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1. 发明授权

US07399987B1 Planar electron emitter (PEE) 失效
标题翻译：平面电子发射体（PEE）
公开(公告)号：US07399987B1
公开(公告)日：2008-07-15
申请号：US09700463
申请日：1999-06-11
申请人： Petr Viscor , Niels Ole Nielsen , Armin Delong , Vladimir Kolarik
发明人： Petr Viscor , Niels Ole Nielsen , Armin Delong , Vladimir Kolarik
IPC分类号： H01J19/24
CPC分类号： B82Y10/00 , H01J1/312 , H01J35/065 , H01J2235/062
摘要： A planar electron emitter, based on the existence of quasi-ballistic transport of electrons is disclosed. In its preferred embodiment the planar electron emitter structure consists of a body of finite gap pure semiconductor or insulator, the said body of macroscopic thickness (˜1 mm) being terminated by two parallel surfaces and of a set of two electrodes deposited/grown on the said two free surfaces such that when a low external electrical field (˜100 V/cm) is applied to this structure, consisting of two electrodes and the said semiconductor or insulating body sandwiched between them, a large fraction of electrons injected into the said semiconductor or insulator body from the negatively charged electrode (cathode) is quasi-ballistic in nature, that is this fraction of injected electrons is accelerated within the said semiconductor or insulator body without suffering any appreciable inelastic energy losses, thereby achieving sufficient energy and appropriate momentum at the positively charged electrode (anode) to be able to traverse through the said anode and to escape from the said structure into empty space (vacuum), said semiconductor or insulator body comprises a material or material system having a predetermined crystal orientation.
摘要翻译：公开了一种基于电子的准弹道输运的存在的平面电子发射体。在其优选实施例中，平面电子发射器结构由有限间隙纯半导体或绝缘体的主体组成，所述宏观厚度（〜1mm）的主体由两个平行表面和一组两个沉积/生长在所述两个自由表面使得当由两个电极和夹在其间的所述半导体或绝缘体组成的该结构施加低的外部电场（〜100V / cm）时，注入到所述半导体中的大部分电子或来自带负电荷的电极（阴极）的绝缘体本质上是准弹道的，也就是说，注入的电子的这一部分在所述半导体或绝缘体内部被加速，而不会受到任何明显的非弹性能量损失，从而实现足够的能量和适当的动量带正电的电极（阳极）能够穿过所述阳极并从所述结构件逸出所述半导体或绝缘体包括具有预定晶体取向的材料或材料体系。

2. 发明授权

US06891176B2 Planar electron emitter with extended lifetime and system using same 失效
标题翻译：具有延长使用寿命的平面电子发射体和使用其的系统
公开(公告)号：US06891176B2
公开(公告)日：2005-05-10
申请号：US10601090
申请日：2003-06-20
申请人： Petr Viscor , Michael Jensen , Rolf Stribolt Andersen , Vladimir Kolarik , Armin Delong
发明人： Petr Viscor , Michael Jensen , Rolf Stribolt Andersen , Vladimir Kolarik , Armin Delong
IPC分类号： G11B9/10 , H01J1/312 , H01J7/24 , H01J37/06 , H01J37/317
CPC分类号： B82Y10/00 , H01J1/312 , H01J2201/3125
摘要： Metal-insulator-metal planar electron emitters (PEES) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.
摘要翻译：金属 - 绝缘体 - 金属平面电子发射体（PEES）有潜力用于未来几代半导体器件的先进光刻技术。然而，PEE的寿命有限，限制了其商业应用。据信，PEE的有限寿命受到来自阳极的金属离子的扩散的限制。内扩散可以以多种不同的方式进行反驳。一种方法是将PEE冷却到低于室温的温度。这降低了金属离子迁移率，因此金属离子不太可能扩散到绝缘体层中。另一种方法是偶尔从用于产生电子束的极性反转PEE两端的电位。这抵消了驱动从PEE阳极到PEE阴极的带正电荷的金属离子的电驱动力。

