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1. 发明授权

US07267520B2 Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights 失效
标题翻译：使用弹簧和配重的往复旋转运动的晶圆扫描系统
公开(公告)号：US07267520B2
公开(公告)日：2007-09-11
申请号：US11099022
申请日：2005-04-05
申请人： Peter L. Kellerman , Victor M. Benveniste , Kourosh Saadatmand , Mehran Asdigha , Douglas A. Brown
发明人： Peter L. Kellerman , Victor M. Benveniste , Kourosh Saadatmand , Mehran Asdigha , Douglas A. Brown
IPC分类号： B66F9/00
CPC分类号： H01L21/67069 , H01J2237/20228 , H01J2237/31701
摘要： The present invention is directed to a scanning apparatus and method for processing a workpiece, wherein the scanning apparatus comprises a wafer arm and moving arm fixedly coupled to one another, wherein the wafer arm and moving arm are operable to rotate about a first axis. An end effector, whereon the workpiece resides, is coupled to the wafer arm. A rotational shaft couples the wafer arm and moving arm to a first actuator, wherein the first actuator provides a rotational force to the shaft. A momentum balance mechanism is coupled to the shaft and is operable to generally reverse the rotational direction of the shaft. The momentum balance mechanism comprises one or more fixed spring elements operable to provide a force to a moving spring element coupled to the moving arm. A controller is further operable to maintain a generally constant translational velocity of the end effector within a predetermined scanning range.
摘要翻译：本发明涉及一种用于处理工件的扫描装置和方法，其中扫描装置包括彼此固定地连接的晶片臂和移动臂，其中晶片臂和移动臂可操作以围绕第一轴线旋转。工件所在的端部执行器与晶片臂连接。旋转轴将晶片臂和移动臂联接到第一致动器，其中第一致动器向轴提供旋转力。动量平衡机构联接到轴上并且可操作地大体上使轴的旋转方向反转。动量平衡机构包括一个或多个固定弹簧元件，其可操作以向耦合到移动臂的移动弹簧元件提供力。控制器还可操作以将末端执行器的大致恒定的平移速度保持在预定扫描范围内。

2. 发明授权

US07072165B2 MEMS based multi-polar electrostatic chuck 失效
标题翻译：基于MEMS的多极静电卡盘
公开(公告)号：US07072165B2
公开(公告)日：2006-07-04
申请号：US10642939
申请日：2003-08-18
申请人： Peter L. Kellerman , Shu Qin , Douglas A. Brown
发明人： Peter L. Kellerman , Shu Qin , Douglas A. Brown
IPC分类号： H01L21/683
CPC分类号： H01L21/6875 , H01L21/6833
摘要： The present invention is directed to a semiconductor processing apparatus and a method for clamping a semiconductor substrate and controlling a heat transfer associated therewith. According to one aspect of the present invention, a multi-polar electrostatic chuck and associated method is disclosed which provides a controlled and uniform heat transfer coefficient across a surface thereof. The multi-polar electrostatic chuck comprises a semiconductor platform having a plurality of protrusions that define gaps therebetween, wherein a distance or depth of the gaps is uniform and associated with a mean free path of the cooling gas therein. The electrostatic chuck is permits a control of a backside pressure of a cooling gas within the plurality of gaps to thus control a heat transfer coefficient of the cooling gas. The plurality of protrusions further provide a uniform contact surface, wherein a contact conductivity between the plurality of protrusions and the substrate is controllable and significantly uniform across the substrate.
摘要翻译：本发明涉及一种用于夹持半导体衬底并控制与之相关的热传递的半导体处理装置和方法。根据本发明的一个方面，公开了一种多极静电卡盘和相关方法，其提供跨越其表面的受控且均匀的传热系数。多极静电卡盘包括具有限定间隙的多个突起的半导体平台，其中间隙的距离或深度是均匀的，并且与其中的冷却气体的平均自由路径相关联。静电吸盘可以控制多个间隙内的冷却气体的背侧压力，从而控制冷却气体的传热系数。多个突起还提供均匀的接触表面，其中多个突起和基底之间的接触导电性在基底上是可控的和显着均匀的。

