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    • 3. 发明授权
    • Tactile surface inspection during device fabrication or assembly
    • 器件制造或装配期间的触觉表面检查
    • US07989229B2
    • 2011-08-02
    • US11852493
    • 2007-09-10
    • James H. Covell
    • James H. Covell
    • G01R31/26
    • H01L22/12
    • Processes for inspecting a surface during device fabrication include contacting the surface with a tactile sensor. The tactile sensor is an electroluminescent tactile sensor array or a current electrode sensor array or a capacitive sensor array. The sensor is configured to convert local stress resulting from contact with the surface into light intensity and/or modulation in local current density. Both the light intensity and current density are linearly proportional to the local stress. The image stress provided by the sensor can then be captured by focusing the light intensity onto a suitable detector to provide a topographical image of the surface. Current density can alternatively be directly sensed via high resolution electrode array.
    • 用于在装置制造期间检查表面的工艺包括使表面与触觉传感器接触。 触觉传感器是电致发光触觉传感器阵列或电流电极传感器阵列或电容传感器阵列。 该传感器被配置成将局部应力转化为局部电流密度的光强度和/或调制。 光强度和电流密度都与局部应力成线性比例。 然后可以通过将光强度聚焦到合适的检测器上来提供传感器提供的图像应力以提供表面的地形图像。 可以通过高分辨率电极阵列直接感测电流密度。
    • 5. 发明授权
    • Method and apparatus for removing known good die
    • 去除已知好模具的方法和装置
    • US07806312B2
    • 2010-10-05
    • US11551754
    • 2006-10-23
    • Lannie R. BoldeJames H. CovellMark W. Kapfhammer
    • Lannie R. BoldeJames H. CovellMark W. Kapfhammer
    • B23K1/018
    • H01L21/67144B23K1/018
    • A method and structure is disclosed for detaching a chip from a substrate that delays the delivery of shear force to the chip until the connectors attaching the chip to the substrate are soft enough that the delivery of shear force will not damage the chip's connectors. More particularly, the shear force is created by a bimetallic disk that, when heat is applied, is transformed into shearing force. The shearing force is delayed by a delaying device until the connectors connecting the chip to the substrate are soft enough that the application of shear force will separate the chip from the substrate without damaging the chip's connectors. The delaying device includes a physical gap that may be adjusted to control when the shear force is applied to the chip.
    • 公开了一种用于将芯片从衬底上分离的方法和结构,其将剪切力的传递延迟到芯片,直到将芯片附接到衬底的连接器足够柔软,使得剪切力的传递不会损坏芯片的连接器。 更具体地,剪切力由双金属盘产生,当加热时,双金属盘被转化为剪切力。 剪切力由延迟装置延迟,直到将芯片连接到基板的连接器足够柔软,使得施加剪切力将使芯片与基板分离而不损坏芯片的连接器。 该延迟装置包括物理间隙,该物理间隙可以被调整以控制何时施加剪切力到芯片。
    • 7. 发明申请
    • TACTILE SURFACE INSPECTION DURING DEVICE FABRICATION OR ASSEMBLY
    • 设备制造期间的手表表面检查或装配
    • US20090068770A1
    • 2009-03-12
    • US11852493
    • 2007-09-10
    • James H. Covell
    • James H. Covell
    • H01L21/66
    • H01L22/12
    • Processes for inspecting a surface during device fabrication include contacting the surface with a tactile sensor. The tactile sensor is an electroluminescent tactile sensor array or a current electrode sensor array or a capacitive sensor array. The sensor is configured to convert local stress resulting from contact with the surface into light intensity and/or modulation in local current density. Both the light intensity and current density are linearly proportional to the local stress. The image stress provided by the sensor can then be captured by focusing the light intensity onto a suitable detector to provide a topographical image of the surface. Current density can alternatively be directly sensed via high resolution electrode array.
    • 用于在装置制造期间检查表面的工艺包括使表面与触觉传感器接触。 触觉传感器是电致发光触觉传感器阵列或电流电极传感器阵列或电容传感器阵列。 该传感器被配置成将局部应力转化为局部电流密度的光强度和/或调制。 光强度和电流密度都与局部应力成线性比例。 然后可以通过将光强度聚焦到合适的检测器上来提供传感器提供的图像应力以提供表面的地形图像。 可以通过高分辨率电极阵列直接感测电流密度。