DATA
    • 使用历史或预测事件数据进行摄像机控制的系统方法
    • US20130194427A1
    • 2013-08-01
    • US13359856
    • 2012-01-27
    • Robert Hunter
    • Robert Hunter
    • H04N7/18
    • H04N5/23206H04N7/188
    • According to some embodiments, systems, methods, apparatus, and computer program code for controlling a video camera to capture video associated with an event are provided which use historical or predictive data. In some embodiments, historical event information and participant information is received. Video camera configuration and position data is received, as well as current event data. The current event data may be received substantially in real time from the event. Video camera control signals are generated based on at least one of the event information, the participant information, and the current event data. The control signals are transmitted to a video camera to control the operation of the video camera.
    • 根据一些实施例,提供了使用历史或预测数据的用于控制摄像机捕获与事件相关联的视频的系统,方法,装置和计算机程序代码。 在一些实施例中,接收历史事件信息和参与者信息。 接收摄像机配置和位置数据,以及当前事件数据。 可以从事件基本上实时地接收当前事件数据。 基于事件信息,参与者信息和当前事件数据中的至少一个生成摄像机控制信号。 将控制信号发送到摄像机以控制摄像机的操作。
    • 5. 发明申请
    • Tilt Cylinder Support Structure
    • 倾斜气缸支撑结构
    • US20120230804A1
    • 2012-09-13
    • US13045193
    • 2011-03-10
    • Xiaoming TanMichael SekulichAllen BoyerRobert HunterSameer Rishipathak
    • Xiaoming TanMichael SekulichAllen BoyerRobert HunterSameer Rishipathak
    • E02F9/00
    • E02F9/2271
    • A support structure for a tilt cylinder of a machine that controls movement of an articulating implement may include a mounting plate, vertical support plates extending outwardly from a top surface of the mounting plate, and a central and side gussets connected to the top surface of the mounting plate and to the outer sides of the vertical support plates. The gussets assist in transitioning lateral or horizontal forces on the vertical support plates to the mounting plate and the end frame of the machine to reduce fatigue cracking at the points of connection of the vertical support plates to the mounting plate. The support structure may further include first and second lower support plates having top edges spaced from each other and connected to the bottom surface of the mounting plate, and bottom edges connected to each other so that the lower support plates and the mounting plate form a triangle in cross-section to further assist in transitioning the forces to the end frame.
    • 用于控制铰接工具的运动的机器的倾斜圆柱体的支撑结构可以包括安装板,从安装板的顶表面向外延伸的垂直支撑板,以及连接到安装板的顶表面的中心和侧部角撑板 安装板和垂直支撑板的外侧。 角撑板有助于将垂直支撑板上的横向或横向力转换到机器的安装板和端部框架,以减少垂直支撑板与安装板的连接点处的疲劳开裂。 支撑结构还可以包括具有彼此间隔开并连接到安装板的底表面的顶部边缘的第一和第二下部支撑板以及彼此连接的底部边缘,使得下部支撑板和安装板形成三角形 在横截面上进一步协助将力转移到端框。
    • 7. 发明申请
    • Method and apparatus for measurement of exit pupil telecentricity and source boresighting
    • 出射瞳孔远心和源视距的测量方法和装置
    • US20060164618A1
    • 2006-07-27
    • US11340084
    • 2006-01-26
    • Adlai SmithRobert Hunter
    • Adlai SmithRobert Hunter
    • G03B27/52
    • G03F7/70191G03F7/70591G03F7/70616
    • Exit pupil and source telecentricity of a projection imaging tool system is determined. The system contains a light source, an optical imager, a reticle, a substrate, and a positioner. The light source is optically coupled to the optical imager, the optical imager having an exit pupil. The combination of the light source and the optical imager define a projection imaging tool, are characterized by a partial coherence. The reticle has an array of patterns, each pattern having at least a first feature and a second feature. A substrate may be used to record at least a first image and a second image of the features. The positioner is used to dispose the first image and the second image such that the first image has a first defocus and the second image has a second defocus different from the first defocus. A processor is used to calculate the telecentricity based on an exit pupil and light source differential shift coefficient and positional offsets between features contained in the first image and features contained in the second image.