3. 发明授权

US06946403B2 Method of making a MEMS electrostatic chuck 失效
标题翻译：制造MEMS静电卡盘的方法
公开(公告)号：US06946403B2
公开(公告)日：2005-09-20
申请号：US10695153
申请日：2003-10-28
申请人： Peter L. Kellerman , Shu Qin , Ernie Allen , Douglas A. Brown
发明人： Peter L. Kellerman , Shu Qin , Ernie Allen , Douglas A. Brown
IPC分类号： H01L21/683 , H01L21/469
CPC分类号： H01L21/6833
摘要： The present invention is directed to a method of forming a clamping plate for a multi-polar electrostatic chuck. The method comprises forming a first electrically conductive layer over a semiconductor platform and defining a plurality of portions of the first electrically conductive layer which are electrically isolated from one another. A first electrically insulative layer is formed over the first electrically conductive layer, the first electrically insulative layer comprising a top surface having a plurality of MEMS protrusions extending a first distance therefrom. A plurality of poles are furthermore electrically connected to the respective plurality of portions of the first electrically conductive layer, wherein a voltage applied between the plurality of poles is operable to induce an electrostatic force in the clamping plate.
摘要翻译：本发明涉及一种形成多极静电卡盘夹紧板的方法。该方法包括在半导体平台上形成第一导电层，并且限定彼此电隔离的第一导电层的多个部分。第一电绝缘层形成在第一导电层之上，第一电绝缘层包括具有从其延伸第一距离的多个MEMS突起的顶表面。多个极还电连接到第一导电层的相应多个部分，其中施加在多个极之间的电压可操作以在夹持板中引起静电力。

4. 发明授权

US06905984B2 MEMS based contact conductivity electrostatic chuck 失效
标题翻译：基于MEMS的接触导电静电卡盘
公开(公告)号：US06905984B2
公开(公告)日：2005-06-14
申请号：US10683679
申请日：2003-10-10
申请人： Peter L. Kellerman , Shu Qin , Ernie Allen , Douglas A. Brown
发明人： Peter L. Kellerman , Shu Qin , Ernie Allen , Douglas A. Brown
IPC分类号： H01L21/683 , H01L21/00
CPC分类号： H01L21/6831 , Y10S438/964
摘要： The present invention is directed to a method for clamping and processing a semiconductor substrate using a semiconductor processing apparatus. According to one aspect of the present invention, a multi-polar electrostatic chuck and associated method is disclosed which provides heating or cooling of a substrate by thermal contact conduction between the electrostatic chuck and the substrate. The multi-polar electrostatic chuck includes a semiconductor platform having a plurality of protrusions that define gaps therebetween, wherein a surface roughness of the plurality of protrusions is less than 100 Angstroms. The electrostatic chuck further includes a voltage control system operable to control a voltage applied to the electrostatic chuck to thus control a contact heat transfer coefficient of the electrostatic chuck, wherein the heat transfer coefficient of the electrostatic chuck is primarily a function of a contact pressure between the substrate and the plurality of protrusions.
摘要翻译：本发明涉及使用半导体处理装置夹持和处理半导体衬底的方法。根据本发明的一个方面，公开了一种多极静电卡盘和相关方法，其通过静电卡盘和基板之间的热接触传导来提供加热或冷却基板。多极静电卡盘包括具有多个突起的半导体平台，所述突起在其间形成间隙，其中多个突起的表面粗糙度小于100埃。静电卡盘还包括电压控制系统，其可操作以控制施加到静电卡盘的电压，从而控制静电卡盘的接触传热系数，其中静电卡盘的传热系数主要是介于静电卡盘之间的接触压力的函数基板和多个突起。

5. 发明授权

US08903912B2 Social content management 有权
标题翻译：社会内容管理
公开(公告)号：US08903912B2
公开(公告)日：2014-12-02
申请号：US13475496
申请日：2012-05-18
申请人： Douglas A. Brown
发明人： Douglas A. Brown
IPC分类号： G06F15/16 , G06Q50/00
CPC分类号： G06Q50/01
摘要： A method includes, in a server residing in a network of interconnected computers, populating a repository with content, each one of the content categorized by at least one community designation, one topic designation, one tag and/or one company designation, receiving registration information for users, the registration information including a username and at least one community designation, one topic designation, one tag and/or one company designation, receiving content from a first user, the content including at least one community designation, one topic designation, one tag and/or one company designation, storing the received content in the repository, and notifying a subset of users of the received content, the community designation, topic designation, tag and/or company designation of each of the subset of users matching the community designation, topic designation, tag and/or company designation of received content.
摘要翻译：一种方法包括：在驻留在互连计算机网络中的服务器中，使用内容填充存储库，通过至少一个社区指定，一个主题标识，一个标签和/或一个公司标识分类的每个内容，接收注册信息对于用户，注册信息包括从第一用户接收内容的用户名和至少一个社区指定，一个主题标识，一个标签和/或一个公司名称，所述内容包括至少一个社区指定，一个主题标识，一个标签和/或一个公司名称，将接收到的内容存储在存储库中，以及通知与所述社区匹配的每个用户的所接收内容的用户的群体，社区指定，主题标识，标签和/或公司指定指定，主题指定，标签和/或所接收内容的公司名称。

