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    • 3. 发明授权
    • Method of manufacturing a workpiece chuck
    • 制造工件卡盘的方法
    • US07331097B2
    • 2008-02-19
    • US10919817
    • 2004-08-17
    • William M. StoneRobert Lopez
    • William M. StoneRobert Lopez
    • B23P25/00
    • H01L21/68785H01L21/67103H01L21/68792Y10S269/903Y10T29/49885Y10T29/49982Y10T29/49984Y10T29/49998Y10T29/53191Y10T29/53961
    • A workpiece chuck includes an upper assembly on which can be mounted a flat workpiece such as a semiconductor wafer. A lower assembly is mountable to a base that supports the chuck. A non-constraining attachment means such as vacuum, springs or resilient washers applied to the chuck holds the upper assembly to the lower assembly, the lower assembly to the base and can hold the wafer to the top surface of the upper assembly. By holding the chuck together by non-constraining means, the chuck layers can move continuously relative to each other under expansion forces caused by temperature effects, such that mechanical stresses on the chuck and resulting deformation of the chuck and workpiece over temperature are substantially eliminated. A plurality of support members including inclined surfaces provided between an upper and lower portion of the chuck maintain the top surface of the chuck and any workpiece mounted thereon at a constant height over temperature.
    • 工件卡盘包括上部组件,其上可以安装诸如半导体晶片的平坦工件。 下部组件可安装到支撑卡盘的基座上。 施加到卡盘上的非限制性附接装置例如真空,弹簧或弹性垫圈将上部组件固定到下部组件,下部组件固定到基部并且可以将晶片保持在上部组件的顶部表面。 通过非约束装置将卡盘夹在一起,卡盘层可以在由温度效应引起的膨胀力下彼此连续移动,从而基本上消除了卡盘上的机械应力以及卡盘和工件在温度下的变形。 包括设置在卡盘的上部和下部之间的倾斜表面的多个支撑构件保持卡盘的顶表面和安装在其上的任何工件,其温度恒定高度。
    • 4. 发明授权
    • Workpiece chuck
    • 工件卡盘
    • US06328096B1
    • 2001-12-11
    • US09473099
    • 1999-12-28
    • William M. StoneRobert Lopez
    • William M. StoneRobert Lopez
    • F28F700
    • H01L21/68785H01L21/67103H01L21/68792Y10S269/903Y10T29/49885Y10T29/49982Y10T29/49984Y10T29/49998Y10T29/53191Y10T29/53961
    • A workpiece chuck includes an upper assembly on which can be mounted a flat workpiece such as a semiconductor wafer. A lower assembly is mountable to a base that supports the chuck. A non-constraining attachment means such as vacuum, springs or resilient washers applied to the chuck holds the upper assembly to the lower assembly, the lower assembly to the base and can hold the wafer to the top surface of the upper assembly. By holding the chuck together by non-constraining means, the chuck layers can move continuously relative to each other under expansion forces caused by temperature effects, such that mechanical stresses on the chuck and resulting deformation of the chuck and workpiece over temperature are substantially eliminated. A plurality of support members including inclined surfaces provided between an upper and lower portion of the chuck maintain the top surface of the chuck and any workpiece mounted thereon at a constant height over temperature.