    • 确定投影成像工具系统的退出瞳孔和源远心。 该系统包含光源,光学成像仪,光罩,基板和定位器。 光源光学耦合到光学成像器,光学成像器具有出射光瞳。 光源和光学成像器的组合定义了投影成像工具,其特征在于部分相干性。 掩模版具有图案阵列,每个图案至少具有第一特征和第二特征。 衬底可以用于记录特征的至少第一图像和第二图像。 定位器用于配置第一图像和第二图像,使得第一图像具有第一散焦,并且第二图像具有不同于第一散焦的第二散焦。 处理器用于基于出射光瞳和光源差分偏移系数以及包含在第一图像中的特征和包含在第二图像中的特征之间的位置偏移来计算远心度。
    • 9. 发明申请
    • Apparatus and process for determination of dynamic scan field curvature
    • 用于确定动态扫描场曲率的装置和过程
    • US20050243294A1
    • 2005-11-03
    • US10833781
    • 2004-04-28
    • Adlai SmithRobert Hunter
    • Adlai SmithRobert Hunter
    • G03F7/20G03B27/52
    • G03F7/70791G03F7/70358G03F7/70516G03F7/706G03F7/70641
    • A process for the determination of focal plane deviation uniquely due to the scanning dynamics associated with a photolithographic scanner is described. A series of lithographic exposures is performed on a resist coated silicon wafer using a photolithographic scanner. The lithographic exposures produce an array of focusing fiducials that are displaced relative to each other in a unique way. The resulting measurements are fed into a computer algorithm that calculates the dynamic scanning field curvature in an absolute sense in the presence of wafer height variation and other wafer/reticle stage irregularities. The dynamic scan field curvature can be used to improve lithographic modeling, overlay modeling, and advanced process control techniques related to scanner stage dynamics.
    • 描述了由于与光刻扫描仪相关的扫描动力学而唯一地确定焦平面偏差的过程。 使用光刻扫描仪在抗蚀剂涂覆的硅晶片上进行一系列光刻曝光。 光刻曝光产生了以独特的方式相对于彼此移位的聚焦基准阵列。 所得到的测量值被馈送到计算机算法中,该计算机算法在存在晶片高度变化和其它晶片/标线片级不规则性的情况下以绝对意义计算动态扫描场曲率。 动态扫描场曲率可用于改进与扫描仪动态相关的光刻建模,叠加建模和先进的过程控制技术。
    • 10. 发明申请
    • Process for determination of optimized exposure conditions for transverse distortion mapping
    • 用于确定横向畸变映射的优化暴露条件的过程
    • US20050202328A1
    • 2005-09-15
    • US10800110
    • 2004-03-12
    • Adlai SmithJoseph BendikRobert Hunter
    • Adlai SmithJoseph BendikRobert Hunter
    • G03B27/00G03C5/00G03F7/20
    • G03F7/705G03F7/701G03F7/706G03F7/70633
    • A process for providing illumination source conditions for the accurate determination Zernike tilt coefficients in the presence of coma is described. Large feature-shift coma sensitivity is simulated for a range of illumination conditions. The resulting source sensitivity data is modeled and a practical array of source shapes, each of which is optimized to eliminate the effects of transverse distortion due to third-order coma, is identified. The optimized set of source shapes can be used to more accurately determine Zernike terms a2 and a3 using a variety of methods. Knowledge of the lens distortion data in the absence of coma induced shifts can be entered into more traditional overlay regression routines to better identify systematic and random error. Additional applications of the above outlined procedure include: improved lithographic simulation using conventional optical modeling software and advanced process control in the form of feedback loops that automatically adjust the projection lens for optimum system performance.
    • 描述了在存在昏迷的情况下提供用于精确确定泽乃克倾斜系数的照明源条件的过程。 对于一系列照明条件,模拟了特征移动敏感度。 对所得到的源灵敏度数据进行建模,并且确定了源形状的实际阵列,每个源形状被优化以消除由于三阶昏迷引起的横向失真的影响。 可以使用优化的源形状集来使用各种方法更准确地确定Zernike项a2和a3。 在没有昏迷诱导的移位的情况下,对透镜失真数据的知识可以被输入到更传统的覆盖回归例程中,以更好地识别系统和随机误差。 上述方法的其他应用包括:使用常规光学建模软件改进的光刻模拟和以反馈环形式的高级过程控制,其自动调整投影透镜以获得最佳系统性能。