6. 发明申请

US20090278429A1 INTEGRATED CLOSET SYSTEM 有权
标题翻译：集成闭路系统
公开(公告)号：US20090278429A1
公开(公告)日：2009-11-12
申请号：US12117259
申请日：2008-05-08
申请人： Harold Glenn Erickson , Mark Anthony Buchanan , Douglas A. Brown
发明人： Harold Glenn Erickson , Mark Anthony Buchanan , Douglas A. Brown
IPC分类号： A47G29/00
CPC分类号： B64D11/00155 , B64D11/0015 , B64D11/04
摘要： A closet comprises a support rail, a light, a raceway, a rub strip, and a hinge unit. The support rail is capable of providing structural support for the closet and having a plurality of connecting elements. The light has a first set of connecting elements capable of being engaged to the plurality of connecting elements. The raceway has a second set of connecting elements capable of being engaged to the plurality of connecting elements. The rub strip has a third set of connecting elements capable of being engaged to the plurality of connecting elements. The hinge unit has a shape capable of being connected to the support rail.
摘要翻译：衣柜包括支撑轨，灯，轨道，摩擦条和铰链单元。支撑轨能够为衣柜提供结构支撑并且具有多个连接元件。光具有能够与多个连接元件接合的第一组连接元件。滚道具有能够与多个连接元件接合的第二组连接元件。摩擦带具有能够接合到多个连接元件的第三组连接元件。铰链单元具有能够连接到支撑轨的形状。

7. 发明授权

US06998625B1 Ion implanter having two-stage deceleration beamline 有权
标题翻译：离子注入机具有两级减速束线
公开(公告)号：US06998625B1
公开(公告)日：2006-02-14
申请号：US09602059
申请日：2000-06-23
申请人： Charles M. McKenna , Nicholas R. White , Douglas A. Brown , Edward Bell , Svetlana Radovanov
发明人： Charles M. McKenna , Nicholas R. White , Douglas A. Brown , Edward Bell , Svetlana Radovanov
IPC分类号： G21K5/10 , H01J37/08
CPC分类号： H01J37/3171 , H01J2237/0041 , H01J2237/022 , H01J2237/047 , H01J2237/31705
摘要： An ion implanter includes an ion source for generating an ion beam, an analyzer for separating unwanted components from the ion beam, a first beam transport device for transporting the ion beam through the analyzer at a first transport energy, a first deceleration stage positioned downstream of the analyzer for decelerating the ion beam from the first transport energy to a second transport energy, a beam filter positioned downstream of the first deceleration stage for separating neutral particles from the ion beam, a second beam transport device for transporting the ion beam through the beam filter at the second transport energy, a second deceleration stage positioned downstream of the beam filter for decelerating the ion beam from the second transport energy to a final energy, and a target site for supporting a target for ion implantation. The ion beam is delivered to the target site at the final energy. In a double deceleration mode, the second transport energy is greater than the final energy for highest current at low energy. In an enhanced drift mode, the second transport energy is equal to the final energy for highest beam purity at low energy.
摘要翻译：离子注入机包括用于产生离子束的离子源，用于从离子束分离不需要的组分的分析器，用于以第一输送能量输送离子束通过分析器的第一束输送装置，位于离子束下游的第一减速阶段用于将离子束从第一输送能量减速到第二输送能量的分析器，位于第一减速阶段下游的用于从离子束分离中性粒子的光束过滤器，用于将离子束传送通过束在所述第二输送能量下进行过滤，所述第二减速阶段位于所述束过滤器的下游，用于将所述离子束从所述第二输送能量减速到最终能量，以及用于支撑用于离子注入的靶的靶位点。离子束以最终能量传递到目标位置。在双重减速模式中，第二传输能量大于最低能量时的最终能量。在增强的漂移模式中，第二传输能量等于在低能量下最高光束纯度的最终能量。