3. 发明申请

US20060033035A1 Electron microscope array for inspection and lithography 审中-公开
标题翻译：用于检查和光刻的电子显微镜阵列
公开(公告)号：US20060033035A1
公开(公告)日：2006-02-16
申请号：US11203299
申请日：2005-08-15
申请人： Mordechai Itzkovitch , Vladimir Kolarik , Gilad Golan , Jacob Karin
发明人： Mordechai Itzkovitch , Vladimir Kolarik , Gilad Golan , Jacob Karin
IPC分类号： H01J1/50
CPC分类号： H01J37/143 , B82Y10/00 , B82Y40/00 , H01J37/3177 , H01J2237/244 , H01J2237/2444 , H01J2237/28 , H01J2237/2817
摘要： A system and method for rapidly processing a specimen. The method includes generating a plurality of charged-particle beams travelling substantially along respective axes of an array of charged-particle beam columns by providing each beam column with two permanent magnets having at least one magnetic dipole disposed in a plane perpendicular to the axis. The trajectory of the beams is independently controlled and the beam is focussed onto the specimen using additional correctional coils. The beams are deflected while maintaining incidence of the beam on the specimen parallel to the axis. Preferably, the charged particle beams include non-crossover charged particle beams. Preferably, the method further includes detecting charged particles scattered from the specimen using a detector at least partially immersed in a magnetic field, by utilizing at least in part the magnetic field.
摘要翻译：一种用于快速处理样品的系统和方法。该方法包括通过为每个光束柱提供两个具有设置在垂直于该轴的平面中的至少一个磁偶极子的永磁体，生成基本沿着带电粒子束列阵列的各个轴线行进的多个带电粒子束。光束的轨迹被独立地控制，并且使用附加的校正线圈将光束聚焦在样本上。梁保持偏转，同时保持试样平行于轴线的梁的入射。优选地，带电粒子束包括非交叉带电粒子束。优选地，该方法还包括通过至少部分地利用磁场来检测使用至少部分浸没在磁场中的检测器从样品散射的带电粒子。

4. 发明申请

US20090153967A1 OPTICAL SECURITY DEVICE OFFERING 2D IMAGE 失效
标题翻译：提供2D图像的光学安全设备
公开(公告)号：US20090153967A1
公开(公告)日：2009-06-18
申请号：US12095278
申请日：2006-12-01
申请人： Libor Kotacka , Petr Vizdal , Vladimir Kolarik , Lukas Danek
发明人： Libor Kotacka , Petr Vizdal , Vladimir Kolarik , Lukas Danek
IPC分类号： G02B5/18
CPC分类号： G02B5/1861 , G02B5/1842
摘要： The present invention provides for a diffractive element comprising a diffractive optical microstructure consisting of a modulated structure of a diffractive type which upon illumination by diffused ambient light creates a two-dimensional image to be viewed by an observer upon tilting or rotating the device or by varying lighting direction, wherein the diffractive modulated structure of the device consists of various generally parameterised special optical elements with specifically prescribed groove shapes, wherein each groove shape, position, centre(s), and line thickness, are described by functions describing those dependencies which are variables of the positional coordinate of the optical element.
摘要翻译：本发明提供了一种衍射元件，它包括衍射光学微结构，该衍射光学微结构由衍射型的调制结构构成，在衍射型的调制结构中，在通过扩散的环境光照射时产生二维图像，以便在倾斜或旋转该装置时由观察者观察，或者通过改变其中所述装置的衍射调制结构由具有特定规定的凹槽形状的各种通常参数化的特殊光学元件组成，其中每个凹槽形状，位置，中心和线条厚度由描述这些依赖性的函数来描述光学元件的位置坐标的变量。

5. 发明授权

US08743459B2 Optical security device offering 2D image 失效
标题翻译：提供2D图像的光学安全设备
公开(公告)号：US08743459B2
公开(公告)日：2014-06-03
申请号：US12095278
申请日：2006-12-01
申请人： Libor Kotacka , Petr Vizdal , Vladimir Kolarik , Lukas Danek
发明人： Libor Kotacka , Petr Vizdal , Vladimir Kolarik , Lukas Danek
IPC分类号： G02B5/18 , G03H1/00 , B42D15/00
CPC分类号： G02B5/1861 , G02B5/1842
摘要： The present invention provides for a diffractive element comprising a diffractive optical microstructure consisting of a modulated structure of a diffractive type which upon illumination by diffused ambient light creates a two-dimensional image to be viewed by an observer upon tilting or rotating the device or by varying lighting direction, wherein the diffractive modulated structure of the device consists of various generally parameterised special optical elements with specifically prescribed groove shapes, wherein each groove shape, position, center(s), and line thickness, are described by functions describing those dependencies which are variables of the positional coordinate of the optical element.
摘要翻译：本发明提供了一种衍射元件，它包括衍射光学微结构，该衍射光学微结构由衍射型的调制结构构成，在衍射型的调制结构中，在通过扩散的环境光照射时产生二维图像，以便在倾斜或旋转该装置时由观察者观察，或者通过改变其中所述装置的衍射调制结构由具有特定规定的凹槽形状的各种通常参数化的特殊光学元件组成，其中每个凹槽形状，位置，中心和线条厚度由描述这些依赖性的函数来描述光学元件的位置坐标的变量。