    • 工件卡盘包括上部组件,其上可以安装诸如半导体晶片的平坦工件。 下部组件可安装到支撑卡盘的基座上。 施加到卡盘上的非限制性附接装置例如真空,弹簧或弹性垫圈将上部组件固定到下部组件,下部组件固定到基部并且可以将晶片保持在上部组件的顶部表面。 通过非约束装置将卡盘夹在一起,卡盘层可以在由温度效应引起的膨胀力下彼此连续移动,从而基本上消除了卡盘上的机械应力以及卡盘和工件在温度下的变形。 包括设置在卡盘的上部和下部之间的倾斜表面的多个支撑构件保持卡盘的顶表面和安装在其上的任何工件,其温度恒定高度。
    • 5. 发明授权
    • Fluid distribution manifold
    • 流体分配歧管
    • US5474102A
    • 1995-12-12
    • US195253
    • 1994-02-14
    • Robert Lopez
    • Robert Lopez
    • A61H33/02F16L41/03
    • F16L41/03A61H33/60A61H33/02Y10T137/5283Y10T137/85938
    • This invention relates to a fluid distribution manifold, where the input piping is inserted in through the manifold's circular intake opening and onto its cylindrical input port. The manifold's intake opening leads through a cylindrical path to a closed terminal end. Along the inner manifold wall, there are arranged in a sequence, which may be in a straight line, a series of straight lines or rows, a spiral, or an alternating 90- or 180-degree arrangement, a number of distribution outlet openings and their respective ports, which may be barbed or ribbed on their outer surface. The manifold has the further utility of being expandable to larger sizes. This is achieved by removing the closed terminal end from one manifold and then inserting and connecting that open terminal end in through another manifold's circular intake opening and into its intake port. To achieve a more uniform fluid flow pressure at each of the distribution outlet ports, two or more manifold devices may be fitted and connected to intake piping which is fitted with a T-joint or Y-joint. In a preferred embodiment, the manifold is composed of acrylonitrile-butadiene-styrene, and is used to distribute air in spas and hydrotherapy baths.
    • 本发明涉及一种流体分配歧管,其中输入管道通过歧管的圆形进气口插入其圆柱形输入口。 歧管的进气口通过圆柱形路径通向封闭的末端。 沿着内歧管壁,按顺序排列,其可以是直线,一系列直线或行,螺旋形或90度或180度的交替排列,多个分配出口开口和 它们各自的端口可在其外表面上带刺或带肋。 该歧管具有可扩展到更大尺寸的进一步的实用性。 这是通过从一个歧管中移除封闭的末端,然后通过另一个歧管的圆形进气口插入和连接该开放的终端并进入其进气口来实现的。 为了在每个分配出口处实现更均匀的流体流动压力,两个或多个歧管装置可以装配并连接到装配有T形接头或Y形接头的进气管道。 在优选的实施方案中,歧管由丙烯腈 - 丁二烯 - 苯乙烯组成,用于在空气和水疗浴中分配空气。
    • 7. 发明授权
    • Fluid distribution manifold with circularly arranged output ports
    • 具有圆形布置输出端口的流体分配歧管
    • US5156642A
    • 1992-10-20
    • US745745
    • 1991-08-16
    • Robert Lopez
    • Robert Lopez
    • F16L35/00
    • F16L41/03F16L35/00Y10T137/0402Y10T137/5109Y10T137/85938
    • This invention relates to a fluid distribution manifold, where the input piping is inserted in through the manifold's circular intake opening and into its cylindrical intake port. The manifold's intake port has an intake restraint rim on its inner surface in order to prevent the intake piping from being inserted too far into the manifold. In some embodiments, the manifold also has a glue trap located below the intake restraint rim, and of approximately the same dimensions and geometry as the intake restraint rim. The manifold's intake port leads to a cup- or parabola-shaped intake reservoir, where fluid is briefly housed prior to its distribution through several distribution output opening, and their respective distribution outlet ports. In some embodiments, the manifold's distribution outlet ports each possess an output restraint rim on the inner surface of each of the distribution outlet ports, to prevent the output piping from being inserted too far into the port. In a preferred embodiment, the manifold is constructed of polyvinyl chloride or acylonitrile-butadiene-styrene, and is used to distribute fluids, such as water and ozone, in spas and hydrotherapy baths.
    • 本发明涉及一种流体分配歧管,其中输入管道通过歧管的圆形进气口插入其圆柱形进气口。 歧管的进气口在其内表面上具有进气限制边缘,以防止进气管道插入歧管中太远。 在一些实施例中,歧管还具有位于进气限制边缘下方并且具有与进气限制边缘大致相同的尺寸和几何形状的胶合阱。 歧管的进气口通向一个杯形或抛物线形的进气容器,其中流体在其分配通过多个分配输出开口之前被短暂地容纳,以及它们各自的分配出口。 在一些实施例中,歧管的分配出口端口各自在每个分配出口端口的内表面上具有输出限制边缘,以防止输出管道被插入到太远的端口中。 在优选的实施方案中,歧管由聚氯乙烯或酰基腈 - 丁二烯 - 苯乙烯构成,并用于在水疗和水疗浴中将流体如水和臭氧分配。