8. 发明授权

US09303912B1 Passively cooled container system and method 有权
标题翻译：被动冷却容器系统及方法
公开(公告)号：US09303912B1
公开(公告)日：2016-04-05
申请号：US13225048
申请日：2011-09-02
申请人： James P. Schalla , Karen L. Hills , Douglas A. Brown
发明人： James P. Schalla , Karen L. Hills , Douglas A. Brown
IPC分类号： F25D3/12 , F25D17/04 , F25D25/02 , A47B96/02 , A47B31/02 , A47B31/00
CPC分类号： F25D3/125 , A47B31/02 , A47B96/021 , A47B2031/005 , B64D11/0007 , F25D3/06 , F25D17/04 , F25D17/045 , F25D17/06 , F25D25/021 , F25D2303/08222 , F25D2303/0844 , F25D2331/812
摘要： A container system may comprise a container, a refrigerant tray, and refrigerant. The container may have a container interior. The refrigerant tray may be mountable within the container interior and may include a sublimation port. The refrigerant may be mounted within the refrigerant tray. The refrigerant may produce a cold gas upon sublimation of the refrigerant. The cold gas may pass through the sublimation port and enter into the container interior.
摘要翻译：容器系统可以包括容器，制冷剂盘和制冷剂。容器可以具有容器内部。制冷剂托盘可以安装在容器内部并且可以包括升华端口。制冷剂可以安装在制冷剂盘中。制冷剂在制冷剂升华时可产生冷气。冷气可能会通过升华口进入容器内部。

9. 发明授权

US06989545B1 Device and method for measurement of beam angle and divergence 有权
标题翻译：用于测量光束角和散度的装置和方法
公开(公告)号：US06989545B1
公开(公告)日：2006-01-24
申请号：US10886308
申请日：2004-07-07
申请人： Robert D. Rathmell , Douglas A. Brown , Andrew M. Ray
发明人： Robert D. Rathmell , Douglas A. Brown , Andrew M. Ray
IPC分类号： H01J37/317
CPC分类号： H01J37/3171 , H01J37/244 , H01J37/304 , H01J2237/24507 , H01J2237/24528 , H01J2237/31703
摘要： The present invention facilitates semiconductor device fabrication by obtaining angle of incidence values and divergence of an ion beam normal to a plane of a scanned beam. A divergence detector comprising a mask and profiler/sensor is employed to obtain beamlets from the incoming ion beam and then to measure beam current at a number of vertical positions. These beam current measurements are then employed to provide the vertical angle of incidence values, which provide a vertical divergence profile that serves to characterize the ion beam. These values can be employed by an ion beam generation mechanism to perform adjustments on the generated ion beam or position of the workpiece if the values indicate deviation from desired values.
摘要翻译：本发明通过获得垂直于扫描光束的平面的离子束的入射角和发散角来促进半导体器件的制造。使用包括掩模和轮廓仪/传感器的发散检测器从入射离子束获得子束，然后在多个垂直位置测量束电流。然后使用这些射束电流测量来提供垂直入射角，其提供用于表征离子束的垂直发散分布。这些值可以由离子束产生机构使用，以对所产生的离子束或工件的位置执行调整，如果值表示偏离期望值。

10. 发明授权

US08047467B2 Integrated closet system 有权
标题翻译：综合壁橱系统
公开(公告)号：US08047467B2
公开(公告)日：2011-11-01
申请号：US12117259
申请日：2008-05-08
申请人： Harold Glenn Erickson , Mark Anthony Buchanan , Douglas A. Brown
发明人： Harold Glenn Erickson , Mark Anthony Buchanan , Douglas A. Brown
IPC分类号： B64D9/00
CPC分类号： B64D11/00155 , B64D11/0015 , B64D11/04
摘要： A closet comprises a support rail, a light, a raceway, a rub strip, and a hinge unit. The support rail is capable of providing structural support for the closet and having a plurality of connecting elements. The light has a first set of connecting elements capable of being engaged to the plurality of connecting elements. The raceway has a second set of connecting elements capable of being engaged to the plurality of connecting elements. The rub strip has a third set of connecting elements capable of being engaged to the plurality of connecting elements. The hinge unit has a shape capable of being connected to the support rail.
摘要翻译：衣柜包括支撑轨，灯，轨道，摩擦条和铰链单元。支撑轨能够为衣柜提供结构支撑并且具有多个连接元件。光具有能够与多个连接元件接合的第一组连接元件。滚道具有能够与多个连接元件接合的第二组连接元件。摩擦带具有能够接合到多个连接元件的第三组连接元件。铰链单元具有能够连接到支撑轨的形状。

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