6. 发明申请

US20090091834A1 METHOD OF CREATING A THREE-DIMENSIONAL IMAGE, A DIFFRACTIVE ELEMENT AND METHOD OF CREATING THE SAME 审中-公开
标题翻译：创建三维图像的方法，衍射元件及其创建方法
公开(公告)号：US20090091834A1
公开(公告)日：2009-04-09
申请号：US11573255
申请日：2005-08-08
申请人： Zbynek Ryzi , Vladimir Kolarik , Libor Kotacka , Max Zolotukhin
发明人： Zbynek Ryzi , Vladimir Kolarik , Libor Kotacka , Max Zolotukhin
IPC分类号： G02B5/18
CPC分类号： B42D25/324 , B42D25/328 , B42D2035/16 , G02B5/18 , G02B5/1842 , G02B27/2271 , G03H1/0011 , G03H1/0244 , G03H1/2249 , G03H1/30 , G03H2001/0497 , G03H2210/30 , G03H2240/21 , G03H2240/24
摘要： The invention discloses a diffractive device and a method of creating the same displaying a three-dimensional preferably achromatic image, especially imitating a real or an imaginary relief scene, a flat microrelief or otherwise modulated structure (10) of a diffractive type is created, the structure (10) comprising system of diffraction zones (5) which are arranged so that in places of diffractive structure (10) corresponding to places of the relief scene (11) the diffraction zones (5) have such periodicity and orientation (a, b) that cause deflection of incident light (9) in the same direction as the relief scene (11) deflects an incident light, thus achieving a visible thee-dimensional and largely achromatic sensation of image, corresponding to the relief scene (11), when observing the diffractive structure (10) regardless of conditions of lighting.A diffractive element comprises diffractive structure (10) with a system of diffraction zones (5) arranged so that in places of diffractive structure (10) corresponding to places of the relief scene (11) they have such periodicity and orientation (a, b) that cause deflection of incident light (9) in the same direction as the relief scene (11) deflects an incident light, for achieving a visible thee-dimensional and largely achromatic sensation of image corresponding to the relief scene (11) when observing the diffractive structure (10) regardless of conditions of lighting. In another aspect of the invention there is revealed the use and combination with an additional micro-relief with its fine structure, together with variability of reflections and transmissions of specific elementary areas which enables a visual imitation of various materials, structures and patterns.
摘要翻译：本发明公开了一种衍射装置及其制造方法，其特征在于，制造出显示三维优选无彩色图像的方法，特别是模仿真实或虚构的浮雕场景，产生了衍射型的平坦微型或其它调制结构（10），包括衍射区域（5）的结构（10），所述衍射区域（5）被布置成使得在与所述浮雕场景（11）的位置对应的衍射结构（10）的位置处，所述衍射区域（5）具有这样的周期性和取向（a，b ）使得入射光（9）沿与浮雕场景（11）相同的方向偏转入射光，从而实现对应于浮雕场景（11）的图像的可见的尺寸和大部分消色差的感觉，当时观察衍射结构（10），而不管照明条件如何。衍射元件包括具有衍射区域（5）的系统的衍射结构（10），所述衍射区域（5）布置成使得在对应于浮雕场景（11）的位置的衍射结构（10）的位置处，它们具有这样的周期性和取向（a，b）导致入射光（9）在与浮雕场景（11）相同的方向上的偏转使入射光偏转，以便在观察衍射时实现与浮雕场景（11）相对应的图像的可见的尺寸和大部分消色差的感觉结构（10）不管照明条件如何。在本发明的另一方面，揭示了其具有其精细结构的附加微浮雕的使用和组合，以及特定基本区域的反射和透射的可变性，其使得能够对各种材料，结构和图案进行视觉模拟。

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